Patents Assigned to Interuniversitair Mcroelektronica Centrum vzw(IMEC)
  • Publication number: 20090134466
    Abstract: A method of manufacturing dual work function devices starting from a single metal electrode and the device resulting therefrom are disclosed. In one aspect, the method includes a single-metal-single-dielectric (SMSD) CMOS integration scheme. A single dielectric stack comprising a gate dielectric layer and a dielectric capping layer and one metal layer overlying the dielectric stack are first deposited, forming a metal-dielectric interface. Upon forming the dielectric stack and the metal layer, at least part of the dielectric capping layer is selectively modified by adding work function tuning elements, the part being adjacent to the metal-dielectric interface.
    Type: Application
    Filed: October 24, 2008
    Publication date: May 28, 2009
    Applicants: Interuniversitair Mcroelektronica Centrum vzw(IMEC), Taiwan Semiconductor Manufacturing Company, Ltd., Samsung Electonics Co. Ltd.
    Inventors: Hag-Ju Cho, Shih-Hsun Chang