Patents Assigned to FERROTEC MATERIAL TECHNOLOGIES CORPORATION
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Publication number: 20240177974Abstract: A wafer support includes a base material including a machinable ceramic, a protective layer covering a surface of the base material, and conductive members and placed at least partially inside the base material. The protective layer includes a material that is less corrodible by plasma than the base material.Type: ApplicationFiled: February 5, 2024Publication date: May 30, 2024Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATIONInventors: Wataru YAMAGISHI, Kazumasa MORI, Hitoshi KOUNO, Shunichi ETO
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Patent number: 11940466Abstract: A ceramic according to the present invention includes, in mass %, BN: 20.0 to 55.0%, SiC: 5.0 to 40.0%, ZrO2 and/or Si3N4: 3.0 to 60.0%. The ceramic has a coefficient of thermal expansion at ?50 to 500° C. of 1.0×10?6 to 5.0×10?6/° C., is excellent in low electrostatic properties (106 to 1014 ?·cm in volume resistivity) and free-machining properties, and is thus suitable to be used for, for example, a probe guiding member for guiding probes of a probe card, and a socket for package inspection.Type: GrantFiled: October 19, 2018Date of Patent: March 26, 2024Assignee: FERROTEC MATERIAL TECHNOLOGIES CORPORATIONInventors: Wataru Yamagishi, Kazumasa Mori, Shunichi Eto
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Publication number: 20230312423Abstract: A ceramic containing, in mass %: Si3N4: 20.0 to 60.0%, ZrO2: 25.0 to 70.0%, at least one selected from SiC and AlN: 2.0 to 17.0%, where AlN is 10.0% or less, at least one selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO and V2O5: 5.0 to 15.0%, wherein Fn calculated from the following equation (1) satisfies 0.02 to 0.40. This ceramic can be laser machined with high efficiency.Type: ApplicationFiled: April 8, 2021Publication date: October 5, 2023Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATIONInventors: Wataru YAMAGISHI, Kazumasa MORI, Shunichi ETO
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Patent number: 11659767Abstract: A thermoelectric element-containing package according to one aspect of the present disclosure includes a thermoelectric conversion module including: a first substrate having first and second main surfaces; a second substrate having third and fourth main surfaces; and a plurality of thermoelectric elements that are sandwiched between the first and second substrates and arranged along the second main surface and the third main surface. The thermoelectric element-containing package further includes: a frame joined to the first and second substrates so as to form a hermetically sealed space surrounding the plurality of thermoelectric elements and disposed between the first substrate and the second substrate; and a placement member that is disposed on the first main surface of the first substrate or the fourth main surface of the second substrate and to which an additional device is to be connected.Type: GrantFiled: February 14, 2018Date of Patent: May 23, 2023Assignees: NGK SPARK PLUG CO., LTD., FERROTEC MATERIAL TECHNOLOGIES CORPORATIONInventors: Masahiro Ogawa, Tetsuya Kato, Takayuki Hachida
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Patent number: 11485686Abstract: A ceramic contains, in mass percent: Si3N4: 20.0 to 60.0%, ZrO2: 25.0 to 70.0%, and one or more oxides selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO, and V2O5: 5.0 to 15.0%. The ceramic has a coefficient of thermal expansion as high as that of silicon and an excellent mechanical strength, allows fine machining with high precision, and prevents particles from being produced.Type: GrantFiled: November 7, 2018Date of Patent: November 1, 2022Assignee: FERROTEC MATERIAL TECHNOLOGIES CORPORATIONInventors: Wataru Yamagishi, Kazumasa Mori, Shunichi Eto
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Publication number: 20220194860Abstract: A mixed member of SiC and Si, the mixed member being formable without using a resin as a medium irrespective of its shape. To achieve the object, a feature of the mixed member of SiC and Si (SiC/Si mixed member) lies in that a SiC member (filler) in a chip form or powdery form is dispersed in a Si member (base material) having a polycrystalline structure. Further, the SiC/Si mixed member with such a feature can be configured such that a SiC coating layer is formed on a surface of the SiC/Si mixed member.Type: ApplicationFiled: December 17, 2020Publication date: June 23, 2022Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATIONInventor: Mayumi NAKAMOTO
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Patent number: 11306029Abstract: An alumina sintered body comprising 0.01 to 1.0 mass % of one or more types selected from Ta, Nb, and V in terms of oxide thereof. The alumina sintered body may further comprise 0.01 to 1.0 mass % of Mg in terms of Mg oxide. It is particularly preferable that the alumina sintered body has an alumina purity of 99% or more. An alumina sintered body having low dielectric loss as compared with that in related art can therefore be produced at low cost.Type: GrantFiled: July 31, 2018Date of Patent: April 19, 2022Assignee: FERROTEC MATERIAL TECHNOLOGIES CORPORATIONInventors: Shunichi Eto, Osanobu Fukuo, Kiyotaka Saitou
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Publication number: 20210188714Abstract: A ceramic contains, in mass percent: Si3N4: 20.0 to 60.0%, ZrO2: 25.0 to 70.0%, and one or more oxides selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO, and V2O5: 5.0 to 15.0%. The ceramic has a coefficient of thermal expansion as high as that of silicon and an excellent mechanical strength, allows fine machining with high precision, and prevents particles from being produced.Type: ApplicationFiled: November 7, 2018Publication date: June 24, 2021Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATIONInventors: Wataru YAMAGISHI, Kazumasa MORI, Shunichi ETO
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Publication number: 20200239368Abstract: An alumina sintered body comprising 0.01 to 1.0 mass % of one or more types selected from Ta, Nb, and V in terms of oxide thereof. The alumina sintered body may further comprise 0.01 to 1.0 mass % of Mg in terms of Mg oxide. It is particularly preferable that the alumina sintered body has an alumina purity of 99% or more. An alumina sintered body having low dielectric loss as compared with that in related art can therefore be produced at low cost.Type: ApplicationFiled: July 31, 2018Publication date: July 30, 2020Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATIONInventors: Shunichi ETO, Osanobu FUKUO, Kiyotaka SAITOU
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Publication number: 20200241047Abstract: A ceramic according to the present invention includes, in mass %, BN: 20.0 to 55.0%, SiC: 5.0 to 40.0%, ZrO2 and/or Si3N4: 3.0 to 60.0%. The ceramic has a coefficient of thermal expansion at ?50 to 500° C. of 1.0×10?6 to 5.0×10?6/° C., is excellent in low electrostatic properties (106 to 1014 ?·cm in volume resistivity) and free-machining properties, and is thus suitable to be used for, for example, a probe guiding member for guiding probes of a probe card, and a socket for package inspection.Type: ApplicationFiled: October 19, 2018Publication date: July 30, 2020Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATIONInventors: Wataru YAMAGISHI, Kazumasa MORI, Shunichi ETO