Abstract: The invention relates to an electronic circuit (1) consisting of a substrate (10) having a surface on which at least one component (3) covered with a lid (22) is mounted. Said component comprises first connection means (15) to be connected to second connection means (70). In said circuit (1), at least one connection passage (50) is provided that extends through the lid in order to link the first connection means (15) to the outside of the lid, which then makes it possible to link the first means to the second connection means (70) (see FIG. 2). The invention can be used for the production of microsystems that require the encapsulation of some components.
Type:
Application
Filed:
December 8, 2011
Publication date:
May 15, 2014
Applicant:
KFM TECHNOLOGY
Inventors:
Sebastien Brault, Elisabeth Dufour-Gergam, Fabrice Verjus, Martiel Desgeorges
Abstract: A method for encapsulating structures (11) (typically MEMS structures) supported by a carrier substrate (12) (typically made of glass or silicon), includes: application, on the carrier substrate (12), of at least one cover (7) supported by a mould (1, 2, 6), the mould including a catching layer (6), each cover (7) being in contact with the catching layer (6); then fastening of at least one cover (7) onto the carrier substrate (12); and then separation of the mould (1, 2, 6) from the at least one cover (7). The catching layer (6) includes a fluoropolymer. Preferably, the mould (1, 2, 6) is mechanically separated from the at least one cover (7), by pulling the mould (1, 2, 6) away from the at least one cover (7). Thus, the mould (1) can be reused, which considerably simplifies encapsulating operations carried out on an industrial scale.
Type:
Grant
Filed:
July 31, 2009
Date of Patent:
December 31, 2013
Assignee:
KFM Technology
Inventors:
Sebastien Brault, Elisabeth Dufour-Gergam, Martial Desgeorges
Abstract: A method for encapsulating structures (11) (typically MEMS structures) supported by a carrier substrate (12) (typically made of glass or silicon), includes: application, on the carrier substrate (12), of at least one cover (7) supported by a mould (1, 2, 6), the mould including a catching layer (6), each cover (7) being in contact with the catching layer (6); then fastening of at least one cover (7) onto the carrier substrate (12); and then separation of the mould (1, 2, 6) from the at least one cover (7). The catching layer (6) includes a fluoropolymer. Preferably, the mould (1, 2, 6) is mechanically separated from the at least one cover (7), by pulling the mould (1, 2, 6) away from the at least one cover (7). Thus, the mould (1) can be reused, which considerably simplifies encapsulating operations carried out on an industrial scale.
Type:
Application
Filed:
July 31, 2009
Publication date:
July 7, 2011
Applicant:
KFM TECHNOLOGY
Inventors:
Sebastien Brault, Elisabeth Dufour-Gergam, Martial Desgeorges