Patents Assigned to Institute of Micoelectronics
  • Design of a novel tactile sensor
    Patent number: 6007728
    Abstract: An apparatus for sensing an applied force comprising a deflectable bridge, formed in a substrate and spanning a recessed area. The deflectable bridge also has a sensing element. The force is applied to the bridge and in response thereto, an output characteristic of the sensing element changes in proportion to the magnitude of the applied force. The apparatus can further comprise a sensing bump in contact with the bridge, wherein the force is applied to the bridge through the sensing bump.
    Type: Grant
    Filed: October 30, 1997
    Date of Patent: December 28, 1999
    Assignee: Institute of Micoelectronics
    Inventors: Lian Jun Liu, Mnoon Yan Loke, Pang Dow Foo