Abstract: A plasma asher which obviates microwave leakage and attendant problems by providing a microwave trap proximate the opening through which the plasma tube exits the microwave cavity.

Abstract: A microwave powered discharge device which utilizes a TM.sub.NMO cavity. A conductive body is positioned at a null in a discharge device which utilizes a TM.sub.210 cavity to reduce direct coupling from the microwave coupling means, e.g., slot of the cavity. A plurality of TM.sub.110 cavities are ganged together, and a single discharge tube extends through all of the cavities.

Abstract: An inert ultraviolet light reaction chamber is provided with a flow of liquid on its light transmitting wall surface. The fluid prevents the build up of light blocking deposits, controls the temperature, and filters out undesired portions of the spectrum.

Abstract: A method and apparatus for performing deep UV photolithography which utilizes a microwave generated electrodeless light source for producing deep UV radiation. This results in faster semiconductor exposure times and less system downtime for changing failed bulbs as well as other advantages which are detailed herein.

Abstract: A method and apparatus for curing three dimensional objects such as cylindrical two piece cans with ultraviolet light without having to rotate the cans, at conventional can line speeds and using a minimum number of lamp units. In a first embodiment, the cans are moved, without rotation, between at least a pair of ultraviolet lamp units so that the closest surfaces to the lamp units are substantially within the focal planes thereof. The lamp units are parallel to the direction of can movement or are rotated from that direction by a small angle with the lamp units of each pair being rotated by the same angle but in opposite senses. In a further embodiment, each lamp unit, instead of being faced by another lamp unit, is faced by a reflector to increase the cure speed attainable with the same number of lamp units.