Patents Assigned to Gatan, Inc.
  • Publication number: 20130134331
    Abstract: Disclosed are embodiments of an ion beam shield for use in an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The ion beam shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing.
    Type: Application
    Filed: December 29, 2012
    Publication date: May 30, 2013
    Applicant: GATAN, INC.
    Inventor: Gatan, Inc.
  • Patent number: 8445874
    Abstract: Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing.
    Type: Grant
    Filed: April 7, 2011
    Date of Patent: May 21, 2013
    Assignee: Gatan Inc.
    Inventors: Steven Thomas Coyle, John Andrew Hunt
  • Publication number: 20130099116
    Abstract: An apparatus for simultaneous detection of backscattered electrons and photons from a sample. The device includes a direct detection backscattered electron detector and a photon detector. The backscattered electron detector has a reflective surface that reflects photons emitted by the sample onto the photon detector.
    Type: Application
    Filed: October 25, 2011
    Publication date: April 25, 2013
    Applicant: GATAN, INC.
    Inventors: David J. Stowe, John Hunt, Simon A. Galloway
  • Patent number: 8410443
    Abstract: An apparatus for simultaneous detection of backscattered electrons and photons from a sample. The device includes a direct detection backscattered electron detector and a photon detector. The backscattered electron detector has a reflective surface that reflects photons emitted by the sample onto the photon detector.
    Type: Grant
    Filed: October 25, 2011
    Date of Patent: April 2, 2013
    Assignee: Gatan, Inc.
    Inventors: David J. Stowe, John Hunt, Simon A. Galloway
  • Patent number: 8384050
    Abstract: Disclosed are embodiments of an ion beam sample preparation thermal management apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing. A heat sink means is configured to conduct heat away from the sample undergoing sample preparation in the ion beam.
    Type: Grant
    Filed: April 7, 2011
    Date of Patent: February 26, 2013
    Assignee: Gatan, Inc.
    Inventors: Steven Thomas Coyle, John Andrew Hunt
  • Patent number: 8320704
    Abstract: Methods for creating reference images of fiber optic sensor plates for use in electron microscopes. The methods include taking of reference images of stripe or dot patterns. The spatial frequency of the stripe or dot patterns is such that image artifacts of the fiber optic stacks is recorded. The reference images can then be used to correct for these artifacts.
    Type: Grant
    Filed: September 22, 2008
    Date of Patent: November 27, 2012
    Assignee: Gatan, Inc.
    Inventor: Paul E. Mooney
  • Publication number: 20120286175
    Abstract: The disclosed apparatus enables attachment to a sample to be excised from a frozen bulk sample, the transfer of the excised sample from the bulk sample to a separate cooled support structure by means of a manipulator tip that can be cooled and maintained at a temperature below that of vitreous ice and which provides both an active cooling path and cryogenic shielding to maintain the temperature of the excised sample below that of vitreous ice. The cryogenic shielding also helps minimize contamination of the cooled sample by condensation of volatile material. A method is disclosed for extracting a portion of a frozen sample, comprising attaching a thermally-isolated cooled manipulator tip to the sample with vapor deposition and removing a portion of the sample affixed to the tip without changing phase of the portion of the sample being removed, with a focused ion beam.
    Type: Application
    Filed: May 10, 2012
    Publication date: November 15, 2012
    Applicant: GATAN, INC.
    Inventors: Andrew Nicholas Searle, Simon Andrew Galloway, Klaus Leifer
  • Patent number: 8283642
    Abstract: Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises a tilting ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing. The tilting ion beam irradiating means may direct ions at the sample from more than one tilt angle.
    Type: Grant
    Filed: April 7, 2011
    Date of Patent: October 9, 2012
    Assignee: Gatan, Inc.
    Inventors: Steven Thomas Coyle, John Andrew Hunt
  • Publication number: 20120223228
    Abstract: A microtome for in situ residence within a chamber of a scanning electron microscope (SEM) and a SEM including the microtome is disclosed. The microtome includes a specimen holder for holding a specimen thereon at high voltage to produce a retardation field thereat and a movable knife. The SEM includes a backscatter electron detector disposed adjacent to specimen holder. The knife arranged is to be carried into engagement with the specimen on the specimen holder to slice a portion of the specimen away to expose a new face of the specimen without interfering with the high voltage on the specimen, and is mounted so that after having engaged the specimen to expose a new face of the specimen it is withdrawn to a retracted position whereupon it does not interfere with the retardation field.
    Type: Application
    Filed: February 29, 2012
    Publication date: September 6, 2012
    Applicant: GATAN, INC.
    Inventor: Simon Galloway
  • Publication number: 20120085938
    Abstract: Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing.
    Type: Application
    Filed: April 7, 2011
    Publication date: April 12, 2012
    Applicant: GATAN, INC.
    Inventors: Steven Thomas Coyle, John Andrew Hunt
  • Publication number: 20120085939
    Abstract: Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises a tilting ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing. The tilting ion beam irradiating means may direct ions at the sample from more than one tilt angle.
    Type: Application
    Filed: April 7, 2011
    Publication date: April 12, 2012
    Applicant: GATAN, INC.
    Inventors: Steven Thomas Coyle, John Andrew Hunt
  • Publication number: 20120085923
    Abstract: Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing. Additionally, apparatus kits are disclosed that enable the use of the same shields in the observation of prepared samples.
