Patents Assigned to GlobalFoundries
  • Patent number: 11991938
    Abstract: A memory device may be provided, including a first electrode, an insulating element arranged over the first electrode, a second electrode arranged over the insulating element, a switching layer and a conductive line electrically coupled to the second electrode. Each of the first electrode, the insulating element, and the second electrode may include a first side surface and a second side surface. Centers of the first electrode, the insulating element, and the second electrode may be substantially vertically aligned. The first side surface and the second side surface of the second electrode may be substantially vertically aligned with the first side surface and the second side surface of at least one of the insulating element and the first electrode. The switching layer may be conformal to the first side surfaces and the second side surfaces of the second electrode and the insulating element.
    Type: Grant
    Filed: December 29, 2020
    Date of Patent: May 21, 2024
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Desmond Jia Jun Loy, Eng Huat Toh, Shyue Seng Tan
  • Patent number: 11990171
    Abstract: Disclosed is threshold voltage (VT)-programmable field effect transistor (FET)-based memory cell including a first transistor and a second transistor (which has an electric-field based programmable VT) connected in series between two voltage source lines. The gates of the transistors are connected to different wordlines and a sense node is at the junction between the two transistors. In preferred embodiments, the first transistor is a PFET and the second transistor is an NFET. Different operating modes (e.g., write 0 or 1 and read) are achieved using specific combinations of voltage pulses on the wordlines and voltage source lines. The memory cell is non-volatile, exhibits relatively low leakage, and has a relatively small footprint as compared to a conventional memory cell. Also disclosed are a look-up table (LUT) incorporating multiple threshold voltage (VT)-programmable field effect transistor (FET)-based memory cells and associated methods.
    Type: Grant
    Filed: February 15, 2022
    Date of Patent: May 21, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Venkatesh P. Gopinath, Pirooz Parvarandeh
  • Patent number: 11990466
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to improved turn-on voltage of high voltage electrostatic discharge device and methods of manufacture. The structure comprises a high voltage NPN with polysilicon material on an isolation structure located at a base region, the polysilicon material extending to at least one of a collector and emitter of a bipolar junction transistor (BJT), and the polysilicon material completely covering the base region of the BJT.
    Type: Grant
    Filed: October 14, 2021
    Date of Patent: May 21, 2024
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Kyong Jin Hwang, Robert J. Gauthier, Jr., Jie Zeng
  • Patent number: 11990535
    Abstract: Disclosed is a semiconductor structure including a lateral heterojunction bipolar transistor (HBT). The structure includes a substrate (e.g., a silicon substrate), an insulator layer on the substrate, and a semiconductor layer (e.g., a silicon germanium layer) on the insulator layer. The structure includes a lateral HBT with three terminals including a collector, an emitter, and a base, which is positioned laterally between the collector and the emitter and which can include a silicon germanium intrinsic base region for improved performance. Additionally, the collector and/or the emitter includes: a first region, which is epitaxially grown within a trench that extends through the semiconductor layer and the insulator layer to the substrate; and a second region, which is epitaxially grown on the first region. The connection(s) of the collector and/or the emitter to the substrate effectively form thermal exit path(s) and minimize self-heating. Also disclosed is a method for forming the structure.
    Type: Grant
    Filed: October 27, 2021
    Date of Patent: May 21, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Alexander M. Derrickson, Haiting Wang, Judson R. Holt, Vibhor Jain, Richard F. Taylor, III
  • Patent number: 11984503
    Abstract: The present disclosure generally to semiconductor devices, and more particularly to semiconductor devices having high-voltage transistors integrated on a semiconductor-on-insulator substrate and methods of forming the same. The present disclosure provides a semiconductor device including a bulk substrate having an upper surface, a semiconductor layer above the bulk substrate, an insulating layer between the semiconductor layer and the bulk substrate, a source region and a drain region on the bulk substrate, the source region and the drain region are raised above the upper surface of the bulk substrate, in which the source region and the drain region include an epitaxial semiconductor material, a gate dielectric between the source region and the drain region, the gate dielectric having a first portion on the bulk substrate and a second portion on the semiconductor layer, and a gate electrode above the gate dielectric.
    Type: Grant
    Filed: November 3, 2022
    Date of Patent: May 14, 2024
    Assignee: GlobalFoundries Dresden Module One LLC &Co. KG
    Inventors: Ruchil Kumar Jain, Alban Zaka
  • Patent number: 11984160
    Abstract: Circuits that include resistive memory elements and methods of using such circuits to generate a physical unclonable function. The circuit includes a first resistive memory element, a second resistive memory element, a first transistor having a source/drain region connected to the first resistive memory element, and a second transistor having a source/drain region connected to the second resistive memory element. The circuit further includes a first inverter having an input connected to a first node between the first transistor and the first resistive memory element, and a second inverter having an input connected to a second node between the second transistor and the second resistive memory element.
