Patents Assigned to HITACHI HIGH-TECH SCIENCE CORPORATION
  • Patent number: 11927527
    Abstract: When a measurement sample whose absorbance greatly changes depending on a wavelength range is measured, measurement with a high S/N ratio and accuracy can be efficiently performed in a short time. For a plurality of wavelength ranges in wavelength scanning measurement of a measurement sample, based on measurement conditions including one of a plurality of dimming plates (16a to 16e) to be disposed in each wavelength range and a scanning speed of a wavelength to be set in each wavelength range, when wavelength scanning measurement in which the entire measurement wavelength range including all of the plurality of wavelength ranges is scanned at once is performed, a spectrophotometer (100) changes one of the plurality of dimming plates (16a to 16e) and the scanning speed according to the measurement conditions for each wavelength range.
    Type: Grant
    Filed: June 15, 2022
    Date of Patent: March 12, 2024
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Kai Maruyama, Takayuki Wakui
  • Patent number: 11906899
    Abstract: Disclosed is a mask defect repair apparatus that is capable of performing defect repair with high accuracy without exposure of a mask to air while being moved between the mask defect repair apparatus and an inspection device. The mask defect repair apparatus emits charged particle beams with an amount of irradiation therewith which is corrected by a correction unit while supplying gas to a defect of the mask, thereby forming a deposition film.
    Type: Grant
    Filed: February 7, 2020
    Date of Patent: February 20, 2024
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Yoshitomo Nakagawa, Mitsuto Aso, Katsumi Suzuki, Mamoru Okabe, Masakatsu Hasuda
  • Patent number: 11906428
    Abstract: Provided is a spectrofluorophotometer acquiring both a spectrum and a sample image in measurement of fluorescence of a liquid sample. A spectrofluorophotometer includes a light source, an excitation-side spectroscope that performs spectral dispersion of light of the light source and generates excitation light, a fluorescence-side spectroscope that performs spectral dispersion of fluorescence emitted from a sample irradiated with excitation light into monochromatic light, a sample container installation portion for holding a sample container which receives a liquid sample and is formed of a transparent material, a detector that detects fluorescence emitted from the liquid sample, and an image capturing device that captures a sample image of a sample emitting fluorescence.
    Type: Grant
    Filed: December 10, 2021
    Date of Patent: February 20, 2024
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Kai Maruyama, Jun Horigome, Hideyuki Sakamoto
  • Patent number: 11872564
    Abstract: A thermostatic apparatus thermostatically holds a sample container holding a sample. The thermostatic apparatus includes a sample rack which accommodates and holds a plurality of the sample containers and is attachable to and detachable from the thermostatic apparatus; and a heat conduction member which is controlled to a constant temperature and transfers heat to the sample container, in which an opening portion is formed in the sample rack, and when the sample rack is mounted on the thermostatic apparatus, a contact portion forming one part of the heat conduction member directly contacts the sample container by passing through the opening portion, or directly contacts the sample container protruding from the opening portion.
    Type: Grant
    Filed: August 21, 2018
    Date of Patent: January 16, 2024
    Assignee: Hitachi High-Tech Science Corporation
    Inventors: Atsuki Morisaki, Koji Yamamoto, Masahito Ito
  • Publication number: 20240011833
    Abstract: A spectroscopic analysis system includes: an operation panel configured to receive an input of at least one of an upper limit value of a measurement period of a spectroscopic analysis spectrum or a lower limit value of measurement accuracy as a user setting condition related to measurement of the spectroscopic analysis spectrum of a sample; and a control unit configured to derive a predetermined recommended measurement condition that satisfies the user setting condition and cause a display unit to display the recommended measurement condition, in which the recommended measurement condition is at least one of a wavelength range of light to be used for measurement of the spectroscopic analysis spectrum, a sampling interval of a wavelength of the light, a slit width of a diffraction grating of a spectroscope that disperses the light, or a sweep speed of the wavelength of the light.
