Patents Assigned to Japan Atomic Research Institute
  • Purification of very slightly contaminated air within a clean room
    Patent number: 6228135
    Abstract: An air purifying filter which comprises: (a) an ion-exchange fiber filter and (b) a high- or ultrahigh-performance filter comprising glass fibers is disclosed. The ion-exchange fiber filter preferably comprises a fibrous substrate and ion-exchange groups and hydrophilic groups which are chemically bound to the surface of the substrate.
    Type: Grant
    Filed: April 8, 1996
    Date of Patent: May 8, 2001
    Assignees: Ebara Corporation, Japan Atomic Research Institute
    Inventors: Takanobu Sugo, Kunio Fujiwara, Hideaki Sekiguchi, Takeshi Takai, Atsushi Kobayashi