    Type: Grant
    Filed: February 24, 2022
    Date of Patent: May 14, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Pirooz Parvarandeh, Periyapatna G. Venkatesh
  • Patent number: 11979145
    Abstract: A disclosed structure includes a section (e.g., an always on (AON) section) with at least one N-channel transistor (NFET) and at least one P-channel transistor (PFET). The structure further includes a switch with first and second inputs connected to receive positive and negative bias voltages, respectively, and first and second outputs connected to bias back gates of the NFET(s) and PFET(s), respectively, of the section. The structure is also configured to generate select signals for controlling the input-to-output connections established by the switch. In a power saving mode, these signals cause the switch to establish input-to-output connections resulting only in reverse back biasing of the NFET(s) and PFET(s) of the section. In a functional mode, these signals can cause the switch to establish input-to-output connections resulting in either forward back biasing or reverse back biasing. Also disclosed is a method of operating the structure.
    Type: Grant
    Filed: December 12, 2022
    Date of Patent: May 7, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Navneet K. Jain, Mahbub Rashed
  • Patent number: 11978510
    Abstract: The present disclosure generally relates to memory devices and methods of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices incorporating reference cells for achieving high sensing yield. The present disclosure provides a memory device including a main cell structure including a switching element arranged between a pair of conductors, and a reference cell structure electrically coupled to the main cell structure. The reference cell structure includes a switching element arranged between a pair of conductors, in which the switching element of the reference cell structure has a dimension that is different from a dimension of the switching element of the main cell structure.
    Type: Grant
    Filed: July 28, 2021
    Date of Patent: May 7, 2024
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Curtis Chun-I Hsieh, Wei-Hui Hsu, Wanbing Yi, Yi Jiang, Kai Kang, Juan Boon Tan
  • Patent number: 11978733
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to high-voltage electrostatic discharge (ESD) devices and methods of manufacture. The structure comprising a vertical silicon controlled rectifier (SCR) connecting to an anode, and comprising a buried layer of a first dopant type in electrical contact with an underlying continuous layer of a second dopant type within a substrate.
    Type: Grant
    Filed: August 5, 2021
    Date of Patent: May 7, 2024
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Kyong Jin Hwang, Milova Paul, Sagar P. Karalkar, Robert J. Gauthier, Jr.
  • Patent number: 11977258
    Abstract: Disclosed are a structure with a substrate-embedded waveguide and a method of forming the structure. The waveguide includes cladding material lining a trench in a substrate, a core in the trench on the cladding material, and at least one cavity within the core. Each cavity extends from one end of the core toward the opposite end and contains a low refractive index material or is under vacuum so the waveguide is an arrow waveguide. An insulator layer is on the substrate and extends laterally over the waveguide and a semiconductor layer is on the insulator layer. Additionally, depending upon the embodiment, an additional waveguide can be aligned above the substrate-embedded waveguide either on the isolation region or on a waveguide extender that extends at least partially through the isolation region and the insulator layer to the waveguide.
    Type: Grant
    Filed: December 29, 2022
    Date of Patent: May 7, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Laura J. Silverstein, Steven M. Shank, Judson R. Holt, Yusheng Bian
  • Patent number: 11978661
    Abstract: Disclosed is a structure with ultralow-K (ULK) dielectric-gap wrapped contact(s). The structure includes an opening, which extends through a dielectric layer and is aligned above a device. A contact is within the opening and electrically connected to the device. Instead of the contact completely filling the opening, a ULK dielectric-gap (e.g., an air or gas-filled gap or a void) at least partially separates the contact from the sidewall(s) of the contact opening and further wraps laterally around the contact. Also disclosed is a method for forming the structure and, particularly, for forming a ULK dielectric-gap by etching back an exposed top end of an adhesive layer initially lining a contact opening to form a gap between the sidewall(s) of the opening and the contact and then capping the gap with an additional dielectric layer such that the gap is filled with air or gas or is under vacuum.
    Type: Grant
    Filed: December 11, 2020
    Date of Patent: May 7, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Fuad H. Al-Amoody, Felix P. Anderson, Spencer H. Porter, Mark D. Levy, Siva P. Adusumilli
  • Patent number: 11972999
    Abstract: A structure includes an electrical device, and an active contact landed on a portion of the electrical device. The active contact includes a first body of a first material. A thermal dissipation pillar is adjacent the active contact and unlanded on but over the portion of the electrical device. The thermal dissipation pillar includes a second body of a second material having a higher thermal conductivity than the first material. The thermal dissipation pillar may be in thermal communication with a wire in a dielectric layer over the active contact and the thermal dissipation pillar. The electrical device can be any integrated circuit device that generates heat.
    Type: Grant
    Filed: December 7, 2021
    Date of Patent: April 30, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Mark D. Levy, Rajendran Krishnasamy, Michael J. Zierak, Siva P. Adusumilli
  • Patent number: 11971572
    Abstract: Disclosed is an optical waveguide including a waveguide core and waveguide cladding surrounding the waveguide core. The waveguide cladding includes at least one stack of cladding material layers positioned laterally adjacent to a sidewall of the waveguide core such that each cladding material layer in the stack abuts the sidewall of the waveguide core. Each of the cladding material layers in the stack has a smaller refractive index than the waveguide core and at least two of the cladding material layers in the stack have different refractive indices, thereby tailoring field confinement and reshaping the optical mode. Different embodiments include different numbers of cladding material layers in the stack, different stacking orders of the cladding material layers, different waveguide core types, symmetric or asymmetric cladding structures on opposite sides of the waveguide core, etc. Also disclosed is a method of forming the optical waveguide.
