Abstract: The invention provides a switch matrix and display matrix of a display device. The display matrix of a display device includes: a switch matrix including M×N MEMS switches, wherein M is the number of rows and N is the number of columns, and MEMS switches in each row are controlled by a corresponding row drive signal to output respective column data signals; and a pixel matrix including M×N pixel units each of which is coupled with a corresponding one of the M×N MEMS switches and displays in response to the column data signal output from the corresponding MEMS switch. The switch matrix can simplify pixel design and reduce layout area of each pixel. Moreover, conventional design needs special process to handle high voltage of source driver. This invention can realize a display device with one common process while source driver uses high voltage process conventionally.

Abstract: An SOI wafer and a method for forming the same, where the method for forming an SOI wafer includes: preparing a monocrystalline silicon wafer on which a mask layer is formed; etching the mask layer and the monocrystalline silicon wafer to form several trenches; forming a first insulating layer on the sidewalls and the bottoms of the trenches; etching and removing the first insulating layer on the bottoms of the trenches; etching along the trenches the monocrystalline silicon wafer beneath the trenches to form cavities; processing the inner walls of the cavities to form a second insulating layer; and filling up the trenches and the cavities with an insulating material layer. The process of the invention is easy to be implemented at a low manufacturing cost and an SOI wafer being formed is of high quality while being capable of being compatible with a standard process of manufacturing a bulk silicon CMOS.

Abstract: A charge pump includes a first voltage input node, a second voltage input node, a voltage output node, at least a flying capacitor, an energy reserve capacitor, a first MEMS switches group controlled by a controlling signal, a second MEMS switches group controlled by the controlling signal, a third MEMS switches group controlled by the controlling signal and a forth MEMS switches group controlled by the controlling signal. The flying capacitor is connected with the first voltage input node and the second voltage input node via the first MEMS switches group. The flying capacitor is connected with the first voltage input node or the second voltage input node via the second MEMS switches group. The energy reserve capacitor is connected with the flying capacitor via the third MEMS switches group. The energy reserve capacitor is connected with the voltage output node and the second voltage input node.

Abstract: A power amplifier and a bridge circuit in a power amplifier, thereinto, the power amplifier includes a comparator, a bridge circuit and a low-pass filter. The comparator is adapted to receive a first analog signal, compare the first analog signal with a reference signal and output a square wave signal. The bridge circuit is adapted to amplify the square wave signal and output the amplified square wave signal. The low-pass filter is adapted to convert the amplified square wave signal into a second analog signal. The bridge circuit includes a first MEMS switch and a second MEMS switch. The first MEMS switch and the second MEMS switch turn on alternately when the polarity of the square wave changes, and output a first voltage signal or a second voltage signal respectively. The amplified square wave signal includes the first voltage signal and the second voltage signal output alternately.

Abstract: The invention provides a switch matrix and display matrix of a display device. The display matrix of a display device includes: a switch matrix including M×N MEMS switches, wherein M is the number of rows and N is the number of columns, and MEMS switches in each row are controlled by a corresponding row drive signal to output respective column data signals; and a pixel matrix including M×N pixel units each of which is coupled with a corresponding one of the M×N MEMS switches and displays in response to the column data signal output from the corresponding MEMS switch. The switch matrix can simplify pixel design and reduce layout area of each pixel. Moreover, conventional design needs special process to handle high voltage of source driver. This invention can realize a display device with one common process while source driver uses high voltage process conventionally.

Abstract: An SOI wafer and a method for forming the same, where the method for forming an SOI wafer includes: preparing a monocrystalline silicon wafer on which a mask layer is formed; etching the mask layer and the monocrystalline silicon wafer to form several trenches; forming a first insulating layer on the sidewalls and the bottoms of the trenches; etching and removing the first insulating layer on the bottoms of the trenches; etching along the trenches the monocrystalline silicon wafer beneath the trenches to form cavities; processing the inner walls of the cavities to form a second insulating layer; and filling up the trenches and the cavities with an insulating material layer. The process of the invention is easy to be implemented at a low manufacturing cost and an SOI wafer being formed is of high quality while being capable of being compatible with a standard process of manufacturing a bulk silicon CMOS.

Abstract: The present invention relates to a liquid crystal on silicon imager. The imager includes a backplane substrate, a reflective polarization electrode array, a planar liquid crystal cell, a transparent conductive film and a transparent plate. The reflective polarization electrode array is placed onto the backplane substrate, consists of a plurality of reflective polarization electrodes, and a pattern of each of the reflective polarization electrodes is configured in a planar arrangement having regularly spaced and electrically isolated gaps in parallel to each other. The planar liquid crystal cell is placed above the reflective polarization electrode array. The transparent conductive film is placed above the planar liquid crystal cell. The transparent plate is placed on the transparent conductive film and facing incident light.

Abstract: A reflective color filter liquid crystal display, in the reverse order of receiving incident light, includes a backplane substrate, a reflective electrode layer, a planar liquid crystal cell, a transparent protective dielectric layer and a transparent plate. The transparent plate is adapted for receiving and transmitting the incident light. The planar liquid crystal cell is sandwiched between the reflective electrode layer and the transparent conductive film. The reflective electrode layer further includes a first band reflective electrode, a second band reflective electrode and a third band reflective electrode in a regularly tiled planar arrangement.

