Patents Assigned to Excillum AB
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Patent number: 11979972Abstract: A liquid metal jet X-ray source including an electromagnetic pump for pumping the liquid metal. The electromagnetic pump includes a core having a core diameter and an outer yoke with a thickness of at least 20% of the core diameter. Preferably, the thickness of the outer yoke is at least 20% of the core diameter plus 6% of a radial distance between an outside of the core and an inside of the yoke.Type: GrantFiled: May 7, 2020Date of Patent: May 7, 2024Assignee: EXCILLUM ABInventors: Björn Hansson, Per Takman, Ulf Lundström, Tomi Tuohimaa
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Patent number: 11963286Abstract: An X-ray source including: a liquid target source configured to provide a liquid target moving along a flow axis; an electron source configured to provide an electron beam; and a liquid target shaper configured to shape the liquid target to include a non-circular cross section with respect to the flow axis, wherein the non-circular cross section has a first width along a first axis and a second width along a second axis, wherein the first width is shorter than the second width, and wherein the liquid target includes an impact portion being intersected by the first axis; wherein the x-ray source is configured to direct the electron beam towards the impact portion such that the electron beam interacts with the liquid target within the impact portion to generate X-ray radiation.Type: GrantFiled: April 20, 2022Date of Patent: April 16, 2024Assignee: EXCILLUM ABInventors: Björn Hansson, Per Takman, Yuli Wang, Shiho Tanaka
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Patent number: 11910515Abstract: An electromagnetic pump for pumping an electrically conductive liquid, including a first conduit section and a second conduit section. The electromagnetic pump further includes a current generator arranged to provide an electric current through the liquid in the first conduit section and the liquid in the second conduit section such that a direction of the electric current is intersecting the flow of the liquid in the first conduit section and in the second conduit section, and a magnetic field generating arrangement arranged to provide a magnetic field passing through the liquid in the first conduit section and the second conduit section such that a direction of the magnetic field is intersecting the flow of the liquid and the direction of the electric current.Type: GrantFiled: May 7, 2020Date of Patent: February 20, 2024Assignee: EXCILLUM ABInventors: Ulf Lundström, Björn Hansson, Per Takman, Tomi Tuohimaa
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Patent number: 11892576Abstract: A method for characterizing an electron beam in a liquid metal jet X-ray source. The method includes providing the electron beam and directing the electron beam to an interaction region; providing an electron beam dump connected to ground potential for receiving the electron beam after it has traversed the interaction region; scanning the electron beam over at least part of the interaction region; measuring X-ray radiation generated by interaction between the electron beam and the electron beam dump during the scanning to obtain an X-ray profile; and calculating an electron beam characteristic based on the X-ray profile. Also, a corresponding liquid metal jet X-ray source.Type: GrantFiled: January 17, 2023Date of Patent: February 6, 2024Assignee: EXCILLUM ABInventors: Per Takman, Tomi Tuohimaa, Ulf Lundström
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Publication number: 20240015875Abstract: X-ray sources including an electron source, an adjustment means for adjusting an orientation of the electron beam generated by the electron source, a focusing means configured to focus the electron beam in accordance with a focusing setting, a beam orientation sensor arranged to generate a signal indicating an orientation of the electron beam relative to a target position, and a controller that is operably connected to the focusing means, the beam orientation sensor and the adjustment means. Also, X-ray sources including a target orientation sensor and a target adjustment means, wherein the controller is configured to cause the beam adjustment means and/or target adjustment means to adjust the relative orientation between the electron beam and the target.Type: ApplicationFiled: September 21, 2023Publication date: January 11, 2024Applicant: Excillum ABInventors: Johan KRONSTEDT, Ulf LUNDSTRÖM, Per TAKMAN
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Publication number: 20230380786Abstract: An X-ray system is disclosed, including an electron-impact X-ray source configured to generate an X-ray beam; a radiation-shielded housing having an X-ray outlet port; an X-ray optical element arranged within the radiation-shielded housing configured to direct the X-ray beam toward the outlet port; a shutter arranged at the outlet port, the shutter being movable between an open position at which X-ray output through the outlet port is allowed, and a closed position at which X-ray output through the outlet port is prevented; and a detector arranged to detect X-ray radiation from the X-ray source directed towards the outlet port, wherein the detector is configured to detect X-ray radiation within a first energy range. A corresponding method of operating an X-ray system is also disclosed.Type: ApplicationFiled: October 18, 2021Publication date: November 30, 2023Applicant: Excillum ABInventor: Ulf LUNDSTRÖM
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Patent number: 11800625Abstract: X-ray sources including an electron source, an adjustment means for adjusting an orientation of the electron beam generated by the electron source, a focusing means configured to focus the electron beam in accordance with a focusing setting, a beam orientation sensor arranged to generate a signal indicating an orientation of the electron beam relative to a target position, and a controller that is operably connected to the focusing means, the beam orientation sensor and the adjustment means. Also, X-ray sources including a target orientation sensor and a target adjustment means, wherein the controller is configured to cause the beam adjustment means and/or target adjustment means to adjust the relative orientation between the electron beam and the target.Type: GrantFiled: November 4, 2019Date of Patent: October 24, 2023Assignee: Excillum ABInventors: Johan Kronstedt, Ulf Lundström, Per Takman
