Abstract: A multi-degree-of-freedom table support unit U comprising a lengthwise and crosswise motion mechanism with two outer support plates integrally combined with an inner support plate sandwiched therebetween, and with bearings B installed between the inner support plate and outer support plates. A spherical bearing mechanism consisting of a spherical face 5 formed on a surface of the inner support plate having a spherical body 6 slidably engaged with the spherical face. A rod 8 is installed in an opening 7 formed in at least one of the outer support plates, with its tip connected with the spherical body; and a straight motion bearing mechanism for back-and-forth movement of the rod is provided. There is also provided a multi-degree-of-freedom table mechanism, in which support units with the above structure are used to support a stage 14 on a support frame 13, so that the stage 14 can be moved in X, Y and Z directions by driving the rods of the support units back and forth.

Abstract: There is provided a multi-degree-of-freedom positioning mechanism having a guide shaft and first and second moving members movably mounted on the guide shaft. Each drive is connected with the first and second moving members so as to allow the moving members to travel along the guide shaft. The machanism has a pair of foldably joined equally long links, which are pivotally rotatably engaged with the first and second moving members by first and second couplings. Furthermore, one edge of a table is pivotally rotatably engaged with the joint between the mating links of the foldably joined equally long links, to displaceably support the table.