Abstract: A silica glass crucible is disclosed comprising a barium-doped inner wall layer. The crucible is made by introducing into a rotating crucible mold bulk silica grain to form a bulky wall. After heating the interior of the mold to fuse the bulk silica grains, an inner silica grain, doped with barium, is introduced. The heat at least partially melts the inner silica grain, allowing it to fuse to the wall to form an inner layer. The inner layer of the crucible crystallizes when used in a CZ process, extending the operating life of the crucible.
Type:
Grant
Filed:
December 12, 2001
Date of Patent:
November 4, 2003
Assignee:
Heracus Shin-Estu America
Inventors:
Katsuhiko Kemmochi, Robert Mosier, Paul Spencer