Abstract: A process for depositing a diamond-like carbon (DOC) inclusive layer having surface roughness on a substrate is provided. The surface roughness of the DOC inclusive layer improves hydrophobicity, and is thus advantageous in certain instances. In certain embodiments, the layer has an initial contact angle of at least 100 degrees, a surface energy of no more than about 20.2 mN/m, and/or an average hardness of at least about 10 GPa.