Patents Assigned to HERAEUS EPURIO LLC
  • Cyclic sulfonate compounds as photoacid generators in resist applications
    Patent number: 11292764
    Abstract: Novel photoacid generator compounds are provided. Compositions that include the novel photoacid generator compounds are also provided. The present disclosure further provides methods of making and using the photoacid generator compounds and compositions disclosed herein. The compounds and compositions are useful as photoactive components in chemically amplified resist compositions for various microfabrication applications.
    Type: Grant
    Filed: March 14, 2019
    Date of Patent: April 5, 2022
    Assignee: HERAEUS EPURIO LLC
    Inventors: Yongqiang Zhang, Ram B. Sharma
  • Sulfonic acid derivative compounds as photoacid generators in resist applications
    Patent number: 10976658
    Abstract: Novel photoacid generator compounds are provided. Compositions that include the novel photoacid generator compounds are also provided. The present disclosure further provides methods of making and using the photoacid generator compounds and compositions disclosed herein. The compounds and compositions are useful as photoactive components in chemically amplified resist compositions for various microfabrication applications.
    Type: Grant
    Filed: August 11, 2016
    Date of Patent: April 13, 2021
    Assignee: HERAEUS EPURIO LLC
    Inventors: Yongqiang Zhang, Darin Campo, Ram B. Sharma, Martin Kunz