Abstract: A vaporizer body (1) having a vaporizing surface (3) for vaporizing metal in a PVD-metallization installation, wherein the vaporizing surface (3) comprises a plurality of recesses (5, 5?, 5?), with an opening of the respective recess having an area/perimeter-ratio of greater than or equal to 1.5 mm.
Type:
Grant
Filed:
November 15, 2019
Date of Patent:
October 18, 2022
Assignee:
KENNAMETAL SINTEC KERAMIK GMBH
Inventors:
Michael Hans Nürnberger, Rudolf Karl Grau, Hubert Josef Schweiger
Abstract: A vaporizer body (1) having a vaporizing surface (3) for vaporizing metal in a PVD-metallization installation, wherein the vaporizing surface (3) comprises a plurality of recesses (5, 5?, 5?), with an opening of the respective recess having an area/perimeter-ratio of greater than or equal to 1.5 mm.
Type:
Grant
Filed:
March 11, 2009
Date of Patent:
December 24, 2019
Assignee:
KENNAMETAL SINTEC KERAMIK GMBH
Inventors:
Michael Nürnberger, Rudolf Grau, Hubert Schweiger