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Patent number: 11742171Abstract: A method for imaging a sample by means of an X-ray detector is disclosed, including providing an electron beam interacting with a target to generate X-ray radiation emitted from an X-ray spot on the target, moving the sample relative to the target, deflecting the electron beam such that the X-ray spot is moved over the target simultaneously and in accordance with the movement of the sample, and detecting X-ray radiation emitted from the X-ray spot and interacting with the sample.Type: GrantFiled: July 2, 2020Date of Patent: August 29, 2023Assignee: EXCILLUM ABInventor: Björn Hansson
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Publication number: 20230238204Abstract: An X-ray imaging system, including a target; an electron beam source configured to provide an electron beam for interaction with the target to generate X-ray radiation; electron optics configured to alternately direct the electron beam to at least a first and a second location on the target; an X-ray detector array configured to receive X-ray radiation generated at the first and second locations on the target; a sample position region for receiving a sample to be exposed to generated X-ray radiation, the sample position region being located in a region where X-ray radiation generated at the first location overlaps with X-ray radiation generated at the second location; and a processing unit coupled to the X-ray detector array, the processing unit being configured to create an image of a sample, positioned in the sample position region, based on the X-ray radiation originating from the first location and from the second location.Type: ApplicationFiled: April 29, 2021Publication date: July 27, 2023Applicant: Excillum ABInventors: Björn HANSSON, Julius HÅLLSTEDT, Tomi TUOHIMAA, Ulf LUNDSTRÖM, Daniel NILSSON
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Publication number: 20230176239Abstract: A method for characterizing an electron beam in a liquid metal jet X-ray source. The method includes providing the electron beam and directing the electron beam to an interaction region; providing an electron beam dump connected to ground potential for receiving the electron beam after it has traversed the interaction region; scanning the electron beam over at least part of the interaction region; measuring X-ray radiation generated by interaction between the electron beam and the electron beam dump during the scanning to obtain an X-ray profile; and calculating an electron beam characteristic based on the X-ray profile. Also, a corresponding liquid metal jet X-ray source.Type: ApplicationFiled: January 17, 2023Publication date: June 8, 2023Applicant: Excillum ABInventors: Per TAKMAN, Tomi TUOHIMAA, Ulf LUNDSTRÖM
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Patent number: 11651927Abstract: An X-ray source including a liquid target source configured to provide a liquid target in an interaction region of the X-ray source, an electron source adapted to provide an electron beam directed towards the interaction region, such that the electron beam interacts with the liquid target to generate X-ray radiation, and an electron collector arranged at a distance downstream of the interaction region, as seen along a travel direction of the electron beam. The electron collector includes an impact portion configured to absorb electrons of the electron beam impinging thereon, and the impact portion is arranged so as to be oblique with respect to the travel direction of the electron beam at the impact portion.Type: GrantFiled: December 17, 2019Date of Patent: May 16, 2023Assignee: EXCILLUM ABInventors: Tomi Tuohimaa, Ulf Lundström, Björn Hansson
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Patent number: 11579318Abstract: A method for characterizing an electron beam in a liquid metal jet X-ray source. The method includes providing the electron beam and directing the electron beam to an interaction region; providing an electron beam dump connected to ground potential for receiving the electron beam after it has traversed the interaction region; scanning the electron beam over at least part of the interaction region; measuring X-ray radiation generated by interaction between the electron beam and the electron beam dump during the scanning to obtain an X-ray profile; and calculating an electron beam characteristic based on the X-ray profile. Also a corresponding liquid metal jet X-ray source.Type: GrantFiled: November 12, 2020Date of Patent: February 14, 2023Assignee: EXCILLUM ABInventors: Per Takman, Tomi Tuohimaa, Ulf Lundström
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Publication number: 20220404514Abstract: A method for characterizing an electron beam in a liquid metal jet X-ray source. The method includes providing the electron beam and directing the electron beam to an interaction region; providing an electron beam dump connected to ground potential for receiving the electron beam after it has traversed the interaction region; scanning the electron beam over at least part of the interaction region; measuring X-ray radiation generated by interaction between the electron beam and the electron beam dump during the scanning to obtain an X-ray profile; and calculating an electron beam characteristic based on the X-ray profile. Also a corresponding liquid metal jet X-ray source.Type: ApplicationFiled: November 12, 2020Publication date: December 22, 2022Applicant: Excillum ABInventors: Per TAKMAN, Tomi TUOHIMAA, Ulf LUNDSTRÖM
