Abstract: According to one embodiment, a pattern forming method includes forming a resist pattern on a substrate, forming a first silicone resin layer so as to bury the resist pattern on the substrate, pressing a film on the surface of the first silicone resin layer to adhere the film thereto, curing the first silicone resin layer after the adhesion of the film, peeling the film from the first silicone resin layer before or after the curing of the first silicone resin layer, and removing the resist pattern after the peeling of the film.

Abstract: There is provided a technique in which in an optical beam scanning device, optical characteristics can be suitably corrected according to a change in environmental temperature.

Abstract: A method for fabricating a semiconductor device and an equipment for fabricating the semiconductor device are described. According to the method and the equipment, a semiconductor substrate is irradiated with a particle beam through an opening formed in a thin film portion of a stencil mask having the thin film portion and a supporting portion supporting the thin film portion. The method and the equipment are controlled so that the supporting portion of the stencil mask can be irradiated with the fringe of the particle beam. As a result, the method and the equipment provide suppressing deterioration such as deformation or breakage of the stencil mask.

Abstract: In an intelligent work station of this invention, map information for a target is stored in a database. Word speech data input through a telephone line is recognized and analyzed, and the database is retrieved accordingly, so that map information specified by the speech input is extracted from the database. The map information is transmitted to a destination communication terminal. When the destination communication terminal does not have an image output function, the map information is analyzed, and document data representing the content of the map is created. The document data is speech-synthesized, and is output to the destination communication terminal via the telephone line.