Abstract: Methods of forming a pattern on a substrate are provided. The methods include providing a substrate and radiating a laser beam through a transmitting phase mask on the substrate. The transmitting phase mask includes a pattern and radiating the laser beam through the transmitting phase mask forms the pattern on a first surface of the substrate.
Type:
Application
Filed:
August 30, 2012
Publication date:
March 6, 2014
Applicant:
Jawaharial Nehru Centre for Advanced Scientific Researc