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Patent number: 11438996Abstract: A method for protecting an X-ray source including: a liquid jet generator configured to form a liquid jet moving along a flow axis; an electron source configured to provide an electron beam interacting with the liquid jet to generate X-ray radiation; the method including: generating the liquid jet: monitoring a quality measure indicating a performance of the liquid jet; identifying, based on the quality measure, a malperformance of the liquid jet; and if said malperformance is identified, causing the X-ray source to enter a safe mode for protecting the X ray source. Further, to corresponding devices.Type: GrantFiled: February 8, 2019Date of Patent: September 6, 2022Assignee: EXCILLUM ABInventors: Tomi Tuohimaa, Per Takman, Daniel Larsson
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Publication number: 20220262591Abstract: A method for imaging a sample by means of an X-ray detector is disclosed, including providing an electron beam interacting with a target to generate X-ray radiation emitted from an X-ray spot on the target, moving the sample relative to the target, deflecting the electron beam such that the X-ray spot is moved over the target simultaneously and in accordance with the movement of the sample, and detecting X-ray radiation emitted from the X-ray spot and interacting with the sample.Type: ApplicationFiled: July 2, 2020Publication date: August 18, 2022Applicant: Excillum ABInventor: Björn HANSSON
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Publication number: 20220254595Abstract: An X-ray source including: a liquid target source configured to provide a liquid target moving along a flow axis; an electron source configured to provide an electron beam; and a liquid target shaper configured to shape the liquid target to include a non-circular cross section with respect to the flow axis, wherein the non-circular cross section has a first width along a first axis and a second width along a second axis, wherein the first width is shorter than the second width, and wherein the liquid target includes an impact portion being intersected by the first axis; wherein the x-ray source is configured to direct the electron beam towards the impact portion such that the electron beam interacts with the liquid target within the impact portion to generate X-ray radiation.Type: ApplicationFiled: April 20, 2022Publication date: August 11, 2022Applicant: Excillum ABInventors: Björn HANSSON, Per TAKMAN, Yuli WANG, Shiho TANAKA
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Publication number: 20220230832Abstract: A liquid metal jet X-ray source including an electromagnetic pump for pumping the liquid metal. The electromagnetic pump includes a core having a core diameter and an outer yoke with a thickness of at least 20% of the core diameter. Preferably, the thickness of the outer yoke is at least 20% of the core diameter plus 6% of a radial distance between an outside of the core and an inside of the yoke.Type: ApplicationFiled: May 7, 2020Publication date: July 21, 2022Applicant: Excillum ABInventors: Björn HANSSON, Per TAKMAN, Ulf LUNDSTRÖM, Tomi TUOHIMAA
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Publication number: 20220220951Abstract: An electromagnetic pump for pumping an electrically conductive liquid, including a first conduit section and a second conduit section. The electromagnetic pump further includes a current generator arranged to provide an electric current through the liquid in the first conduit section and the liquid in the second conduit section such that a direction of the electric current is intersecting the flow of the liquid in the first conduit section and in the second conduit section, and a magnetic field generating arrangement arranged to provide a magnetic field passing through the liquid in the first conduit section and the second conduit section such that a direction of the magnetic field is intersecting the flow of the liquid and the direction of the electric current.Type: ApplicationFiled: May 7, 2020Publication date: July 14, 2022Applicant: Excillum ABInventors: Ulf LUNDSTRÖM, Björn HANSSON, Per TAKMAN, Tomi TUOHIMAA
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Patent number: 11350512Abstract: A method for controlling an X-ray source configured to emit, from an X-ray spot on a target, X-ray radiation generated by an interaction between an electron beam and the target, wherein the X-ray spot is determined by the field of view of an X-ray optical system of the X-ray source. The method includes providing the target, providing the electron beam forming an electron spot on the target and interacting with the target to generate X-ray radiation, and adjusting a width and total power of the electron beam such that a maximum of the power density profile in the electron spot is below a predetermined limit, and such that a total power delivered to the target in the X-ray spot is increased.Type: GrantFiled: June 7, 2019Date of Patent: May 31, 2022Assignee: EXCILLUM ABInventors: Per Takman, Ulf Lundström
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Patent number: 11342154Abstract: The present inventive concept relates to an X-ray source comprising: a liquid target source configured to provide a liquid target moving along a flow axis; an electron source configured to provide an electron beam; and a liquid target shaper configured to shape the liquid target to comprise a non-circular cross section with respect to the flow axis, wherein the non-circular cross section has a first width along a first axis and a second width along a second axis, wherein the first width is shorter than the second width, and wherein the liquid target comprises an impact portion being intersected by the first axis; wherein the x-ray source is configured to direct the electron beam towards the impact portion such that the electron beam interacts with the liquid target within the impact portion to generate X-ray radiation.Type: GrantFiled: November 30, 2018Date of Patent: May 24, 2022Assignee: EXCILLUM ABInventors: Björn Hansson, Per Takman, Yuli Wang, Shiho Tanaka