Abstract: A buffer tank section (6) includes a liquid accumulation chamber (61) communicating with, through a liquid introduction flow path (42), a liquid tank (46) accumulation chemical liquid. A filter section (4) includes a filter inlet (41a) and a filter outlet (41b), wherein the filter inlet (41a) communicates with a liquid discharge vent (60d) of the buffer tank section (6). In a pump (11), a pump inlet (11a) is connected to the filter outlet (41b) and a pump outlet (11b) is connected to a discharge nozzle (50) through a liquid discharge flow path (47). A return flow path (48) is connected between the pump outlet (11b) and the buffer tank section (6), wherein the chemical liquid, discharged from the pump (11), is returned to the liquid accumulation chamber (61). An exhaust flow path (49) is connected to the buffer tank section (6), thereby exhausting air in the liquid accumulation chamber (61).

Abstract: A fluid pressure cylinder has a piston rod 18 fixed to a piston 26 and projecting outside a cylinder body 23. A lock surface 43 inclining to a radial direction of the piston rod 18 is formed in an engagement member 31 provided in the piston rod 18. A lock rod 35 reciprocating in an about right-angle direction to the piston rod 18 is built into a lock cylinder 33 provided in the cylinder body 23. The lock rod 35 is provided with: a large-diameter section 35a fitted into a guide hole 36 formed in the lock cylinder 33; and a slide contact section 37 provided in the large-diameter section 35a via a constriction section 35b. The slide contact section 37 contacts with a radial-inner portion of the lock surface 43 when the lock rod 35 comes nearest to the piston rod 18.