Abstract: The invention relates to a measuring probe for non-destructive measuring of the thickness of thin layers, in particular in cavities, which are accessible by an opening or on curved surfaces, with a measuring head, which comprises at least one sensor element and at least one contact spherical cap, assigned to the sensor element on a surface, to be checked, of the cavity, and with a gripping element for positioning and guiding the measuring probe on and/or along the surface to be measured, wherein on the gripping element, a long, elastically yielding guide bar is provided, which accepts the at least one measuring head on its end opposing the gripping element, in such a way that it is moveable with at least one degree of freedom in relation to the guide bar.

Abstract: The invention relates to a measurement stand for holding a measuring probe intended in particular for measuring the thickness of thin layers, and to a method for controlling the measurement stand.

Abstract: The invention relates to a method and a device for measuring the thickness of thin layers over large-area surfaces to be measured (12), in which at least one measuring probe (28), which comprises at least one sensor element (29) and at least one contact spherical cap (31) associated with the sensor element (29), is applied to the surface to be measured (12) in order to obtain a measured value, wherein the large-area surface to be measured (12) is subdivided into individual partial areas (14), a matrix of measurement points (16) is determined for each partial area (14) to be inspected, measured values are ascertained at equidistant measurement points (16) along at least one row (17) of the matrix of the partial area (14) using a device (21) carrying the at least one measuring probe (28), and the measured values are ascertained successively for all rows (17) in the matrix in the partial area (14) and evaluated for this partial area (14).

Abstract: The invention relates to an apparatus and a method for measuring mechanical properties of materials using an indenter which has a predetermined geometry, a device for generating force permitting the indenter to penetrate into a material sample surface of an object of measurement, and a device for measuring the penetration depth, wherein, arranged between a force application portion on which the device for generating force is applied and a shaft with an indenter tip facing towards the material surface of the object of measurement, the indenter has at least one micro-mechanical motion actuator by which at least one radial deflection of the shaft with respect to the force absorption portion of the indenter is capable of being activated or detected.