Patents Assigned to Imra America, Inc.
  • Patent number: 8663754
    Abstract: A method of forming patterns on transparent substrates using a pulsed laser is disclosed. Various embodiments include an ultrashort pulsed laser, a substrate that is transparent to the laser wavelength, and a target plate. The laser beam is guided through the transparent substrate and focused on the target surface. The target material is ablated by the laser and is deposited on the opposite substrate surface. A pattern, for example a gray scale image, is formed by scanning the laser beam relative to the target. Variations of the laser beam scan speed and scan line density control the material deposition and change the optical properties of the deposited patterns, creating a visual effect of gray scale. In some embodiments patterns may be formed on a portion of a microelectronic device during a fabrication process. In some embodiments high repetition rate picoseconds and nanosecond sources are configured to produce the patterns.
    Type: Grant
    Filed: March 9, 2009
    Date of Patent: March 4, 2014
    Assignee: IMRA America, Inc.
    Inventors: Bing Liu, Zhendong Hu, Makoto Murakami, Jingzhou Xu, Yong Che
  • Publication number: 20140044139
    Abstract: Various embodiments include large cores fibers that can propagate few modes or a single mode while introducing loss to higher order modes. Some of these fibers are holey fibers that comprising cladding features such as air-holes. Additional embodiments described herein include holey rods. The rods and fibers may be used in many optical systems including optical amplification systems, lasers, short pulse generators, Q-switched lasers, etc. and may be used for example for micromachining.
    Type: Application
    Filed: October 15, 2013
    Publication date: February 13, 2014
    Applicant: IMRA America, Inc.
    Inventors: Liang Dong, William Wong, Martin E. Fermann
  • Publication number: 20140036939
    Abstract: A modular, compact and widely tunable laser system for the efficient generation of high peak and high average power ultrashort pulses. Peak power handling capability of fiber amplifiers is expanded by using optimized pulse shapes, as well as dispersively broadened pulses. Dispersive pulse stretching in the presence of self-phase modulation and gain results in the formation of high-power parabolic pulses. To ensure a wide tunability of the whole system, Raman-shifting of the compact sources of ultrashort pulses in conjunction with frequency-conversion in nonlinear optical crystals can be implemented, or an Anti-Stokes fiber in conjunction with fiber amplifiers and Raman-shifters are used. Positive dispersion optical amplifiers are used to improve transmission characteristics.
    Type: Application
    Filed: August 5, 2013
    Publication date: February 6, 2014
    Applicant: IMRA AMERICA, INC.
    Inventor: Martin E. FERMANN
  • Publication number: 20140036350
    Abstract: High power parallel fiber arrays for the amplification of high peak power pulses are described. Fiber arrays based on individual fiber amplifiers as well as fiber arrays based on multi-core fibers can be implemented. The optical phase between the individual fiber amplifier elements of the fiber array is measured and controlled using a variety of phase detection and compensation techniques. High power fiber array amplifiers can be used for EUV and X-ray generation as well as pumping of parametric amplifiers.
    Type: Application
    Filed: October 8, 2013
    Publication date: February 6, 2014
    Applicant: IMRA AMERICA, INC.
    Inventors: Martin Fermann, Ingmar Hartl, Andrius Marcinkevicius, Liang Dong
  • Patent number: 8644356
    Abstract: A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.
    Type: Grant
    Filed: September 12, 2012
    Date of Patent: February 4, 2014
    Assignee: Imra America, Inc.
    Inventors: Lawrence Shah, James M. Bovatsek, Alan Y. Arai, Tadashi Yamamoto, Rajesh S. Patel, Donald J. Harter
  • Publication number: 20140022533
    Abstract: A frequency comb laser providing large comb spacing is disclosed. At least one embodiment includes a mode locked waveguide laser system. The mode locked waveguide laser includes a laser cavity having a waveguide, and a dispersion control unit (DCU) in the cavity. The DCU imparts an angular dispersion, group-velocity dispersion (GVD) and a spatial chirp to a beam propagating in the cavity. The DCU is capable of producing net GVD in a range from a positive value to a negative value. In some embodiments a tunable fiber frequency comb system configured as an optical frequency synthesizer is provided. In at least one embodiment a low phase noise micro-wave source may be implemented with a fiber comb laser having a comb spacing greater than about 1 GHz. The laser system is suitable for mass-producible fiber comb sources with large comb spacing and low noise. Applications include high-resolution spectroscopy.
