Abstract: The invention relates to a measured value pickup for vacuum measurements, with the pickup including a sensor as well as electronic circuits for supplying the sensor with voltage, and a signal processing device. In order to be able to employ the measure value pickup independently of the location of the measured value processing system, it is proposed to configure it as a transmitter.

Abstract: A rotary vane vacuum pump includes a pump housing; a bearing support having a bearing bore; a drive motor having an output shaft extending into the bearing bore; and a pump rotor accommodated in the pump housing and having a rotor shaft extending into the bearing bore. The rotor shaft and the output shaft have respective radial end faces oriented towards one another and the output shaft and the rotor shaft have identical diameters. There is further provided a torque-transmitting coupling connecting the output shaft with the rotor shaft at respective radial end faces thereof; a first sealing ring situated in the bore and sealingly surrounding the output shaft; a second sealing ring situated in the bore and sealingly surrounding the rotor shaft; and a lubricant chamber formed by a part of the bearing bore and being bounded and sealed by the first and second sealing rings.

Abstract: A vacuum pump includes a first pump housing defining a pumping chamber; a pump rotor received in the pumping chamber; a drive motor operatively connected to the pump rotor; an oil casing receiving the first pump housing; and a second pump housing surrounding the first pump housing and the drive motor.

Abstract: A deuterium lamp with a quartz glass bulb for spectral analyzers is disclosed. At least the portion of the quartz glass bulb through which the radiation produced passes is provided on its outer surface with a multiple interference filter layer; the physical layer thickness of each layer is in the range from 10 to 70 nm. The multiple layer comprises atlternating aluminum oxide and silicon dioxide, or magnesium fluoride. The interference filter layers are preferably vapor-deposited in a vacuum.

Abstract: A housing 3 disposed below the rotor accommodates a driving motor 13, shaft bearings 14, 15 and an oil sump 21. An evacuating line 31 which traverses the wall the housing 3 connects a vacuum pump to the interior 18 of the housing. In order to avoid the loss of oil in the housing or the bearings, the evacuating line 31 and the oil sump 21 are directly connected.

Abstract: The invention relates to an apparatus for the plasma treatment of substrates in a plasma discharge excited by radiofrequency between two electrodes 3, 8, supplied by a radiofrequency source, of which the first is configured as a hollow electrode 3 and the second an electrode 8 bearing a substrate 7 is placed in front of the cavity (10) of the first electrode and can be moved past the latter, the hollow electrode being surrounded by a dark-space shielding (14) and has a margin 9 pointing toward the second electrode 8 and projections 12 lying between the margins at the same potential as the first electrode 3. Between the projections 12 permanent magnets 34 are provided by which the substrate bias (self-bias) is adjustable independently of the discharge geometry, the discharge pressure and the radiofrequency power.

Abstract: A two-stage cryopump having a refrigerator including a first stage and a second stage being colder than the first stage; a condensation member having a condensation surface; a first coupler for connecting the condensation member to the second stage in a thermally conducting manner; an adsorption member having an adsorption surface and being spaced from the condensation member; and a second coupler for connecting the adsorption member to the second stage in a heat conducting manner. There is further provided a heater for heating the adsorption member during time periods for regenerating the adsorption member. The second coupler is so designed that it thermally sufficiently insulates the adsorption member from the second stage and from the condensation member at least during heating periods of the adsorption member, for preventing heating the condensation member by the heater.

Abstract: A refrigerator operating on the Gifford-McMahon principle includes a housing defining a work chamber; a displacement member received in the housing and being movable back and forth between two dead center positions; a regenerator mounted in the displacement member; a piston attached to and extending from the displacement member; a drive cylinder disposed in the housing and being arranged for slidably receiving the piston; an arrangement for introducing a low-pressure working gas and a high-pressure working gas into the drive cylinder and the work chamber for reciprocating the displacement member between its dead center positions; a device for exerting a continuous force on the displacement meber in one of the directions of its reciprocation; and a throttle-containing conduit communicating with the drive cylinder for continuously maintaining either the low-pressure gas or the high-pressure gas in the drive cylinder dependent upon the direction in which the continuous force is oriented.

Abstract: The invention relates to a circuit configuration for the automatic tuning of a matching network (2) disposed between an electrical energy source (1) and a load (3). Herein two measured signals (U.sub.E, U.sub.1) are received from which are formed the magnitudes of three signals (U.sub.E, U.sub.1, I.sub.E) from which, in turn, the control values x.sub.1, x.sub.2 are determined for the setting of the matching network (2).

Abstract: The invention is directed to a viewing glass having a transparent pane and a pair of flanges. In order to facilitate simple manufacture of the viewing glass, it is proposed that the pane be arranged in an inside step of the one of the flanges and be surrounded by an O-ring for producing a vacuum-tight connection. The edge of the pane and the step of the flange preferably have corresponding frustoconical surfaces.

Abstract: The invention relates to a particle source with which positive, negative, and neutral particles can be generated and applied on a substrate. The particle source comprises a container (26) in which a gas or gas mixture to be ionized is held. Into this container (26) an electromagnetic wave irradiates which preferably is a microwave. A torus-shaped magnetic field, which is generated with the aid of permanent magnets (32, 33) or electromagnets, simultaneously projects into the container (26). With the aid of a special control grid configuration (38, 39, 40) it becomes possible to draw off positive, negative or neutral particles from the container (26).

Abstract: A method for manufacturing a film resistor for use as a thermal conductivity detector, particularly for gas analyzers. The film resistor is composed of a carrier of insulating material and of a thin resistance layer, preferably composed of platinum, that is applied to the carrier by cathode sputtering in an atmosphere inert gas. The resistant layer and the carrier are cleaned proceeding from the metallized side using an argon sputtering process. The film resistor is then coated with at least one plasma-enhanced CVD layer for the purpose of protection against aggressive gases.

Abstract: A filter cartridge for cleaning oil of an oil sealed vacuum pump which comprises a cartridge housing, the cartridge housing being releasably mounted to the vacuum pump; filter materials including at least two types of filters having different characteristics, the filter materials including the filters being disposed in the cartridge housing.

Abstract: The invention relates to an inductively excited ion source with a vessel (1) around which a coil (2) is wound. The vessel (1) consists of a chemically inert material and is used to receive the substance to be ionized. A high-frequency generator (12) is connected by one of its terminals to the coil (2) both ends of which are grounded, while the other terminal (22) is also grounded. The length of the coil (2) which is to be regarded as an electrically long conductor, is .lambda./2, .lambda. being the wavelength of the voltage of the high-frequency generator (12) (FIG. 3).

Abstract: The invention relates to a method and apparatus for the purification and recirculation of gases which are fed to a plant for the production of metal powder or for compacting metal powder at elevated pressures. The operating gas exits the plant at a lower pressure and is conveyed in a closed loop, in which filters are provided for the mechanical and/or chemical purification of the gases as well as means for increasing the pressure of the purified gas. The repressurization of the operating gas is carried out economically by liquefying the operating gas leaving the plant after purification by the application of liquid nitrogen, then feeding the liquefied gas to an evaporator via a high-pressure pump, and finally returning the operating gas to the plant in a pressurized gaseous phase.