Patents Assigned to Gatan, Inc.
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Publication number: 20130134331Abstract: Disclosed are embodiments of an ion beam shield for use in an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The ion beam shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing.Type: ApplicationFiled: December 29, 2012Publication date: May 30, 2013Applicant: GATAN, INC.Inventor: Gatan, Inc.
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Patent number: 8445874Abstract: Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing.Type: GrantFiled: April 7, 2011Date of Patent: May 21, 2013Assignee: Gatan Inc.Inventors: Steven Thomas Coyle, John Andrew Hunt
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Publication number: 20130099116Abstract: An apparatus for simultaneous detection of backscattered electrons and photons from a sample. The device includes a direct detection backscattered electron detector and a photon detector. The backscattered electron detector has a reflective surface that reflects photons emitted by the sample onto the photon detector.Type: ApplicationFiled: October 25, 2011Publication date: April 25, 2013Applicant: GATAN, INC.Inventors: David J. Stowe, John Hunt, Simon A. Galloway
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Patent number: 8410443Abstract: An apparatus for simultaneous detection of backscattered electrons and photons from a sample. The device includes a direct detection backscattered electron detector and a photon detector. The backscattered electron detector has a reflective surface that reflects photons emitted by the sample onto the photon detector.Type: GrantFiled: October 25, 2011Date of Patent: April 2, 2013Assignee: Gatan, Inc.Inventors: David J. Stowe, John Hunt, Simon A. Galloway
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Patent number: 8384050Abstract: Disclosed are embodiments of an ion beam sample preparation thermal management apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing. A heat sink means is configured to conduct heat away from the sample undergoing sample preparation in the ion beam.Type: GrantFiled: April 7, 2011Date of Patent: February 26, 2013Assignee: Gatan, Inc.Inventors: Steven Thomas Coyle, John Andrew Hunt
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Patent number: 8320704Abstract: Methods for creating reference images of fiber optic sensor plates for use in electron microscopes. The methods include taking of reference images of stripe or dot patterns. The spatial frequency of the stripe or dot patterns is such that image artifacts of the fiber optic stacks is recorded. The reference images can then be used to correct for these artifacts.Type: GrantFiled: September 22, 2008Date of Patent: November 27, 2012Assignee: Gatan, Inc.Inventor: Paul E. Mooney
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Publication number: 20120286175Abstract: The disclosed apparatus enables attachment to a sample to be excised from a frozen bulk sample, the transfer of the excised sample from the bulk sample to a separate cooled support structure by means of a manipulator tip that can be cooled and maintained at a temperature below that of vitreous ice and which provides both an active cooling path and cryogenic shielding to maintain the temperature of the excised sample below that of vitreous ice. The cryogenic shielding also helps minimize contamination of the cooled sample by condensation of volatile material. A method is disclosed for extracting a portion of a frozen sample, comprising attaching a thermally-isolated cooled manipulator tip to the sample with vapor deposition and removing a portion of the sample affixed to the tip without changing phase of the portion of the sample being removed, with a focused ion beam.Type: ApplicationFiled: May 10, 2012Publication date: November 15, 2012Applicant: GATAN, INC.Inventors: Andrew Nicholas Searle, Simon Andrew Galloway, Klaus Leifer
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Patent number: 8283642Abstract: Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises a tilting ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing. The tilting ion beam irradiating means may direct ions at the sample from more than one tilt angle.Type: GrantFiled: April 7, 2011Date of Patent: October 9, 2012Assignee: Gatan, Inc.Inventors: Steven Thomas Coyle, John Andrew Hunt
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Publication number: 20120223228Abstract: A microtome for in situ residence within a chamber of a scanning electron microscope (SEM) and a SEM including the microtome is disclosed. The microtome includes a specimen holder for holding a specimen thereon at high voltage to produce a retardation field thereat and a movable knife. The SEM includes a backscatter electron detector disposed adjacent to specimen holder. The knife arranged is to be carried into engagement with the specimen on the specimen holder to slice a portion of the specimen away to expose a new face of the specimen without interfering with the high voltage on the specimen, and is mounted so that after having engaged the specimen to expose a new face of the specimen it is withdrawn to a retracted position whereupon it does not interfere with the retardation field.Type: ApplicationFiled: February 29, 2012Publication date: September 6, 2012Applicant: GATAN, INC.Inventor: Simon Galloway
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Publication number: 20120085938Abstract: Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing.Type: ApplicationFiled: April 7, 2011Publication date: April 12, 2012Applicant: GATAN, INC.Inventors: Steven Thomas Coyle, John Andrew Hunt
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Publication number: 20120085939Abstract: Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises a tilting ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing. The tilting ion beam irradiating means may direct ions at the sample from more than one tilt angle.Type: ApplicationFiled: April 7, 2011Publication date: April 12, 2012Applicant: GATAN, INC.Inventors: Steven Thomas Coyle, John Andrew Hunt