    Type: Application
    Filed: September 24, 2013
    Publication date: January 23, 2014
    Applicant: IMRA AMERICA, Inc.
    Inventors: Martin FERMANN, Ingmar HARTL
  • Publication number: 20140017416
    Abstract: A p-type semiconductor zinc oxide (ZnO) film and a process for preparing the film are disclosed. The film is co-doped with phosphorous (P) and lithium (Li). A pulsed laser deposition scheme is described for use in growing the film. Further described is a process of pulsed laser deposition using transparent substrates which includes a pulsed laser source, a substrate that is transparent at the wavelength of the pulsed laser, and a multi-target system. The optical path of the pulsed laser is arranged in such a way that the pulsed laser is incident from the back of the substrate, passes through the substrate, and then focuses on the target. By translating the substrate towards the target, this geometric arrangement enables deposition of small features utilizing the root of the ablation plume, which can exist in a one-dimensional transition stage along the target surface normal, before the angular width of the plume is broadened by three-dimensional adiabatic expansion.
    Type: Application
    Filed: September 12, 2013
    Publication date: January 16, 2014
    Applicant: IMRA AMERICA, INC.
    Inventors: Bing LIU, Zhendong Hu, Yong Che, Yuzuru Uehara
  • Patent number: 8630321
    Abstract: Methods and apparatuses for performing temporal scanning using ultra-short pulse width lasers in which only minimal (micro-scale) mechanical movement is required, and related methods for obtaining high-accuracy timing calibration, on the order of femtoseconds, are disclosed. A dual laser system is disclosed in which the cavity of one or more of the lasers is dithered using a piezoelectric element. A Fabry-Perot etalon generates a sequence of timing pulses used in conjunction with a laser beam produced by the laser having the dithered laser cavity. A correlator correlates a laser pulse from one of the lasers with the sequence of timing pulses to produce a calibrated time scale. The invention is applicable to applications requiring rapid scanning and time calibration, including metrology, characterization of charge dynamics in semiconductors, electro-optic testing of ultrafast electronic and optoelectronic devices, optical time domain reflectometry, and electro-optic sampling oscilloscopes.
    Type: Grant
    Filed: August 2, 2012
    Date of Patent: January 14, 2014
    Assignee: Imra America, Inc.
    Inventors: Gregg D. Sucha, Martin E. Fermann, Donald J. Harter
  • Publication number: 20140009822
    Abstract: Various embodiments described herein include rare earth doped glass compositions that may be used in optical fiber and rods having large core sizes. Such optical fibers and rods may be employed in fiber lasers and amplifiers. The index of refraction of the glass may be substantially uniform and may be close to that of silica in some embodiments. Possible advantages to such features include reduction of formation of additional waveguides within the core, which becomes increasingly a problem with larger core sizes.
    Type: Application
    Filed: September 11, 2013
    Publication date: January 9, 2014
    Applicant: IMRA America, Inc.
    Inventors: Liang Dong, Xiang Peng
  • Publication number: 20140004318
    Abstract: Methods for ultrashort pulse laser processing of optically transparent materials. A method for scribing transparent materials uses ultrashort laser pulses to create multiple scribe features with a single pass of the laser beam across the material, with at least one of the scribe features being formed below the surface of the material. This enables clean breaking of transparent materials at a higher speed than conventional techniques. Slightly modifying the ultrashort pulse laser processing conditions produces sub-surface marks. When properly arranged, these marks are clearly visible with side-illumination and not clearly visible without side-illumination. In addition, a method for welding transparent materials uses ultrashort laser pulses to create a bond through localized heating. The ultrashort pulse duration causes nonlinear absorption of the laser radiation, and the high repetition rate of the laser causes pulse-to-pulse accumulation of heat within the materials.
    Type: Application
    Filed: August 26, 2013
    Publication date: January 2, 2014
    Applicant: IMRA AMERICA, INC.