    Type: Application
    Filed: April 7, 2011
    Publication date: April 12, 2012
    Applicant: GATAN, INC.
    Inventors: Steven Thomas Coyle, John Andrew Hunt
  • Publication number: 20120085937
    Abstract: Disclosed are embodiments of an ion beam sample preparation thermal management apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing. A heat sink means is configured to conduct heat away from the sample undergoing sample preparation in the ion beam.
    Type: Application
    Filed: April 7, 2011
    Publication date: April 12, 2012
    Applicant: GATAN, INC.
    Inventors: Steven Thomas Coyle, John Andrew Hunt
  • Patent number: 8129679
    Abstract: Methods are disclosed for operating a device having a high energy particle detector wherein the particles create first incoming traversal events, outgoing backscatter events, higher-order in and out events and incoming events caused by particles which backscatter out of the device, hit nearby mechanical structures and are scattered back into the device. Exemplary method steps include discriminating incoming traversal events from outgoing backscatter events, higher-order in and out events and incoming events by limiting dose rate to a level at ensures that separate events do not overlap and discriminating events from background and from other events based on total energy in each event; discriminating backscatter events from incoming traversal events based on electron path shape; or determining that a first event and a second event are coincident with each other and separating incoming form backscatter events based on electron path shape and energy level.
    Type: Grant
    Filed: June 25, 2010
    Date of Patent: March 6, 2012
    Assignee: Gatan, Inc.
    Inventor: Paul Mooney
  • Patent number: 7964846
    Abstract: A lens-coupled camera for an electron microscope is disclosed. The camera includes a CCD, a scintillator, at least one lens, and a mirror, such that at least the CCD and scintillator are housed in the vacuum chamber of the electron microscope, which has only one vacuum chamber. In a further embodiment, the CCD, scintillator, lens and mirror are affixed to a fixed mechanical linkage such that the CCD, scintillator, lens and mirror move together when the camera is retracted.
    Type: Grant
    Filed: July 31, 2009
    Date of Patent: June 21, 2011
    Assignee: Gatan, Inc.
    Inventors: Paul Mooney, Daniel Moonen
  • Publication number: 20100327161
    Abstract: Methods are disclosed for operating a device having a high energy particle detector wherein the particles create first incoming traversal events, outgoing backscatter events, higher-order in and out events and incoming events caused by particles which backscatter out of the device, hit nearby mechanical structures and are scattered back into the device. Exemplary method steps include discriminating incoming traversal events from outgoing backscatter events, higher-order in and out events and incoming events by limiting dose rate to a level at ensures that separate events do not overlap and discriminating events from background and from other events based on total energy in each event; discriminating backscatter events from incoming traversal events based on electron path shape; or determining that a first event and a second event are coincident with each other and separating incoming form backscatter events based on electron path shape and energy level.
    Type: Application
    Filed: June 25, 2010
    Publication date: December 30, 2010
    Applicant: GATAN, INC.
    Inventor: Paul Mooney
  • Publication number: 20100123082
    Abstract: A method is disclosed for acquiring an image in a sensor having a substrate side and a front side comprising illuminating the semiconductor image sensor with electrons that approach the sensor from the substrate side.
    Type: Application
    Filed: November 18, 2009
    Publication date: May 20, 2010
    Applicant: GATAN, INC.
    Inventor: Paul Mooney
  • Publication number: 20100123077
    Abstract: A simplification of the charge-collection pixel of an imaging detector for high-energy electrons is disclosed, incorporating removal of the buffer amplifier. While sacrificing speed and noise performance of the readout somewhat and therefore appearing counter-intuitive, this configuration has the potential to significantly reduce the susceptibility of the pixel to radiation damage.
    Type: Application
    Filed: November 18, 2009
    Publication date: May 20, 2010
    Applicant: GATAN, INC.
    Inventors: Paul Mooney, Alexander Jozef Gubbens
  • Patent number: 7700917
    Abstract: An apparatus for holding a specimen to be viewed in a focused beam microscope, which can be an electron microscope or a focused ion beam microscope. The apparatus has a base and a specimen carriage with specimen mounting surface in a first plane and an ion beam screen or knife blade. The relative position between the ion beam screen and the specimen carriage are remotely adjustable while the apparatus is mounted in the focused beam microscope. In a further embodiment, the apparatus is transferable between an ion beam milling device and the focused beam microscope while the milling device and the microscope share a common vacuum.
    Type: Grant
    Filed: October 4, 2007
    Date of Patent: April 20, 2010
    Assignee: Gatan, Inc.
    Inventors: Simon Galloway, Richard Vince
  • Publication number: 20100032576
    Abstract: A lens-coupled camera for an electron microscope is disclosed. The camera includes a CCD, a scintillator, at least one lens, and a mirror, such that at least the CCD and scintillator are housed in the vacuum chamber of the electron microscope, which has only one vacuum chamber. In a further embodiment, the CCD, scintillator, lens and mirror are affixed to a fixed mechanical linkage such that the CCD, scintillator, lens and mirror move together when the camera is retracted.
    Type: Application
    Filed: July 31, 2009
    Publication date: February 11, 2010
    Applicant: GATAN, INC.
    Inventors: Paul Mooney, Daniel Moonen