Abstract: A metallizing device for vacuum metallizing arrangements is disclosed having a vaporizer (3) heated by an electrical heating rod (8). This vaporizer (3) is connected to a nozzle element (1) in the form of a hollow body. For the purpose of vaporizing a substrate, vapor flows out of the vaporizer (3) into the nozzle element (1) and from there out of a nozzle gap (2) toward the substrate.

Abstract: A device for coating plate-shaped substrates by using cathode sputtering has several process chambers one after the other, each of which are bordered on the top by a chamber roof having in each case an opening. In this opening, which is covered at the top by a cathode arrangement, a frame is inserted. Screens and coolant lines of the process chamber are provided on the frame that can slide upwards out of the opening, projects into the process chamber, and is supported inside the opening of the chamber roof. A top of the cathode arrangement projects over the frame on the sides and is supported directly on the chamber roof so it seals it.

Abstract: An apparatus is disclosed for the coating of substrates (10) with thin films, having a vacuum chamber (1), a target (6) to be atomized, situated opposite the substrate (10) in the vacuum chamber (1), with magnets (19, 19′, 19″; 20, 20′, 20″) to produce a magnetic tunnel in front of the area of the target (6) to be atomized, an inlet (8) for a process gas into the process space (11), an anode (12), which is electrically insulated with respect to the vacuum chamber (1), and a current-voltage supply to produce a plasma in front of the target (6). The target (6) is shaped as a rotation-symmetrical body, which provides a ring-shaped enclosure around the substrate (10), wherein the magnets (19,19′, . . . ; 20,20′, . . . ) are supported on the side of the hollow cylindrical target (6), facing away from the substrate (10), and can move around the rotational axis (R) of the target (6).

Abstract: A sputtering cathode with a flat plate-shaped target (8) and a tub-shaped yoke (3) arranged behind the target (8), with center ridge (5) and with magnets (7,7′) for generating an enclosed tunnel of arc-shaped curved field lines (15,15′) in front of the target surface, as well as with three sheet metal cutouts (9,10,11) or groups of partial cutouts inserted into the plane between the target (8) and the end faces (12) of the tub rim of the yoke (3) facing the target (8), all the sheet metal cutouts (9,10,11) together form two gaps (a,b) extending roughly parallel to the end faces (12,13), wherein the magnets (7,7′) are each incorporated or inserted into the yoke bottom and the side surfaces of the magnets (7,7′) facing towards and away from the target (8) run flush with the yoke bottom.

Abstract: A thermally insulating coating system for curved and/or hardened glass panes includes at least one layer of noble metal enclosed by a lower and an upper blocker layer. An underoxidic NiCrOx layer with a thickness between one Å and two nm is embedded into the noble-metal layer. The advantage is that the optical qualities of the coating system are not influenced by the tempering and curving of the glass pane.

Abstract: Apparatus for the gluing of two substrates in six processing steps for fabrication of a digital video disc including a motor-driven plate (2) for holding the first substrate (5), a glue dispenser disposed above the plate (2), grasping and holding device for providing vertical movement of the second substrate (7). The side of the plate turned toward the first substrate (5) has a radially outer plane portion (10) in the form of a disk concentric to its axis of rotation (R) and a radially inner portion (11) adjacent to this where the face (F) of this inner portion (11) turned toward the substrate (5) is formed by the outer face of a flat, straight frustum of a cone whose peak (S) strikes the axis of rotation (R) below the plane of application (E) of the substrate (5). In the transitional area from the annular portion (10) to the conical portion (11) an annular groove (12) running coaxially to the axis of rotation is cut into the plate (2) which is connected to a pressure source via channels (13, 13′, . . .

Abstract: In a dust precipitation device for filtration of dust created during crystal growth from a melt, cold surfaces are provided as contact surfaces as a part of the gas control geometry, to which the dust can adhere and thus become separated from the transport gas pumped from the processing chamber. Due to cooling of the flow contact surfaces, for example, by a coolant that is supplied via coolant lines blockable by valves, the dust is filtered very effectively from the transport gas. The extraction device has several precipitation chambers located one behind the other for the passage and filtering of the dust from the transport gas. The individual precipitation chambers are connected to each other so that they can be individually removed from or inserted into the precipitation device, for example, manually.

