Patents Assigned to ICT Integrated Circuit Testing Gesellschaft für Halbleiterriftechnik mbH
  • Charged particle beam apparatus and method of controlling sample charge
    Patent number: 11545338
    Abstract: A charged particle beam apparatus with a charged particle source to generate a primary charged particle beam, a sample holder to hold a sample for impingement of the primary charged particle beam on the sample, a pulsed laser configured to generate a pulsed light beam for impingement onto an area on the sample, and an electrode to collect electrons emitted from the sample in a non-linear photoemission.
    Type: Grant
    Filed: May 5, 2021
    Date of Patent: January 3, 2023
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterriftechnik mbH
    Inventors: Dominik Patrick Ehberger, John Breuer, Alex Goldenshtein