Abstract: The invention concerns a method for irradiating a target with a beam approaching target points, involving the following steps: Measuring at least one of the parameters relating to the position of the beam and the intensity of the beam, changing the beam as a function of the at least one measured parameter, particularly as a function of a variance relating to the at least one measured parameter. The method is characterized in that the at least one measured parameter is measured at the most once per target point. Furthermore, the invention concerns a device for irradiating a target in accordance with the invention-based method and a control system for controlling such a device.