Abstract: An abrasive construction for modifying a surface of a workpiece, such as a semiconductor wafer. The abrasive construction comprises: a three-dimensional, textured, fixed abrasive element; at least one resilient element generally coextensive with the fixed abrasive element; and at least one rigid element generally coextensive with and interposed between the resilient element and the fixed abrasive element, wherein the rigid element has a Young's Modulus greater than that of the resilient element.

Abstract: A method and apparatus is disclosed for texturizing magnetic storage disks. The disk texturizing apparatus utilizes a combination of servomotors for rotating the disk and oscillating the disk towards and away from a texturizing media. The servomotors are controlled by a closed-loop control system which monitors and synchronizes the angular and linear position of the disk. Through such control, the disk rotation speed may be modulated in conjunction with the linear oscillation, thereby allowing a higher degree of triangularity in the texturization pattern. A pattern generation system and a graphical user interface for specifying, modeling, generating, modifying and displaying disk texturizing patterns are also disclosed. The texturizing pattern may be displayed in polar plot and linear plot form so that the user can more easily visualize and design the texturizing pattern.

Abstract: The present invention provides an automated rigid-disk finishing system with "fly-by-wire" control of each of the relevant parameters involved in the texturing process. The system includes an abrasive tape, a means for forcibly pressing the tape against the substrate to cut microscopic grooves into the substrate's surface, and a control means for simultaneously controlling the speed and tension of the tape and for sensing the tension developed in the tape on both sides of the tape/substrate interface. The described system is thus capable of establishing tape speed and tape tension simultaneously, while providing a measure of the actual work being accomplished on the rigid disk surface.

Abstract: The present invention provides an automated rigid-disk finishing system with "fly-by-wire" control of each of the relevant parameters involved in the texturing process. The system includes an abrasive tape, a means for forcibly pressing the tape against the substrate to cut microscopic grooves into the substrate's surface, and a control means for simultaneously controlling the speed and tension of the tape and for sensing the tension developed in the tape on both sides of the tape/substrate interface. The described system is thus capable of establishing tape speed and tape tension simultaneously, while providing a measure of the actual work being accomplished on the rigid disk surface.