Patents Assigned to Herseus Quarzglas GmbH & Co. KG
  • Patent number: 6887576
    Abstract: An object of the present invention is to provide a quartz glass body, especially a quartz glass jig for plasma reaction in producing semiconductors having excellent resistance against plasma corrosion, particularly, excellent corrosion resistance against F-based gaseous plasma; and a method for producing the same. A body made of quartz glass containing a metallic element and having an improved resistance against plasma corrosion is provided that contains bubbles and crystalline phase at an amount expressed by projected area of less than 100 mm2 per 100 cm3.
    Type: Grant
    Filed: August 22, 2001
    Date of Patent: May 3, 2005
    Assignees: Herseus Quarzglas GmbH & Co. KG, Shin-Etsu Quartz Products Co., Ltd.
    Inventors: Tatsuhiro Sato, Nobumasa Yoshida, Akira Fujinoki, Kyoichi Inaki, Tomoyuki Shirai