    Type: Grant
    Filed: February 18, 2022
    Date of Patent: April 30, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Shesh Mani Pandey, Yusheng Bian, Francis O. Afzal
  • Patent number: 11973478
    Abstract: Apparatuses include (among other components) a first gain device connected to receive an initial voltage, a second gain device in series with the first gain device and connected to receive output of the first gain device, differential gain devices connected to receive outputs from the first gain device and the second gain device (the differential gain devices provide opposite voltage outputs from the apparatus) and high-frequency compensation feed-forward paths connected to the first gain device and the second gain device.
    Type: Grant
    Filed: September 2, 2021
    Date of Patent: April 30, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Xu Zhang, Mingming Zhang, Hanqing Zhao, Lukun Zhai, Dan Liu, Xuan Li
  • Patent number: 11967637
    Abstract: A disclosed structure includes a fin-based bipolar junction transistor (BJT) with reduced base resistance. The BJT includes one or more semiconductor fins. Each semiconductor fin has opposing sidewalls, a first width, and a base recess, which extends across the first width through the opposing sidewalls. The BJT includes a base region positioned laterally between collector and emitter regions. The base region includes a base semiconductor layer (e.g., an intrinsic base layer), which fills the base recess and which has a second width greater than the first width such that the base semiconductor layer extends laterally beyond the opposing sidewalls. In a BJT with multiple semiconductor fins, the base recess on each semiconductor fin is filled with a discrete base semiconductor layer. The base region further includes an additional base semiconductor layer (e.g., an extrinsic base layer) covering the base semiconductor layer(s). Also disclosed is a method of forming the structure.
    Type: Grant
    Filed: March 7, 2022
    Date of Patent: April 23, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Ali Razavieh, Jagar Singh, Haiting Wang
  • Patent number: 11967635
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. The structure includes: an extrinsic base region within a semiconductor substrate material; a shallow trench isolation structure extending into the semiconductor substrate material and bounding the extrinsic base region; an emitter region adjacent to the shallow trench isolation structure and on a side of the extrinsic base region; and a collector region adjacent to the shallow trench isolation structure and on an opposing side of the extrinsic base region.
    Type: Grant
    Filed: November 23, 2021
    Date of Patent: April 23, 2024
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Jagar Singh, Randy L. Wolf
  • Patent number: 11967664
    Abstract: The present disclosure generally relates to semiconductor devices for use in optoelectronic/photonic applications and integrated circuit (IC) chips. More particularly, the present disclosure relates to photodiodes such as avalanche photodiodes (APDs) and single photon avalanche diodes (SPADs).
    Type: Grant
    Filed: April 20, 2022
    Date of Patent: April 23, 2024
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Ping Zheng, Eng Huat Toh, Cancan Wu, Kiok Boone Elgin Quek
  • Patent number: 11966240
    Abstract: An apparatus includes an amplifier, a pass transistor connected to a load and to an input of the amplifier, and a capacitor connected between the amplifier and the pass transistor.
    Type: Grant
    Filed: November 3, 2021
    Date of Patent: April 23, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Siva K. Chinthu, Veerendranath P. Sundar
  • Patent number: 11961901
    Abstract: The disclosure provides a bipolar transistor structure with multiple bases, and related methods. A bipolar transistor structure includes a first emitter/collector (E/C) material above an insulator. The first E/C material has first sidewall and a second sidewall over the insulator. A first base is above the insulator adjacent the first sidewall of the first E/C material. A second base is above the insulator adjacent the second sidewall of the first E/C material. A second E/C material is above the insulator and adjacent the first base. A width of the first base between the first E/C material and the second E/C material is less than a width of the first E/C material, and the first base protrudes horizontally outward from an end of the first E/C material and an end of the second E/C material.
    Type: Grant
    Filed: April 15, 2022
    Date of Patent: April 16, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventor: Shesh Mani Pandey
  • Patent number: 11955472
    Abstract: Disclosed are embodiments of a semiconductor structure that includes a semiconductor-controlled rectifier (e.g., for electrostatic discharge (ESD) protection). The SCR can be readily integrated into advanced semiconductor-on-insulator processing technology platforms (e.g., a fully depleted silicon-on-insulator (FDSOI) processing technology platform) that employ hybrid semiconductor substrates (i.e., semiconductor substrates with both bulk semiconductor and semiconductor-on-insulator regions) and is configured with an on-Pwell semiconductor-on-insulator gate structure that is tied to an anode terminal to effectively lower the SCR trigger voltage. To further lower the trigger voltage of the SCR, the Pwell on which the gate structure sits may be made narrower than the gate structure and/or the doping profile of the Pwell on which the gate structure sits may be graded (e.g., P to P? closer to insulator layer).
    Type: Grant
    Filed: December 17, 2021
    Date of Patent: April 9, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Meng Miao, Alain Loiseau, Souvick Mitra, Wei Liang, Robert J. Gauthier, Jr., Anindya Nath