Patents Assigned to FUJIFILM Electronic Materials Taiwan Co., Ltd.
  • Chemical liquid purification apparatus and purification method using the same
    Patent number: 11541335
    Abstract: A chemical liquid purification apparatus includes a tank body, a return tube, a liquid sending pump, a filtration device and a piping. The tank body has a liquid passage port and a circulation port communicated to a storage space inside the tank body. The return tube has one end connected to the circulation port and another end extending to the storage space. The liquid sending pump and the filtration device are located outside the tank body in between the liquid passage port and the circulation port. The piping is connecting the liquid sending pump and the filtration device to the liquid passage port and the circulation port.
    Type: Grant
    Filed: May 27, 2020
    Date of Patent: January 3, 2023
    Assignee: FUJIFILM Electronic Materials Taiwan Co., Ltd.
    Inventors: Kenichi Tanaka, Cheng-Chieh Fan, Shen-Ping Huang
  • CHEMICAL LIQUID PURIFICATION APPARATUS AND PURIFICATION METHOD USING THE SAME
    Publication number: 20200376419
    Abstract: A chemical liquid purification apparatus includes a tank body, a return tube, a liquid sending pump, a filtration device and a piping. The tank body has a liquid passage port and a circulation port communicated to a storage space inside the tank body. The return tube has one end connected to the circulation port and another end extending to the storage space. The liquid sending pump and the filtration device are located outside the tank body in between the liquid passage port and the circulation port. The piping is connecting the liquid sending pump and the filtration device to the liquid passage port and the circulation port.
    Type: Application
    Filed: May 27, 2020
    Publication date: December 3, 2020
    Applicant: FUJIFILM Electronic Materials Taiwan Co., Ltd.
    Inventors: KENICHI TANAKA, CHENG-CHIEH FAN, SHEN-PING HUANG