    Type: Application
    Filed: June 28, 2023
    Publication date: January 11, 2024
    Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Akihiro Nojima, Yusuke Kaga, Takuya Kambayashi, Jun Horigome, Kai Maruyama
  • Patent number: 11867671
    Abstract: The present invention provides a highly versatile method for amino acid analysis, the method enabling separation and analysis of amino acids in a sample with high precision in a shorter time. This method is a method for amino acid analysis, the method including a step of allowing a sample containing a plurality of amino acids to flow together with an eluent 2 through a separation column 4 packed with a cation exchange resin, thereby separating the amino acids, and a step of detecting the separated amino acids, wherein the eluent 2 is an eluent containing a divalent or higher inorganic acid, a cation source, and water, and having a pH of 5.0 or lower, and the sample is allowed to flow through the separation column 4 heated by applying a temperature gradient including a temperature region of 100° C. or higher.
    Type: Grant
    Filed: December 19, 2019
    Date of Patent: January 9, 2024
    Assignees: NATIONAL UNIVERSITY CORPORATION SAITAMA UNIVERSITY, HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventor: Masami Shibukawa
  • Patent number: 11835438
    Abstract: An automatic sample preparation apparatus that automatically prepares a sample piece from a sample and includes a focused ion beam irradiation optical system, an electron beam irradiation optical system configured to irradiate an electron beam from a direction different from a direction of the focused ion beam, a sample piece transfer device configured to hold and transfer the sample piece separated and extracted from the sample, a detector configured to detect secondary charged particles emitted from an irradiation object, and a computer configured to recognize a position of the sample piece transfer device by image-recognition using an image data of the focused ion beam and the electron beam generated by irradiating the sample piece transfer device with the focused ion beam and the electron beam, and drive the sample piece transfer device, wherein the image data includes a reference mark.
    Type: Grant
    Filed: July 13, 2021
    Date of Patent: December 5, 2023
    Assignee: Hitachi High-Tech Science Corporation
    Inventors: Atsushi Uemoto, Tatsuya Asahata, Makoto Sato, Yo Yamamoto
  • Patent number: 11788996
    Abstract: To reduce an arithmetic processing load or an influence of noise at the time of virtual curve calculation processing, provided is a data processing device for a chromatograph, which is configured to execute data processing based on plot data measured by using a chromatograph, the data processing device including a virtual curve calculation data generator configured to obtain a smaller number of pieces of virtual curve calculation data than a number of pieces of the measured plot data; and an arithmetic processor (163) functioning as a virtual curve calculator configured to obtain a virtual curve based on the virtual curve calculation data.
    Type: Grant
    Filed: January 9, 2020
    Date of Patent: October 17, 2023
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Masahito Ito, Masato Fukuda
  • Patent number: 11781998
    Abstract: An inspection method of a membrane electrode assembly includes a first process of acquiring an X-ray transmission image of the membrane electrode assembly, a second process of identifying a luminance-reduced region having a luminance lower than a luminance of a surrounding region in the X-ray transmission image acquired in the first process, a third process of correcting the luminance of the luminance-reduced region identified in the second process, in accordance with a planar size of the luminance-reduced region, based on a correlation between a planar size of a foreign matter in the membrane electrode assembly and change in luminance due to diffraction of X-rays, and a fourth process of finding a thickness of the foreign matter in the membrane electrode assembly based on the luminance corrected in the third process.
    Type: Grant
    Filed: February 14, 2022
    Date of Patent: October 10, 2023
    Assignees: TOYOTA JIDOSHA KABUSHIKI KAISHA, HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Shinya Takeshita, Toshiyuki Takahara
  • Patent number: 11749493
    Abstract: A liquid metal ion source (50) includes: a reservoir (10) configured to hold an ion material (M) forming a liquid metal; a needle electrode (20); an extraction electrode (22) configured to cause an ion of the ion material to be emitted from a distal end of the needle electrode; a beam diaphragm (24), which is arranged on a downstream side of the extraction electrode, and is configured to limit a beam diameter of the ion; and a vacuum chamber (30) configured to accommodate and hold the reservoir, the needle electrode, the extraction electrode, and the beam diaphragm in vacuum, wherein the liquid metal ion source further includes an oxidizing gas introducing portion (40), and wherein the oxidizing gas introducing portion communicates to the vacuum chamber, and is configured to introduce an oxidizing gas into a periphery of the needle electrode.
