Patents Assigned to Lambda Physik Forschungsgellschaft
  • Method and apparatus for monitoring the working of a workpiece with pulsed laser radiation
    Patent number: 5173584
    Abstract: For monitoring the working of a workpiece (W) with pulsed radiation of an excimer laser the workpiece surface is periodically illuminated with visible light (B) synchronously with at least some of the laser pulses. A mirror arrangement (S) separates visible light from ultraviolet laser light so that an image corresponding to the working operation can be picked up with a video camera (VK).
    Type: Grant
    Filed: April 19, 1991
    Date of Patent: December 22, 1992
    Assignee: Lambda Physik Forschungsgellschaft
    Inventors: Hans-Jurgen Kahlert, Ulrich Sowada