Patents Assigned to ICT Integrated Circuit Testing Gesselschaft
  • High current density particle beam system
    Patent number: 7335894
    Abstract: The present invention relates to a charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam. Thereby, a double-focusing sector unit for deflecting and focusing the charged particle beam and an energy-filter forming a potential is provided, whereby charged particles of the charged particles beam are redirected at the potential-saddle depending on the energy of the charged articles.
    Type: Grant
    Filed: November 15, 2005
    Date of Patent: February 26, 2008
    Assignee: ICT Integrated Circuit Testing Gesselschaft
    Inventors: Juergen Frosien, Stefan Lanio, Gerald Schoenecker, Alan D. Brodie, David A. Crewe