Abstract: It is intended to realize measuring of trace organic components and to render qualitative procedure efficient through imparting of selectivity. Penning gas and dopant gas are ionized in a space isolated from discharge part with the use of metastable helium obtained by direct-current glow discharge, and with the use of thus obtained plasma, the efficiency of ionization of components to be measured is enhanced, so that intensified ion current can be obtained. Further, through selection of dopant gas and Penning gas, selectivity can be imparted. Thus, not only can measuring of trace organic components be performed but also selectivity can be imparted.
Type:
Grant
Filed:
October 27, 2005
Date of Patent:
October 12, 2010
Assignee:
Hitachi High-Tech Science Systems Corporation
Abstract: An operational amplifier and a scanning electron microscope which are capable of dealing with high voltage and large current, and which allow implementation of stable and precise amplification, the operational amplifier having a first-stage amplification unit including a differential pair, a base-grounded amplification circuit, and an active load, the base-grounded amplification circuit being cascode-connected to the differential pair a second-stage amplification unit including an inverter having an emitter follower circuit and a constant-current load circuit, and a third-stage amplification unit including a source follower circuit or an emitter follower circuit.
Type:
Grant
Filed:
November 21, 2006
Date of Patent:
April 21, 2009
Assignees:
Hitachi High-Technologies Corporation, Hitachi High-Tech Science Systems Corporation
Abstract: It is intended to realize measuring of trace organic components and to render qualitative procedure efficient through imparting of selectivity. Penning gas and dopant gas are ionized in a space isolated from discharge part with the use of metastable helium obtained by direct-current glow discharge, and with the use of thus obtained plasma, the efficiency of ionization of components to be measured is enhanced, so that intensified ion current can be obtained. Further, through selection of dopant gas and Penning gas, selectivity can be imparted. Thus, not only can measuring of trace organic components be performed but also selectivity can be imparted.
Type:
Application
Filed:
October 27, 2005
Publication date:
December 27, 2007
Applicant:
HITACHI HIGH-TECH SCIENCE SYSTEMS CORPORATION