Abstract: A catalytic reactor is used in the exhaust tract of a high pressure, high flow rate ozone asher to prevent resist deposit fouling of the exhaust tract.

Abstract: Apparatus for treating a fluid by irradiating a thin film of the fluid with high intensity, concentrated light. The irradiation affects chemical physical or biological activity changes in the fluid.

Abstract: A microwave powered lamp wherein microwave energy is coupled to a cavity in which an electrodeless bulb is disposed, such that a rotating field of constant ellipticity is established in the cavity.

Abstract: A surface discharge excimer light source which employs a one sided cell wherein all electrodes and the dielectric are on one side of the discharge space. The light produced by the device is neither shadowed nor attenuated by an electrode, and the electrode temperatures can be closely controlled. The construction of the device eliminates the need to maintain parallelism of the discharge space and close tolerances.

Abstract: An optical system comprising reflectors of elliptical and circular cross section for efficiently coupling radiation from a large scale radiation source such as a light bulb into an optical fiber bundle.

Abstract: A method and apparatus for stripping a photoresist layer from a semiconductor wafer, wherein oxidizing gas is fed from the edge of the wafer to the center. The oxidizing gas may be directed so that it is incident on the heated wafer support platform before it is incident on the wafer.

Abstract: An improved bulb mounting arrangement for an electrodeless lamp to prevent the bulb from rotating during lamp operation. The shape of the bulb mounting projection ends and the shape of the cavity side wall openings are arranged so as to cooperate with each other to preclude substantial rotation of the bulb.

Abstract: Apparatus for cooling the lamp envelope of an electrodeless lamp which includes a conduit for carrying cooling gas into the vicinity of the lamp envelope and directing the cooling gas towards the lamp envelope through a slotted orifice in a wall of the conduit. The slotted orifice is preferably oriented with its long dimension substantially perpendicular to the conduct orifice and substantially parallel to the axis of a rotating lamp envelope.

Abstract: A reaction chamber for performing a chemical vapor deposition process wherein the window through which the light must pass is prevented from becoming clouded. The chamber is divided by baffles into a reactant zone, a buffer zone, and a window zone, and the momentum flux densities of the gases flowing in the respective zones are about matched. Additionally, discontinuities are provided on the walls of the reactor to impede diffusion of the reactant gas towards the window.

Abstract: An electrodeless lamp system and method for providing light output having a controlled spectral distribution. A lamp having a fill which is not fully vaporized at the lamp operating temperature and which emits in a characteristic region of the spectrum is used. A function generator generates a function signal, and the magnitude of the lamp output in the characteristic region or the ratio of such magnitude and a magnitude in a different characteristic region is compared with the function signal. The difference signal is used to control the amount of cooling gas which is incident on the lamp bulb to control the spectral distribution of the radiation which is emitted by the lamp.

Abstract: An electrodeless lamp which couples strong microwave fields to a very small bulb of diameter about 1/2' or smaller. The lamp is operated in a mode which is independent of the height of the cavity and which provides electric field lines parallel to such height. The height of the cavity is substantially reduced as compared with prior lamps to provide strong coupling of the electric field to the bulb.

Abstract: An ozone generating cell which utilizes a quartz dielectric for providing high purity ozone. The quarts dielectric is cemented to one of the electrodes of the cell, and is then ground to a desired dimension.

Abstract: A microwave powered electrodeless lamp which employs a hybrid cylindrical cavity which is part mesh and part solid. The cylindrical mesh portion permits the lamp to be used with an external reflector while the cylindrical solid portion enables a plurality of waveguides to be coupled to the cavity for high power operation.

Abstract: A method of modifying light and heat emission patterns from an electrodeless lamp which includes an envelope containing a plasma-forming medium and a source of electromagnetic energy coupled to the plasma-forming medium. The method consists of rotating the envelope at a rate fast enough to modify surface heating and the distribution of radiating plasma along lines of constant longitude on the envelope.

Abstract: A microwave generated light source including a lamp envelope having apparatus for rotating the envelope about an axis which includes an electric motor with a hollow shaft, an elongated stem attached to the envelope and extending within the hollow shaft and a wire-like spring clip for retaining the stem within the hollow shaft.

Abstract: An electrodeless lamp bulb is rotated about an axis which is at a designated angle to the predominant direction of the electrical field. This has the effect of evening out the temperature distribution about the bulb and reducing the formation of hot and cold spots.

Abstract: Apparatus for inactivating the source of microwaves for an electrodeless lamp to prevent accidental release of microwaves into the environment as a result of failure to assemble the lamp with a conductive mesh. An electrodeless lamp which is provided with a gas manifold for directing a stream of cooling gas against a lamp envelope is provided with a gas leak passageway which is blocked when the conductive mesh assembly is in place. A pressure switch in fluid communication with the gas manifold is activated and prevents operation of the microwave source when pressure is reduced as a result of gas leaking through the gas leak passageway.

Abstract: An electrodeless lamp which couples to a small bulb and obtains a relatively high light output therefrom. A cavity which comprises a compound resonant structure including vestibule and reflector portions is provided. The combination of vestibule and reflector results in a condition of resonance throughout the cavity, whereby strong fields are coupled to the small bulb and a reflector is provided for directing and enhancing light output.

Abstract: An electrodeless lamp bulb of modified shape for providing more uniform emission of radiation. In the preferred embodiment the bulb is primarily in the shape of a sphere, but has at least a non-spherical portion comprised of diametrically opposed relatively flattened portions.A microwave generated electrodeless lamp which incorporates the improved bulb provides more spatially uniform radiation at an illumination plane.

Abstract: An apparatus for rapidly stripping a photoresist which utilizes an oxidizing fluid such as ozone. A very thin layer of oxidizing fluid of four millimeters or less is flowed over the photoresist. The fluid flows at high velocity over the resist, while the resist is heated. Additionally, the resist may be irradiated with ultraviolet radiation at an irradiance of at least about 800 milliwatts/cm.sup.2.