Abstract: An apparatus and method for warm-liquid defrosting of the evaporator of a refrigeration system. The apparatus includes a first refrigerant expansion device that selectively expands refrigerant for cooling the evaporator, a second refrigerant expansion device that selectively expands the refrigerant after the refrigerant has passed through the evaporator, and a defrosting control for the first refrigerant expansion device and second refrigerant expansion device to selectively defrost the evaporator by causing warm refrigerant to flow through the evaporator.

Abstract: An apparatus and method for performing automated defect spatial signature alysis on a data set representing defect coordinates and wafer processing information includes categorizing data from the data set into a plurality of high level categories, classifying the categorized data contained in each high level category into user-labeled signature events, and correlating the categorized, classified signature events to a present or incipient anomalous process condition.