    Inventors: James BOVATSEK, Alan Y. Arai, Fumiyo Yoshino
  • Patent number: 8609205
    Abstract: A one-step and room-temperature process for depositing nanoparticles or nanocomposite (nanoparticle-assembled) films of metal oxides such as crystalline titanium dioxide (TiO2) onto a substrate surface using ultrafast pulsed laser ablation of Titania or metal titanium target. The system includes a pulsed laser with a pulse duration ranging from a few femtoseconds to a few tens of picoseconds, an optical setup for processing the laser beam such that the beam is focused onto the target surface with an appropriate average energy density and an appropriate energy density distribution, and a vacuum chamber in which the target and the substrate are installed and background gases and their pressures are appropriately adjusted.
    Type: Grant
    Filed: July 2, 2009
    Date of Patent: December 17, 2013
    Assignee: Imra America, Inc.
    Inventors: Zhendong Hu, Yong Che, Bing Liu
  • Publication number: 20130329279
    Abstract: An electronic circuit for controlling a laser system consisting of a pulse source and high power fiber amplifier is disclosed. The circuit is used to control the gain of the high power fiber amplifier system so that the amplified output pulses have predetermined pulse energy as the pulse width and repetition rate of the oscillator are varied. This includes keeping the pulse energy constant when the pulse train is turned on. The circuitry is also used to control the temperature of the high power fiber amplifier pump diode such that the wavelength of the pump diode is held at the optimum absorption wavelength of the fiber amplifier as the diode current is varied. The circuitry also provides a means of protecting the high power fiber amplifier from damage due to a loss of signal from the pulse source or from a pulse-source signal of insufficient injection energy.
    Type: Application
    Filed: August 15, 2013
    Publication date: December 12, 2013
    Applicant: IMRA AMERICA, INC.
    Inventors: Salvatore F. NATI, Otho E. ULRICH, JR., Gyu C. CHO, JR., Wayne A. GILLIS, JR., Donald J. HARTER, JR., Mark BENDETT, JR., Ingmar HARTL, JR.
  • Publication number: 20130327987
    Abstract: A method of forming nanometer sized fine particles of functional ceramic from a bulk functional ceramic, particularly fine particles of phosphorous ceramics from a bulk phosphor material is disclosed. The method relies on irradiation of a bulk phosphorous ceramic in a liquid with an ultrashort-pulsed-laser-fragmentation beam to thereby form nanometer sized particles of the phosphorous ceramic. The method is unique in that the generated particles retain the chemical and crystalline properties of the bulk phosphorous ceramic. The generated solutions are stable colloids from which the particles can be isolated or used as is.
    Type: Application
    Filed: August 16, 2013
    Publication date: December 12, 2013
    Applicant: IMRA America, Inc.
    Inventors: Yuki Ichikawa, Zhendong HU, Bing LU, Yong Che
  • Patent number: 8599473
    Abstract: Modelocked fiber laser resonators may be coupled with optical amplifiers. An isolator optionally may separate the resonator from the amplifier. A reflective optical element on one end of the resonator having a relatively low reflectivity may be employed to couple light from the resonator to the amplifier. Enhanced pulse-width control may be provided with concatenated sections of both polarization-maintaining and non-polarization-maintaining fibers. Apodized fiber Bragg gratings and integrated fiber polarizers may also be included in the laser cavity to assist in linearly polarizing the output of the cavity. Very short pulses with a large optical bandwidth may be obtained by matching the dispersion value of the grating to the inverse of the dispersion of the intra-cavity fiber. Frequency comb sources may be constructed from such modelocked fiber oscillators. Low dispersion and an in-line interferometer that provides feedback may assist in controlling the frequency components output from the comb source.
    Type: Grant
    Filed: May 31, 2013
    Date of Patent: December 3, 2013
    Assignee: IMRA America, Inc.
    Inventors: Martin E. Fermann, Ingmar Hartl, Gennady Imeshev
  • Patent number: 8587864
    Abstract: System for converting relatively long pulses from rep-rate variable ultrafast optical sources to shorter, high-energy pulses suitable for sources in high-energy ultrafast lasers. Fibers with positive group velocity dispersion (GVD) and self phase modulation are advantageously employed with the optical sources. These systems take advantage of the need for higher pulse energies at lower repetition rates so that such sources can be cost effective.
    Type: Grant
    Filed: June 26, 2012
    Date of Patent: November 19, 2013
    Assignee: IMRA America, Inc.
