Patents Assigned to IL-VI DELAWARE, INC.
  • Patent number: 11194180
    Abstract: A method may include thinning a silicon wafer to a particular thickness. The particular thickness may be based on a passband frequency spectrum of an adjustable optical filter. The method may also include covering a surface of the silicon wafer with an optical coating. The optical coating may filter an optical signal and may be based on the passband frequency spectrum. The method may additionally include depositing a plurality of thermal tuning components on the coated silicon wafer. The plurality of thermal tuning components may adjust a passband frequency range of the adjustable optical filter by adjusting a temperature of the coated silicon wafer. The passband frequency range may be within the passband frequency spectrum. The method may include dividing the coated silicon wafer into a plurality of silicon wafer dies. Each silicon wafer die may include multiple thermal tuning components and may be the adjustable optical filter.
    Type: Grant
    Filed: May 2, 2018
    Date of Patent: December 7, 2021
    Assignee: IL-VI DELAWARE, INC.
    Inventors: Li Zhang, Bangjia Wu, Huiping Li