Abstract: Active particles which when incorporated into a photosensitive composition containing base resin and diazonium-series photosensitizer provide improvement in at least one or both of sensitivity and resolutionn. The active particles include a particulate carrier, such as silica sol, and an aromatic unit directly or indirectly bonded to the carrier. The aromatic unit has a phenolic hydroxyl group and no substituent in at least one of the o- and p-positions, in relation to the phenolic hydroxyl group. The active particles, when incorporated into the photosensitive composition can, after exposure, increase solubility difference between the exposed and non-exposed areas.

Abstract: photosensitive resin composition of the present invention is prepared by adding inorganic particles having a functional group and a mean particle size smaller than the wavelength of light for exposure (e.g., about 1 to 100 nm) to a photosensitive resin. The inorganic particles can be of colloidal silica having a functional group. The photosensitive resin composition may be of positive or negative type, and developable with water or an alkali. The amount of the inorganic particles to be used is, relative to 100 parts by weight of the photosensitive resin, about 10 to 500 parts by weight on a solid matter basis. The use of such photosensitive resin composition makes it possible to largely improve oxygen plasma resistance, heat resistance, dry etching resistance, sensitivity, and resolution utilizing a conventional resist or lithography technique.

Abstract: Fine colored particles include a dye adsorbed on metal oxide fine particles having a nanometer size, and stabilized with an organic compound having an ionic group. Thus, fine colored particle having a nanometer size having good color properties, transparency and storage stability can be produced with high reproducibility.

Abstract: A piezoelectric element capable of improving piezoelectric characteristics of a piezoelectric film is provided, and performance and durability of an ink-jet printer head are improved. A piezoelectric film 7 sandwiched between a lower electrode 6 and an upper electrode 8 is formed of PZT expressed by a chemical formula, Pb(Zr1—xTix)O3 (0.3≦x≦0.9) or formed of a material mainly composed of PZT, and concentration ratio of titanium to zirconium in the piezoelectric film is gradually increased or gradually decreased from upper electrode side to lower electrode side.