Patents Assigned to Interuniversitair Microelektronica Centrum vzw (IMEC vzw)
  • Simplified bottom electrode-barrier structure for making a ferroelectric capacitor stacked on a contact plug
    Patent number: 6885570
    Abstract: The present invention is related to the realization of a simplified bottom electrode stack for ferroelectric memory cells. More particularly, the invention is related to ferroelectric memory cells wherein the ferroelectric capacitor is positioned directly on top of a contact plug.
    Type: Grant
    Filed: November 8, 2002
    Date of Patent: April 26, 2005
    Assignees: Interuniversitair Microelektronica Centrum vzw (IMEC vzw), STMicroelectronics
    Inventors: Dirk Wouters, Jean-Luc Everaert, Judit Lisoni