Abstract: A pattern forming apparatus comprises a surface treatment system and an ink jet system 14, where a solvent is sprayed from a solvent spray nozzle of the surface treatment system to surface of a glass substrate where a bus line pattern groove is formed. The ink is discharged from an ink discharge nozzle of the ink jet system into the groove of bus line pattern on a glass substrate, and a bus line pattern is formed.

Abstract: An electrostatic chuck is provided for a substrate stage that can be used in plasma treatment of various substrates such as a large-sized glass substrate for a flat panel display (FPD), a semiconductor wafer or the like. The electrostatic chuck is divided into a plurality of electrodes formed into nearly bar-like shapes. In accordance with an exemplary embodiment, each of the divided bar-like electrodes includes an inner electrode and a single layer thermally sprayed film formed on the surface of the inner electrode, with the bar-like electrodes disposed in parallel so as to form a plane electrode.

Abstract: A substrate with plane patterns formed in a liquid process wherein the plane patterns are formed based on a combination of plane shapes by which a difference in internal pressure of a solution between any two points of the solution is small, the solution being ejected onto the substrate so as to form the plane patterns by the liquid process.

Abstract: The present invention provides a liquid crystal display device using a thin-film transistor, and the invention also provides a method for manufacturing the liquid crystal display device. In openings of a first light transmission type photosensitive resin formed on an insulating substrate, a gate electrode, a source line, and a pixel contact layer are prepared. On these components, a gate insulator, a semiconductor layer, an ohmic contact layer (n+ semiconductor layer) and a protective film are prepared. Further, in openings of a second light transmission type photosensitive resin, a source electrode, a drain electrode, and a pixel electrode are prepared. Also, the crossing portion connecting line formed at the opening of the second light transmission type photosensitive resin is, similarly to the source line or the gate line, made of baked silver produced by baking an ink containing silver fine particles plotted by ink jet process.

Abstract: The present invention provides a liquid crystal display device to be operated at high speed and with high precision by improving performance of a thin-film transistor without increasing cross capacity of gate lines and data lines. On an upper layer of a gate insulator GI at an intersection of gate lines GL and data lines DL to be prepared on an active matrix substrate SUB1, which makes up a liquid crystal display panel of a liquid crystal display device, an insulating material with low dielectric constant is dropped by ink jet coating method to prepare another insulator LDP in order to improve performance characteristics of the thin-film transistor to be prepared on a silicon semiconductor layer SI without increasing cross capacity on said intersection.

Abstract: The present invention provides a liquid crystal display device with high brightness and high display quality manufactured at low cost without causing the decrease in transmissivity.

Abstract: A stage body has a holding surface for placing a substrate thereon. A predetermined embossed configuration is formed by embossing on the holding surface, and thereafter an alumina film in an amorphous state is formed by an anodic oxidation process on the holding surface. The alumina film having an amorphous structure is dense and strong to provide high wear resistance and to substantially prevent separation electrification. This provides a substrate stage having high wear resistance and capable of preventing separation electrification.

Abstract: The present invention provides a liquid crystal display device to be operated at high speed and with high precision by improving performance of a thin-film transistor without increasing cross capacity of gate lines and data lines. On an upper layer of a gate insulator GI at an intersection of gate lines GL and data lines DL to be prepared on an active matrix substrate SUB1, which makes up a liquid crystal display panel of a liquid crystal display device, an insulating material with low dielectric constant is dropped by ink jet coating method to prepare another insulator LDP in order to improve performance characteristics of the thin-film transistor to be prepared on a silicon semiconductor layer SI without increasing cross capacity on said intersection.

Abstract: Chromaticity difference is decreased, which is caused by the difference of transmissivity when a light passes through a transparent conductive film to constitute pixels. Optical film thickness of each of transparent conductive films PXR, PXG, and PXB to constitute pixels (a product “nd” of refractive index “n” and film thickness “d”) is varied for each of color filters RF, GF, and BF for each pixel. The transparent conductive film is prepared by coating an ink (produced by dispersing fine particles of a transparent conductive film material such as ITO in a binder) via nozzle of an ink jet device, and then, by baking. Film thickness is controlled by the coating amount of the ink, and refractive index is controlled by volume ratio of the fine particles of conductive material to the binder contained in the transparent conductive film in consideration of those refractive indices.

