Abstract: A fan array fan section in an air-handling system includes a plurality of fan units arranged in a fan array and positioned within an air-handling compartment. One preferred embodiment may include an array controller programed to operate the plurality of fan units at peak efficiency. The plurality of fan units may be arranged in a true array configuration, a spaced pattern array configuration, a checker board array configuration, rows slightly offset array configuration, columns slightly offset array configuration, or a staggered array configuration.

Abstract: A damper is provided. The damper includes a frame having a central opening through which air passes. A plurality of vanes are rotatably mounted within the frame. At least one of the vanes is oriented about a rotational axis that is offset at a non-orthogonal angle with respect to one of a horizontal and vertical axis.

Abstract: A fan array fan section in an air-handling system includes a plurality of fan units arranged in a fan array and positioned within an air-handling compartment One preferred embodiment may include an array controller programmed to operate the plurality of fan units at peak efficiency by computing the power consumed in various configurations and selecting the configuration requiring minimum power to operate.

Abstract: A fan array fan section in air-handling system includes a plurality of fan units arranged in a fan array. Each fan unit is positioned within a fan unit chamber/cell. Each fan unit chamber/cell has at least one acoustically absorptive insulation surface. The insulation surfaces of the fan unit chamber/cells together form a coplanar silencer. Sound waves from the fan units passing through the insulation surface at least partially dissipate as they pass therethrough. In one preferred embodiments the fan unit chamber/cell is a cell having a frame that supports the insulation surface.

Abstract: A fan array fan section in an air-handling system includes a plurality of fan units arranged in a fan array and positioned within an air-handling compartment. One preferred embodiment may include an array controller programmed to operate the plurality of fan units at peak efficiency. The plurality of fan units may be arranged in a true array configuration, a spaced pattern array configuration, a checker board array configuration, rows slightly offset array configuration, columns slightly offset array configuration, or a staggered array configuration.

Abstract: A fan array fan section in an air-handling system includes a plurality of fan units arranged in a fan array and positioned within an air-handling compartment. One preferred embodiment may include an array controller programmed to operate the plurality of fan units at peak efficiency. The plurality of fan units may be arranged in a true array configuration, a spaced pattern array configuration, a checker board array configuration, rows slightly offset array configuration, columns slightly offset array configuration, or a staggered array configuration.

Abstract: A fan array fan section in an air-handling system includes a plurality of fan units arranged in a fan array and positioned within an air-handling compartment. One preferred embodiment may include an array controller programmed to operate the plurality of fan units at peak efficiency. The plurality of fan units may be arranged in a true array configuration, a spaced pattern array configuration, a checker board array configuration, rows slightly offset array configuration, columns slightly offset array configuration, or a staggered array configuration.

Abstract: A fan array fan section in an air-handling system includes a plurality of fan units arranged in a fan array and positioned within an air-handling compartment. One preferred embodiment may include an array controller programmed to operate the plurality of fan units at peak efficiency. The plurality of fan units may be arranged in a true array configuration, a spaced pattern array configuration, a checker board array configuration, rows slightly offset array configuration, columns slightly offset array configuration, or a staggered array configuration.

Abstract: A fan array fan section in an air-handling system includes a plurality of fan units arranged in a fan array. Each fan unit is positioned within a fan unit chamber/cell. Each fan unit chamber/cell has at least one acoustically absorptive insulation surface. The insulation surfaces of the fan unit chambers/cells together form a coplanar silencer. Sound waves from the fan units passing through the insulation surface at least partially dissipate as they pass therethrough. In one preferred embodiments the fan unit chamber/cell is a cell having a frame that supports the insulation surfaces.

Abstract: A fan array fan section in an air-handling system includes a plurality of fan units arranged in a fan array and positioned within an air-handling compartment. One preferred embodiment may include an array controller programmed to operate the plurality of fan units at peak efficiency. The plurality of fan units may be arranged in a true array configuration, a spaced pattern array configuration, a checker board array configuration, rows slightly offset array configuration, columns slightly offset array configuration, or a staggered array configuration.

Abstract: A modular fan filter unit designed to supply process control air to mini-enclosure clean rooms. The modular fan filter unit is easy to remove, repair, and replace in the clean room environment. It has a readily accessible filter mounted across its bottom surface and an internal variable frequency drive fan. The fan pushes air through the filter into a clean room. Multiple numbers of modular fan filter units may be connected together as an array.

Abstract: This patent discloses a modular environmental control system for small cleanroom enclosures ("mini-enclosures"). Small environmental control units ("ECUs") are mounted on top of individual mini-enclosures, as near as possible to the process tool within the enclosure. Each ECU has the capability of controlling temperature, humidity, and airflow rate delivered into the enclosure. Temperature is adjusted by first cooling the air inside the ECU followed by reheating it to a selected temperature. The cooling capability is not generated by individual ECUs. Instead, a remote fluid cooling unit supplies chilled fluid to each ECU, which is circulated internally to cool the air. The same remote unit services different ECUs at the same time.

Abstract: The present invention is a humidifier that provides uniformly controlled generation of water vapor into an air stream. Steel wool is placed into a heating section of a humidifier water reservoir, where vapor is produced, to create an even distribution of vapor exiting the humidifier. A perforated plate is horizontally inserted into the heating section above the steel wool, thereby holding it in place and aiding in the even distribution of vapor from the humidifier.