Abstract: A colored electrophoretic display includes a transparent substrate, a transparent conductive layer, a planar electrophoretic cell, and a backplane substrate in sequence of receiving an incident light. The backplane substrate includes a first block reflective electrode, a second block reflective electrode and a third block reflective electrode, tiled in a planar arrangement perpendicular to the incident light and electrically connected to a driving circuitry in the backplane substrate. The driving circuitry electrically drives the first block reflective electrode, the second block reflective electrode and the third block reflective electrode individually as well as the transparent conductive layer to form spatially colored reflective light modulation.

Abstract: A capacitive MEMS gyroscope and a method of making the same are disclosed. The capacitive MEMS gyroscope comprises a semiconductor substrate and a suspended composite wheel.

Abstract: A back substrate and a reflective liquid crystal display are disclosed. The back substrate comprises: a first substrate; a reflective electrode layer, formed on the first substrate, at least comprising a first reflective electrode, a second reflective electrode and a third reflective electrode which are electrically isolated; wherein the first reflective electrode is an electrode of reflecting light of a first spectrum band of incident light, the second reflective electrode is an electrode of reflecting light of a second spectrum band of the incident light, and the third reflective electrode is an electrode of reflecting light of a third spectrum band of the incident light.

Abstract: The present invention discloses an integrated single-panel projection engine (500) including a collimated light source (400), a main polarization beam splitter (200), a supporting polarization beam splitter (210), a reflective quarter wave plate (150), a mirror plate (160), an LCOS imager (100) and a projection lens system (300), which provides substantial improvement in optical efficiency of LCOS micro projection display.

Abstract: The present invention discloses a capacitive MEMS switch on top of a semiconductor substrate containing a CMOS driving circuitry. The capacitive MEMS switch disclosed includes: 1) a semiconductor substrate containing a driving circuitry inside, and first and second conductors as well as a bottom electrode on top; 2) a suspended composite beam above and anchored onto the semiconductor substrate, containing a top electrode aligned to the bottom electrode with a first vertical distance, a top conductor, capped by a dielectric layer, having a first and second contact tips aligned with the first and second bottom conductors with a second vertical distance differentially smaller than the first vertical distance. The electrostatic attraction generated between the top electrode and the bottom electrode pulls the first and second contact tips in physical contact with and electrically connects the first and second bottom conductors through the top conductor.

Abstract: A colored liquid crystal display includes a transparent substrate, a transparent conductive layer, a planar liquid crystal cell, and a backplane substrate in sequence of receiving an incident light. The backplane substrate includes a first conductive reflector, a second conductive reflector and a third conductive reflector, tiled in a planar arrangement perpendicular to the incident light and electrically connected to a driving circuitry in the backplane substrate. The driving circuitry electrically drives the first conductive reflector, the second conductive reflector and the third conductive reflector individually as well as the transparent conductive layer to form spatially colored reflective light modulation.

Abstract: The present invention discloses a method of encapsulating a wafer level microdevice, which includes: fabricating a microdevice on top side of a first silicon wafer; depositing a first capping carbon film on the top side of the first silicon wafer; implementing a backside fabricating process of wafer from bottom side of the first silicon wafer by carrying the top side of the first silicon wafer through the first capping carbon film; removing the first capping carbon film by selective gaseous reaction with carbon; and encapsulating an encapsulation wafer onto the top side of the first silicon wafer. The present invention deposits and removes the first capping carbon film by means of chemical technology, thereby protecting the microdevice on the top side of the first wafer during implementing the backside fabricating process of wafer.

Abstract: A micro electrical-mechanical system (MEMS) device comprises a suspended thin film microstructure which includes an anchoring portion adhered to the top surface of the substrate and a suspended portion above the top surface of the substrate. Having a base plane configured in parallel to the substrate, the suspended portion further includes a first recess portion spaced at a first vertical clearance with the substrate, the first vertical clearance being configured differentially smaller than a base clearance of the suspended portion outside the first recess portion.

Abstract: An integrated microdisplay projection and imaging system includes: a focus-adjustable lens system, a planar polarization beam splitter, a reflective polarization modulation imager and an imaging sensor with a post polarizer in orthogonal polarization orientation to the planar polarization beam splitter, as well as a lighting module. Placed on two separate sides of the planar polarization beam splitter, the reflective polarization modulation imager and the imaging sensor have substantially equal-length optical passes through the planar polarization beam splitter to the focus-adjustable lens system, and thus the focus-adjustable lens system provides a unified means for adjusting focus with both the reflective polarization modulation imager and the imaging sensor, relative to an external object such a projection screen or an imaging object.

Abstract: A single-imager micro projection engine includes a reflective polarization modulation imager, a projection lens system and a polarization conversion assembly integrating a light source with a planar polarization beam splitter and a reflective quarter wave composite plate in parallel. The polarization conversion assembly lets through first polarization portion of illumination light in first polarization state from the light source for illuminating a first half facing area on the reflective polarization modulation imager, while reflecting second portion in second polarization state perpendicular to first polarization state towards the reflective quarter wave composite plate. The reflective quarter wave composite plate reflects, while 90-degree polarization rotating from second polarization state to first, the received second portion back to the planar polarization beam splitter.