Abstract: A device for producing plasma in a vacuum chamber (13) with the help of electromagnetic alternating fields, in which a rod-shaped conductor (3) that is inside a pipe (2) and is made of an insulating material and is guided into the vacuum chamber (13). The inner diameter of the insulating pipe (2) is larger than the diameter of the conductor (3). The insulating pipe (2) is held in the wall (1) of the vacuum chamber (13) at one end, and its outer surface is sealed across from the vacuum chamber wall. The conductor (3) is connected to a source (9) for producing the electromagnetic alternating field. A pipe-shaped conductor (4) extends coaxially to the rod-shaped conductor (3) in the annulus formed by the rod-shaped conductor (3) and the insulating pipe (2), whereby the radial inner ring slot (14) formed between the rod-shaped conductor (3) and the pipe-shaped conductor (4) corresponds to the waveguide (10) of the source (9).

Abstract: In a device for generating plasma in a vacuum chamber (9) with the aid of alternating electromagnetic fields, at least one rod-shaped conductor (7) is guided inside of a tube (16) made of insulating material through the vacuum chamber (9), the insulating tube (16) is held at its ends in one or in the opposing walls (6;17,17a) of the vacuum chamber (9) and is sealed off, wherein one or both ends of the rod-shaped conductor (7) are connected to a generator (18,19), wherein one or both ends of the rod-shaped conductor (7) are surrounded by outer conductors (20,21), each extending from the generator (18,19) to the respective inside wall surface (22,22a) of the vacuum chamber (9), wherein, in the area of the wall passages, the rod-shaped conductor (7) connected to the sources (18,19) and the outer conductors (20,21) surrounding it are each provided with a branch constituting a bypass (23,24), wherein a second rod-shaped conductor (26) extending into or through the vacuum chamber (9) surrounded by a second insulati

Abstract: In a sputter cathode with a plate-shaped target (8) and with a trough-shaped yoke (3), arranged behind the target (8), with middle web (5) and with magnets (7, 7', . . . ) for producing a closed tunnel of field lines (15, 15', . . . ) curved in an arc in front of the target surface as well as with three sheet-metal blanks (9, 10, 11) consisting of one layer of a compound plate e.g. of an aluminum/iron compound plate, which blanks are placed into the plane between the target (8) and the front surfaces (12, 13) of the trough edge of the yoke (3), which front surfaces face the target (8), all sheet-metal blanks (9, 10, 11) of magnetically conductive material together form gaps (a, a') extending approximately parallel to the front surfaces (12, 13), which gaps (a, a') are filled out between the sheet-metal blanks (9, 10, 11) by the other layer (21) of the compound plate.

Abstract: For coating substrates (17,18,20,21,22) in a vacuum-coating chamber (2) the substrates are introduced by an air lock into the coating chamber (2) and moved along a transport path in front of the coating sources (50a,b,c,d) producing a coating cloud. To this end, the substrates (17,18,20,21,22) are led past the coating sources (50a,b,c,d) by means of holding devices (24) arranged movably on a transport belt (9) during at least two successive coating phases. During the one coating phase, the substrates (17,18,20,21,22) are oriented along one transport direction T.sub.3 oriented towards the coating sources (50a,b,c,d) such that essentially the substrate bottom of the cylindrical substrate is coated. During the subsequent second coating phase, the substrates are oriented in front of the coating sources (50a,b,c,d) in a direction T.sub.4 opposite the transport direction T.sub.3, wherein the substrates (17,18,20,21,22) are oriented such that essentially the cylindrical side surface is coated.

Abstract: A pulling shaft extension (2) is fastened to a pulling shaft (1). This pulling shaft extension contains a driver (13) that protrudes outward similar to a flange and is in the form of a ball bearing. A carrying ring (6) of a gripping device (4) is arranged above the driver (13). If the pulling shaft (1) is moved upward, it drives the gripping device (4) upward as soon as its driver (13) contacts the holding ring (6). An actuating piston (18) makes it possible to move gripping arms (5) of the gripping device (4) into a clamping position such that the crystal block is held by the gripping arms.

