Abstract: A efficient point source x-ray target tape assemble. A tape is wrapped helically around a rotating drum a little more than one complete turn so as to create an overlap section where a section of the tape is positioned parallel and adjacent to a separate section of the tape. The tape advances slowly across the outside surface of the drum at a speed which is a small fraction of the tangential surface speed of said drum. In a preferred embodiment a pulsed laser beam is focused on the tape at a fixed spot in space through which the tape moves in order to create x-rays from plasma generated by very high intensity ablation of the tape material. The combination of the drum rotation and the tape advancement across the surface of the drum permits substantially full utilization of the tape material for generation of x-rays.

Abstract: An improved high average power, high brightness laser system. The laser system comprises an XeCI excimer amplifier, an XeCI excimer preamplifier, a means for generating a picosecond seed pulse tailored for the XeCI preamplifier and the XeCI amplifier and a means for focusing the output pulse laser beam onto a spot smaller in area than 100.times.10.sup.-6 cm.sup.2. We first produce a seed laser beam consisting of a series of bunches of short duration pulses with a bunch frequency in excess of 100 pulses per second. These seed laser pulses are produced by a Nd:YAG pumped dye laser oscillator with a cavity dumper. The pulses in the beam are preamplified in a multipass preamplifier and the pulses are then multiplexed in a pulse train generator into a larger number of lower power pulses.

Abstract: A high average power, high brightness solid state laser system. We first produce seed laser beam with a short pulse duration and frequency in excess of 1,000 pulses per second. A laser amplifier amplifies the seed pulse beam to produce an amplified pulse laser beam which is focused to produce pulses with brightness levels in excess of 10.sup.11 Watts/cm.sup.2. Preferred embodiments produce an amplified pulse laser beam having an average power in the range of 1 kW, an average pulse frequency of 12,000 pulses per second with pulses having brightness levels in excess of 10.sup.14 Watts/cm.sup.2 at a 20 .mu.m diameter spot which is steered rapidly to simulate a larger spot size. These beams are useful in producing X-ray sources for lithography.In one preferred embodiment, the seed beam is produced in a mode locked Nd:YAG oscillator pumped by a diode array with the frequency of the pulses being reduced by an electro-optic modulator.