Abstract: The invention relates to a device for introducing a carrier gas and liquid compounds or a liquid solution into an evaporation chamber, comprising a mixing chamber, including at least:—a first inlet for the admission of said compounds or said solution,—a second inlet for the admission of the carrier gas,—and an outlet connected to an inlet of an injector, so that a mixture of carrier gas and droplets of said compounds or of said solution is periodically injected, through a single injector outlet, into the evaporation chamber.
Type:
Grant
Filed:
October 11, 2013
Date of Patent:
July 12, 2016
Assignee:
KEMSTREAM
Inventors:
Herve Guillon, Samuel Bonnafous, Jean Manuel Decams, Frederic Poignant
Abstract: The invention relates to a device for introducing a carrier gas and liquid compounds or a liquid solution into an evaporation chamber, comprising a mixing chamber, including at least:—a first inlet for the admission of said compounds or said solution,—a second inlet for the admission of the carrier gas,—and an outlet connected to an inlet of an injector, so that a mixture of carrier gas and droplets of said compounds or of said solution is periodically injected, through a single injector outlet, into the evaporation chamber.
Type:
Application
Filed:
October 11, 2013
Publication date:
February 6, 2014
Applicant:
Kemstream
Inventors:
Herve Guillon, Samuel Bonnafous, Jean Manuel Decams, Frederic Poignant
Abstract: The invention relates to a device for introducing (1) a carrier gas (2) and liquid compounds (3) or a liquid solution into an evaporation chamber (4), comprising a mixing chamber (10), including at least: —a first inlet (8) for the admission of said compounds or said solution (3), —a second inlet (9) for the admission of the carrier gas (2), —and an outlet (13) connected to an inlet of an injector (14), so that a mixture of carrier gas and droplets of said compounds or of said solution is periodically injected, through a single injector outlet (14), into the evaporation chamber (4).
Type:
Grant
Filed:
April 18, 2007
Date of Patent:
November 19, 2013
Assignee:
Kemstream
Inventors:
Hervé Guillon, Samuel Bonnafous, Jean Manuel Decams, Frédéric Poignant
Abstract: The invention relates to a device for introducing (1) a carrier gas (2) and liquid compounds (3) or a liquid solution into an evaporation chamber (4), comprising a mixing chamber (10), including at least: —a first inlet (8) for the admission of said compounds or said solution (3), —a second inlet (9) for the admission of the carrier gas (2), —and an outlet (13) connected to an inlet of an injector (14), so that a mixture of carrier gas and droplets of said compounds or of said solution is periodically injected, through a single injector outlet (14), into the evaporation chamber (4).
Type:
Application
Filed:
April 18, 2007
Publication date:
March 26, 2009
Applicant:
KEMSTREAM
Inventors:
Herve Guillon, Samuel Bonnafous, Jean Manuel Decams, Frederic Poignant