    Inventor: Donald J. Harter
  • Patent number: 8582201
    Abstract: System for converting relatively long pulses from rep-rate variable ultrafast optical sources to shorter, high-energy pulses suitable for sources in high-energy ultrafast lasers. Fibers with positive group velocity dispersion (GVD) and self phase modulation are advantageously employed with the optical sources. These systems take advantage of the need for higher pulse energies at lower repetition rates so that such sources can be cost effective.
    Type: Grant
    Filed: August 7, 2012
    Date of Patent: November 12, 2013
    Assignee: IMRA America, Inc.
    Inventor: Donald J. Harter
  • Publication number: 20130293946
    Abstract: The present invention relates to frequency rulers. At least one embodiment includes a mode locked pump source operated at pulse repetition rate, and a pump output having a pump carrier envelope offset frequency. A nonlinear optical system outputs a frequency ruler spectrum comprising individual frequency modes. The frequency modes may be characterized by a frequency spacing which is an integer multiple of the repetition rate and by distinct ruler carrier envelope offset frequencies which exhibit at least one discontinuity across the frequency output. The ruler carrier envelope offset frequencies are substantially locked to the carrier envelope offset frequency of the pump laser. One preferred embodiment includes a frequency doubled, doubly resonant, non-degenerate OPO (DNOPO), a supercontinuum generation (SC) stage and at least one reference laser arranged downstream from a Tm fiber-based pump source. A plurality of beat signals generated therefrom provide for stabilization of the system.
    Type: Application
    Filed: April 30, 2013
    Publication date: November 7, 2013
    Applicant: IMRA AMERICA, Inc.
    Inventors: Martin E. FERMANN, Ingmar HARTL
  • Patent number: 8570646
    Abstract: A modular, compact and widely tunable laser system for the efficient generation of high peak and high average power ultrashort pulses. Modularity is ensured by the implementation of interchangeable amplifier components. System compactness is ensured by employing efficient fiber amplifiers, directly or indirectly pumped by diode lasers. Peak power handling capability of the fiber amplifiers is expanded by using optimized pulse shapes, as well as dispersively broadened pulses. Dispersive broadening is introduced by dispersive pulse stretching in the presence of self-phase modulation and gain, resulting in the formation of high-power parabolic pulses. In addition, dispersive broadening is also introduced by simple fiber delay lines or chirped fiber gratings, resulting in a further increase of the energy handling ability of the fiber amplifiers.
    Type: Grant
    Filed: July 21, 2011
    Date of Patent: October 29, 2013
    Assignee: IMRA America, Inc.
    Inventor: Martin E. Fermann
  • Patent number: 8571075
    Abstract: A frequency comb laser providing large comb spacing is disclosed. At least one embodiment includes a mode locked waveguide laser system. The mode locked waveguide laser includes a laser cavity having a waveguide, and a dispersion control unit (DCU) in the cavity. The DCU imparts an angular dispersion, group-velocity dispersion (GVD) and a spatial chirp to a beam propagating in the cavity. The DCU is capable of producing net GVD in a range from a positive value to a negative value. In some embodiments a tunable fiber frequency comb system configured as an optical frequency synthesizer is provided. In at least one embodiment a low phase noise micro-wave source may be implemented with a fiber comb laser having a comb spacing greater than about 1 GHz. The laser system is suitable for mass-producible fiber comb sources with large comb spacing and low noise. Applications include high-resolution spectroscopy.
    Type: Grant
    Filed: November 29, 2010
    Date of Patent: October 29, 2013
    Assignee: Imra America, Inc.
    Inventors: Martin Fermann, Ingmar Hartl
  • Patent number: 8571370
    Abstract: Various embodiments include large cores fibers that can propagate few modes or a single mode while introducing loss to higher order modes. Some of these fibers are holey fibers that comprising cladding features such as air-holes. Additional embodiments described herein include holey rods. The rods and fibers may be used in many optical systems including optical amplification systems, lasers, short pulse generators, Q-switched lasers, etc. and may be used for example for micromachining.
    Type: Grant
    Filed: September 11, 2012
    Date of Patent: October 29, 2013
    Assignee: IMRA America, Inc.
    Inventors: Liang Dong, William Wong, Martin E. Fermann