Abstract: A device for controlling crystal growth processes which run through various process phases, for instance, melting or cool-down, and in which the shape of the crystal has different areas during growth, for instance, a neck and/or a shoulder. Certain process parameters and target values, as well as input values and output values, for instance, a certain gas pressure or a certain rotational speed, are also associated with each of these areas and phases. The linking of these parameters is accomplished by function generators or tables. With the aid of the control device, it is made possible to generate a specially adapted linking of the respectively necessary input and output parameters for each of the special process phases and crystal sections with an essentially uniform construction and a comprehensible structure.

Abstract: For the application of a scratch protection layer on plastic substrates, a plasma is produced by the plasma CVD method, away from the individual plastic substrate, in an excitation gas, and this excitation gas is supplied through a tube to the plastic substrate. Subsequently, an antireflection layer is applied by means of a gas flow sputter source. The apparatus provided for this has a plasma CVD chamber (1) and a gas flow sputter chamber (2), next to one another. The plastic substrates (7,8) to be coated are transported from the plasma CVD chamber (2) to the gas flow sputter chamber (1) with the aid of a transporting device (3), designed as a turning plate.

Abstract: A processing station arranged in a vacuum chamber (2) for the coating of workpieces by a device, which loads or empties the workpieces through at least one opening set in the chamber wall (3,3',3") of the vacuum chamber(2) which can be closed off with a cover (14,14'). The loading/unloading device includes a vertically oriented shaft (42), on which a pusher part (26,26') is affixed, which primarily is movable by a lever mechanism through a push/pull connecting rod (40,40'). A gripping device (10,10';11'11') is arranged on the pusher part (26,26') for the transport of the workpieces. Through rotation of the shaft (42), the push/pull connecting rod (40,40') is radially moved between an open position (P.sub.2) of the cover (14,14') near the axle and a closed position (P.sub.1) of the cover (14,14') away from the axle. In the closed position (P.sub.2) of the cover, the gripping device projects completely into the vacuum chamber (2).

Abstract: An apparatus is provided for coating a substrate (24) with thin layers from targets (12, 13) between which a gas discharge plasma is sustained in order to produce the ions necessary for the bombardment of the targets (12, 13) connected to alternating current. The process chamber (6) contains a gas under a specific partial pressure. The targets (12, 13) are connected to a power source in such a circuit so that they alternately form the cathode and anode of the gas discharge. The reversal of the current direction is performed through an H bridge (4) formed of four switches (16 to 19), the conductor (14) connecting the H bridge (4) to a first power source (3) being connected through a branch line (21) to a second power source which can be connected by a switch (20) to ground.

Abstract: A sputtering cathode based on the magnetron principle, with a target of the material to be sputtered having a minimum of one component, with a magnetic system located beneath the target and having magnetic sources of different polarization which form a minimum of one self-enclosed tunnel of arcuate magnetic lines of force, having the poles of the sources facing away from the target connected to each other via a magnetic yoke made of a material of low retentivity, the bodies forming the sources of the magnetic fields being right prisms, and preferably right parallelepipeds, the base edges of which run parallel to the target plane, with the magnetic lines of force of the sources running at inclined angles relative to the base surfaces of the bodies.

Abstract: A vacuum coating device coats substrates on all sides by rotating the substrates in a material flow. The device is for use in a vacuum chamber with a material source, and includes a holder for holding the substrates opposite the material source and drives correlated with the holder to bring about a rotation and shifting movement of the substrates. The device includes a hollow manipulator arm formed from three legs which extend at an angle with respect to one another. More specifically, the first leg extends at an obtuse angle with respect to the second leg, and the second leg extends at an approximately right-angle with respect to the third leg. The substrates are then held at the end of the third leg by the holder. The manipulator arm, when driven by a motor, can rotate around the longitudinal axis of the first leg, and, moreover, can move back and forth in the direction of this longitudinal axis.

Abstract: The present invention provides a new method and system for producing a digital optical recording. The process can be divided into two separate operations: mastering of the optical recording on the surface of an elongated member, such as a cylinder, etc., and fast replication of the master record onto the surface of flexible film which is essentially parallel to the surface of the cylinder, etc.

Abstract: In a device for handling heavy components of a crystal puller according to the Czochralski method, a supporting beam that can be pivoted about one vertical leg of a supporting frame and vertically adjusted includes holding claws for accommodating components or auxiliary devices. Profile rails, on which a carriage can be laterally displaced, are arranged perpendicular to the supporting beam. The carriage can be connected to a receptacle for gripping and holding the crystal.