Abstract: The purpose of the present invention is to provide homogeneous plasma in longitudinal direction of a plasma processing apparatus applicable to multiple processes. A microwave waveguide 10 with a plurality of variable couplers 12 is placed in a vacuum chamber 21. The microwave generated in a microwave generator 23 is introduced into the microwave waveguide 10 via a waveguide 24. And a plasma 22 in the chamber 21 is generated by the microwave 25. Intensity distribution of the microwave 25 in the microwave waveguide 10 can be varied by moving a plurality of variable couplers 12 individually upward or downward as shown by two-way arrow.

Abstract: The present invention provides a technique, by which it is possible to obtain a liquid crystal display panel with high precision by forming very fine pattern of electroconductive film through linking of the areas with different widths, and it is also possible to reduce the number of processes. Like a wide-width electroconductive film and a narrow-width electroconductive film, most of the surface of an underlying film UW of a thin-film transistor substrate SUB1 is turned to lyophobic portion RA, and only the narrow-width gate electrode forming area is turned to lyophilic portion FA. An electroconductive ink is dropped evenly to the gate electrode forming area of the lyophilic portion FA, and a wide-width gate line is formed on the gate line forming area GLA of lyophobic portion RA by direct drawing of IJ.

Abstract: Provided are a method for producing a circular polarization separation sheet and an apparatus for coating layer formation, whereby a circular polarization separation sheet which selectively reflects a light in an entire visible light range is easily obtainable. A method for producing a circular polarization separation sheet including a step of obtaining on a substrate a photopolymerizable composition containing a liquid crystal compound, and a step of converting the coating layer into a resin layer having a cholesteric regularity, characterized in that the resin layer forming step includes: a selected ultraviolet light irradiation step (1) of irradiating the coating layer with a selected ultraviolet light having an illumination intensity of less than 10 mW/cm2 under a temperature at 20 to 40° C. for 0.

Abstract: The liquid crystal display device according to the present invention comprising: a liquid crystal display cell including liquid crystal between two substrates facing to each other; a polarizing element provided on each side of the liquid crystal display cell; and at least one film member provided in at least either one area of areas between the liquid crystal display cell and the polarizing element, the polarizing element being formed from a film made of polyvinylalcohol resin, the film member being attached to the polarizing element with a cohesive layer and/or an adhesive layer having a thickness of less than 10 ?m therebetween, and the film member provided in at least either one area of areas between the liquid crystal display cell and the polarizing element having an absolute value of a photoelastic coefficient of less than 10×10?8 cm2/N and having a water absorption of less than 2.0%.

Abstract: The present invention provides a charge neutralizer for accurately irradiating a soft X ray into a narrow gap after a glass substrate is lifted up. A soft X ray is introduced into a gap “d” from a soft X ray charge neutralizer 14, and the soft X ray is detected by a soft X ray optical axis monitor 16. Mounting position adjusting means 15 is adjusted by a detection output from said soft X ray optical axis monitor, and optical axis alignment is performed. Next, according to information from a database 19, a control unit 17 controls gap adjusting means 13, and charge neutralization is performed. Charge neutralization can also be performed by controlling the gap “d” by the gap adjusting means 13 while judging neutralizing conditions as to whether a charged potential measured by an electrometer 18 is within an allowable value by the control unit 17 or not.

Abstract: A method of manufacturing an active matrix substrate includes forming wiring lines each having a matrix pattern on a substrate such that a wiring line extending in any one of a first direction and a second direction is separated from another wiring line at an intersection; forming a laminated portion composed of an insulating layer and a semiconductor layer on a portion of the wiring line and the intersection; and forming a conductive layer electrically connecting the separated wiring line, and a pixel electrode electrically connected to the wiring line via the semiconductor layer on the laminated portion.

Abstract: A reflecting plate in form of dual half-ellipses comprises a first ellipse having a first focal point and a second focal point, and a second ellipse having a first focal point and a second focal point. The first ellipse and the second ellipse commonly share the first focal point. A cross-section of the reflecting plate is designed in such a form that the dual half-ellipses are aligned with each other, and that contours of the first ellipse and the second ellipse are divided by a straight line, which includes the commonly shared first focal point and the other focal points. The reflecting plate encloses the line light source by the dual half-ellipses and reflects a light from the line light source toward the diffusion plate arranged above by specular reflection and by diffused reflection. As a result, uneven brightness is eliminated at the boundary of the reflecting plate designed in form of dual half-ellipses.