    Type: Grant
    Filed: September 21, 2020
    Date of Patent: September 5, 2023
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Yoshihiro Koyama, Tatsuya Asahata, Masahiro Kiyohara, Tsunghan Yang
  • Patent number: 11742177
    Abstract: Automated processing is provided. A charged particle beam apparatus includes: an image identity degree determination unit determining whether an identity degree is equal to or greater than a predetermined value, the identity degree indicating a degree of identity between a processing cross-section image that is an SEM image obtained through observation of a cross section of the sample by a scanning electron microscope, and a criterion image that is the processing cross-section image previously registered; and a post-determination processing unit performing a predetermined processing operation according to a result of the determination by the image identity degree determination unit.
    Type: Grant
    Filed: October 13, 2021
    Date of Patent: August 29, 2023
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Ayana Muraki, Tatsuya Asahata, Atsushi Uemoto
  • Patent number: 11721517
    Abstract: Provided is a focused ion beam processing apparatus including: an ion source; a sample stage a condenser lens; an aperture having a slit in a straight line shape; a projection lens and the sample stage, wherein, in a transfer mode, by Köhler illumination, with an applied voltage of the condenser lens when a focused ion beam is focused on a main surface of the projection lens scaled to be 100, the applied voltage is set to be less than 100 and greater than or equal to 80; a position of the aperture is set such that the focused ion beam is masked by the aperture with the one side of the aperture at a distance greater than 0 ?m and equal to or less than 500 ?m from a center of the focused ion beam; and the shape of the slit is transferred onto the sample.
    Type: Grant
    Filed: March 19, 2021
    Date of Patent: August 8, 2023
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Hiroshi Oba, Yasuhiko Sugiyama, Yoshitomo Nakagawa, Koji Nagahara
  • Patent number: 11682536
    Abstract: Provided is a particle beam apparatus capable of performing appropriate switching selectively between charged particle beam and neutral particle beam. A particle beam column (19) includes an ion source (41), a condenser lens (52), a charge exchange grid (55), and an objective lens (56). The ion source (41) generates ions. The condenser lens (52) changes focusing of the ion beam so that switching is performed between ion beam and neutral beam as particle beam with which a sample (S) is irradiated. The charge exchange grid (55) converts at least a part of ion beam into neutral particle beam through neutralization. The objective lens (56) is placed downstream of the charge exchange grid (55). The objective lens (56) reduces the ion beam toward the sample (S) when the sample (S) is irradiated with the neutral particle beam as the particle beam.
    Type: Grant
    Filed: March 16, 2021
    Date of Patent: June 20, 2023
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Koji Nagahara, Yuichi Madokoro
  • Patent number: 11680917
    Abstract: Provided are a controller for a thermal analysis apparatus, with which thermal characteristics of a measurement target can be grasped, and a thermal analysis apparatus. A controller (51) for a thermal analysis apparatus, which is configured to measure thermal behavior accompanying a temperature change caused by one of heating and cooling of a measurement target (X, Y), is configured to: acquire an intensity of a response signal of the measurement target to an electromagnetic wave with which the measurement target is irradiated with respect to a variable of one of a time and a temperature; differentiate the intensity with respect to the variable; and output a derivative value obtained as a result of the differentiation with respect to one of the temperature and the time, or display the derivative value with respect to one of the temperature and the time on a predetermined display (53).
    Type: Grant
    Filed: February 4, 2021
    Date of Patent: June 20, 2023
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Ryokuhei Yamazaki, Susumu Ito
  • Patent number: 11646188
    Abstract: Disclosed is an apparatus and method for analyzing an evolved gas, wherein the precision of detection of a gas component is improved without enlarging the apparatus. The apparatus includes a gas component evolving unit, a detection member for detecting the gas component, and a mixed gas channel for allowing a mixed gas containing the gas component and carrier gas to flow therethrough, and further includes a branch channel branched from the mixed gas channel, an inert gas channel for allowing an inert gas to flow therethrough, a first flow rate regulator for adjusting the flow rate of the carrier gas, a second flow rate regulator for adjusting the flow rate of the inert gas, and a flow rate control unit for controlling the second flow rate regulator such that the flow rate of the mixed gas guided to the detection member is a predetermined value.
