Patents Assigned to Lam Reseach Corporation
  • SHOWERHEAD ELECTRODE WITH CENTERING FEATURE
    Publication number: 20100252197
    Abstract: A showerhead electrode includes inner and outer steps at an outer periphery thereof, the outer step cooperating with a clamp ring which mechanically attaches the electrode to a backing plate.
    Type: Application
    Filed: April 7, 2009
    Publication date: October 7, 2010
    Applicant: Lam Reseach Corporation
    Inventors: BABAK KADKHODAYAN, Anthony de la Llera