Patents Assigned to Hyundai Eletronics America
  • Automated washing method
    Patent number: 6017397
    Abstract: A system and a method for washing objects, such as cassettes and carriers used to hold and transport silicon wafers during manufacture of semiconductor chips. The method employs the steps of exposing to ultraviolet radiation the objects in a process chamber, spraying of developer fluid onto the objects, rinsing the objects, spraying of surfactant solution on the objects, rinsing the objects and drying the objects using heated, ionized ULPA filtered air. Apparatus for accomplishing the above is disclosed.
    Type: Grant
    Filed: March 5, 1993
    Date of Patent: January 25, 2000
    Assignee: Hyundai Eletronics America
    Inventor: Daniel B. Doran