Abstract: For manufacturing a radiation window for an X-ray measurement apparatus, an etch stop layer is first produced on a polished surface of a carrier. A thin film deposition technique is used to produce a boron carbide layer on an opposite side of the etch stop layer than the carrier. The combined structure including the carrier, the etch stop layer, and the boron carbide layer is attached to a region around an opening in a support structure with the boron carbide layer facing the support structure. The middle area of carrier is etched away, leaving an additional support structure.
Abstract: A radiation window foil for an X-ray radiation window comprises a mesh that defines a number of openings (902), said mesh having a first side surface (903) and a second side surface (904). A layer (906) spans said openings. Said layer (906) is on the first side of the mesh but spans said openings at a level closer to the second side surface (904) of the mesh than the first side surface (903) of the mesh.
Abstract: A radiation window foil is provided for an X-ray radiation window. It includes a continuous window layer with a first side and a second side. A first mesh or grid layer is stacked on or bonded to the first side of the continuous window layer. A second mesh or grid layer is stacked on or bonded to the second side of the continuous window layer.
Type:
Grant
Filed:
August 22, 2012
Date of Patent:
May 2, 2017
Assignee:
HS FOILS OY
Inventors:
Esa Kostamo, Jari Kostamo, Pasi Kostamo, Marco Mattila, Pekka Torma, Heikki Sipila
Abstract: For manufacturing a radiation window for an X-ray measurement apparatus, and etch stop layer is first produced on a polished surface of a carrier. A thin film deposition technique is used to produce a structural layer on an opposite side of said etch stop layer than said carrier. The combined structure comprising said carrier, said etch stop layer, and said structural layer is attached to a region around an opening in a support structure with said structural layer facing said support structure. The carrier is etched away.
Abstract: In a method for manufacturing a radiation window there is produced a layered structure where an etch stop layer exists between a carrier and a solid layer. A blank containing at least a part of each of the carrier, the etch stop layer, and the solid layer is attached to a radiation window frame. At least a part of what of the carrier was contained in the blank is removed, thus leaving a foil attached to the radiation window frame, wherein the foil contains at least a part of each of the etch stop layer and the solid layer.
Type:
Grant
Filed:
February 15, 2012
Date of Patent:
February 7, 2017
Assignee:
HS FOILS OY
Inventors:
Esa Kostamo, Jari Kostamo, Marco Mattila, Heikki Johannes Sipilä
Abstract: A radiation window foil is provided for an X-ray radiation window. It includes a continuous window layer with a first side and a second side. A first mesh or grid layer is stacked on or bonded to the first side of the continuous window layer. A second mesh or grid layer is stacked on or bonded to the second side of the continuous window layer.
Type:
Application
Filed:
August 22, 2012
Publication date:
December 10, 2015
Applicant:
HS FOILS OY
Inventors:
Esa KOSTAMO, Jari KOSTAMO, Pasi KOSTAMO, Marco MATTILA, Pekka TORMA, Heikki SIPILA
Abstract: In a method for manufacturing a radiation window there is produced a layered structure where an etch stop layer exists between a carrier and a solid layer. A blank containing at least a part of each of the carrier, the etch stop layer, and the solid layer is attached to a radiation window frame. At least a part of what of the carrier was contained in the blank is removed, thus leaving a foil attached to the radiation window frame, wherein the foil contains at least a part of each of the etch stop layer and the solid layer.
Type:
Application
Filed:
February 15, 2012
Publication date:
February 26, 2015
Applicant:
HS FOILS OY
Inventors:
Esa Kostamo, Jari Kostamo, Marco Mattila, Heikki Johannes Sipila
Abstract: A radiation window foil for an X-ray radiation window comprises a mesh that defines a number of openings (902), said mesh having a first side surface (903) and a second side surface (904). A layer (906) spans said openings. Said layer (906) is on the first side of the mesh but spans said openings at a level closer to the second side surface (904) of the mesh than the first side surface (903) of the mesh.
Abstract: For manufacturing a radiation window for an X-ray measurement apparatus, and etch stop layer is first produced on a polished surface of a carrier. A thin film deposition technique is used to produce a structural layer on an opposite side of said etch stop layer than said carrier. The combined structure comprising said carrier, said etch stop layer, and said structural layer is attached to a region around an opening in a support structure with said structural layer facing said support structure. The carrier is etched away.