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Publication number: 20120085923Abstract: Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing. Additionally, apparatus kits are disclosed that enable the use of the same shields in the observation of prepared samples.Type: ApplicationFiled: April 7, 2011Publication date: April 12, 2012Applicant: GATAN, INC.Inventors: Steven Thomas Coyle, John Andrew Hunt
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Publication number: 20120085937Abstract: Disclosed are embodiments of an ion beam sample preparation thermal management apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing. A heat sink means is configured to conduct heat away from the sample undergoing sample preparation in the ion beam.Type: ApplicationFiled: April 7, 2011Publication date: April 12, 2012Applicant: GATAN, INC.Inventors: Steven Thomas Coyle, John Andrew Hunt
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Patent number: 8129679Abstract: Methods are disclosed for operating a device having a high energy particle detector wherein the particles create first incoming traversal events, outgoing backscatter events, higher-order in and out events and incoming events caused by particles which backscatter out of the device, hit nearby mechanical structures and are scattered back into the device. Exemplary method steps include discriminating incoming traversal events from outgoing backscatter events, higher-order in and out events and incoming events by limiting dose rate to a level at ensures that separate events do not overlap and discriminating events from background and from other events based on total energy in each event; discriminating backscatter events from incoming traversal events based on electron path shape; or determining that a first event and a second event are coincident with each other and separating incoming form backscatter events based on electron path shape and energy level.Type: GrantFiled: June 25, 2010Date of Patent: March 6, 2012Assignee: Gatan, Inc.Inventor: Paul Mooney
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Patent number: 7964846Abstract: A lens-coupled camera for an electron microscope is disclosed. The camera includes a CCD, a scintillator, at least one lens, and a mirror, such that at least the CCD and scintillator are housed in the vacuum chamber of the electron microscope, which has only one vacuum chamber. In a further embodiment, the CCD, scintillator, lens and mirror are affixed to a fixed mechanical linkage such that the CCD, scintillator, lens and mirror move together when the camera is retracted.Type: GrantFiled: July 31, 2009Date of Patent: June 21, 2011Assignee: Gatan, Inc.Inventors: Paul Mooney, Daniel Moonen
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Publication number: 20100327161Abstract: Methods are disclosed for operating a device having a high energy particle detector wherein the particles create first incoming traversal events, outgoing backscatter events, higher-order in and out events and incoming events caused by particles which backscatter out of the device, hit nearby mechanical structures and are scattered back into the device. Exemplary method steps include discriminating incoming traversal events from outgoing backscatter events, higher-order in and out events and incoming events by limiting dose rate to a level at ensures that separate events do not overlap and discriminating events from background and from other events based on total energy in each event; discriminating backscatter events from incoming traversal events based on electron path shape; or determining that a first event and a second event are coincident with each other and separating incoming form backscatter events based on electron path shape and energy level.Type: ApplicationFiled: June 25, 2010Publication date: December 30, 2010Applicant: GATAN, INC.Inventor: Paul Mooney
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Publication number: 20100123082Abstract: A method is disclosed for acquiring an image in a sensor having a substrate side and a front side comprising illuminating the semiconductor image sensor with electrons that approach the sensor from the substrate side.Type: ApplicationFiled: November 18, 2009Publication date: May 20, 2010Applicant: GATAN, INC.Inventor: Paul Mooney
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Publication number: 20100123077Abstract: A simplification of the charge-collection pixel of an imaging detector for high-energy electrons is disclosed, incorporating removal of the buffer amplifier. While sacrificing speed and noise performance of the readout somewhat and therefore appearing counter-intuitive, this configuration has the potential to significantly reduce the susceptibility of the pixel to radiation damage.Type: ApplicationFiled: November 18, 2009Publication date: May 20, 2010Applicant: GATAN, INC.Inventors: Paul Mooney, Alexander Jozef Gubbens
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Patent number: 7700917Abstract: An apparatus for holding a specimen to be viewed in a focused beam microscope, which can be an electron microscope or a focused ion beam microscope. The apparatus has a base and a specimen carriage with specimen mounting surface in a first plane and an ion beam screen or knife blade. The relative position between the ion beam screen and the specimen carriage are remotely adjustable while the apparatus is mounted in the focused beam microscope. In a further embodiment, the apparatus is transferable between an ion beam milling device and the focused beam microscope while the milling device and the microscope share a common vacuum.Type: GrantFiled: October 4, 2007Date of Patent: April 20, 2010Assignee: Gatan, Inc.Inventors: Simon Galloway, Richard Vince
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Publication number: 20100032576Abstract: A lens-coupled camera for an electron microscope is disclosed. The camera includes a CCD, a scintillator, at least one lens, and a mirror, such that at least the CCD and scintillator are housed in the vacuum chamber of the electron microscope, which has only one vacuum chamber. In a further embodiment, the CCD, scintillator, lens and mirror are affixed to a fixed mechanical linkage such that the CCD, scintillator, lens and mirror move together when the camera is retracted.Type: ApplicationFiled: July 31, 2009Publication date: February 11, 2010Applicant: GATAN, INC.Inventors: Paul Mooney, Daniel Moonen