    Type: Grant
    Filed: July 20, 2018
    Date of Patent: May 9, 2023
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Ryusuke Hirose, Hideyuki Akiyama, Noriaki Sakai, Masafumi Watanabe
  • Patent number: 11644399
    Abstract: A thermal analysis apparatus includes: a cylindrical heating furnace extending in an axial direction; a weight detector arranged on a rear-end side in the axial direction of the cylindrical heating furnace and including levers extending in the axial direction to detect a weight; a connecting portion for connecting the cylindrical heating furnace and the weight detector to communicate an internal space of the cylindrical heating furnace with an internal space of the weight detector and positioning the levers from the weight detector into the cylindrical heating furnace; sample holding portions connected to tip ends of the levers and arranged inside the cylindrical heating furnace and holding a sample; resistance heaters arranged to cover the weight detector and energized by an electric current of 6 A or less; and a heater control part for controlling an energization state of the resistance heaters to maintain the weight detector at a constant temperature.
    Type: Grant
    Filed: March 6, 2020
    Date of Patent: May 9, 2023
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Takashi Kumazaki, Kentaro Yamada
  • Patent number: 11619617
    Abstract: To make it easy to address the case in which a chromatograph does not appropriately operate. A chromatograph (liquid chromatograph 100) for analyzing a sample by supplying an eluent and the sample and separating a component contained in the sample to detect the component, the chromatograph including: a detection portion (controller 170) configured to detect a fault in the analysis; and an operation controller (controller 170) configured to cause a constituent element related to the analysis to perform at least one of an operation for identifying a factor of the fault and an operation for avoiding the fault.
    Type: Grant
    Filed: September 9, 2019
    Date of Patent: April 4, 2023
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Masahito Ito, Minling Pei, Shinichi Ozawa
  • Patent number: 11600463
    Abstract: This cross-section observation device bombards an object with a charged particle beam to repeatedly expose cross-sections of the object, bombards at least some of the cross-sections from among the plurality of the exposed cross-sections with a charged particle beam to acquire cross-sectional image information describing each of the at least some of the cross-sections, generates for each of these cross-sections a cross-sectional image described by the cross-sectional image information acquired, and generates a three-dimensional image in which the generated cross-sectional images are stacked together.
    Type: Grant
    Filed: March 27, 2018
    Date of Patent: March 7, 2023
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Xin Man, Junzo Azuma
  • Patent number: 11598737
    Abstract: An analyzing apparatus includes a memory unit that stores analysis conditions of each standards specifying analysis conditions for each analytical technique, a control unit, and an analysis unit that performs an analysis in accordance with a predetermined analytical technique. The control unit reads out the analysis conditions of the standard, and the control unit displays analysis conditions in time sequence, the displayed analysis conditions being necessary for the analysis and selected from out of the read-out analysis conditions, or the control unit prompts to input the analysis conditions in time sequence. When the analysis conditions are input, the control unit determines whether or not the input analysis conditions comply with the read-out analysis conditions, and in a case where a result of the determination is positive, the control unit displays a next analysis condition being necessary for the analysis, or the control unit prompts to input the next analysis condition.
    Type: Grant
    Filed: August 20, 2018
    Date of Patent: March 7, 2023
    Assignee: Hitachi High-Tech Science Corporation
    Inventors: Takeshi Umemoto, Shinya Nishimura, Susumu Ito, Nobuaki Okubo
  • Patent number: 11567047
    Abstract: A chromatographic data system processing apparatus includes a standard sample time table for prestoring a first retention time and a first allowable width of each peak of specific components of a standard sample, a determination unit for determining whether a number of peaks coincides with a specified number when a peak cannot be identified, an alteration unit for altering the standard sample time table by increasing the first allowable width of a specific component to an altered allowable width, an identification unit for identifying the peaks based on the altered standard sample time table when all peaks fall within a range of the altered allowable width, and a setting unit for acquiring an actually-measured retention time of the peaks, and setting a measurement sample time table based on the actually-measured retention time and a second allowable width when the peaks are identified based on the altered standard sample time table.
    Type: Grant
    Filed: September 21, 2018
    Date of Patent: January 31, 2023
    Assignee: Hitachi High-Tech Science Corporation
    Inventors: Masahito Ito, Ikuko Narimatsu, Kazuhiko Okuzawa, Hirofumi Toshima