Abstract: A high power extreme ultraviolet (EUV) beam is produced. An electron beam is injected in a compact electron storage ring configured for emission of free-electron laser (FEL) radiation. The electron beam is passed through a magnetic undulator on each of a plurality of successive revolutions of the electron beam around the compact electron storage ring. The electron beam is induced to microbunch and radiate coherently while passing through the magnetic undulator. A portion of the free-electron laser radiation at an extreme ultraviolet wavelength produced by an interaction of the electron beam through the magnetic undulator is outputted.

Abstract: The manufactured structure is illuminated with an x-ray beam. The manufactured structure is positioned at a selected grazing angle and a selected rotation angle with respect to the x-ray beam. The selected rotation angle has been selected to enhance in-plane diffraction of reflections of the x-ray beam by the manufactured structure. A grazing in-plane diffraction beam produced by interference with the periodic feature is detected. A property of the grazing in-plane diffraction beam is determined by the critical dimension.

Abstract: A Compton backscattering x-ray source includes an electron storage ring for storing electron bunches. A timing system refreshes an orbiting electron bunch according to a schedule selected to improve at least one attribute of x-ray emission. In one implementation, the electron bunch is periodically refreshed with a period of at least about 10 Hz.

Abstract: A mirror is reflective to light and transmissive to x-rays. The mirror has a continuous mirror surface and an x-ray aperture within a body portion of the mirror proximate the continuous mirror surface that is transmissive to x-rays.

Abstract: A Compton backscattering x-ray source includes an electron storage ring for storing electron bunches. A timing system refreshes an orbiting electron bunch according to a schedule selected to improve at least one attribute of x-ray emission. In one implementation, the electron bunch is periodically refreshed with a period of at least about 10 Hz.

Abstract: A high finesse optical resonator is used to store optical pulses of a mode-locked laser. The mode-locked laser is frequency stabilized by monitoring an optical attribute of the high finesse optical resonator indicative of a difference between a center frequency of the mode-locked laser and a resonant frequency of the high finesse optical resonator. In one embodiment FM sideband modulation is used to stabilize the mode-locked laser pulses.

Abstract: A passive optical resonator stores optical pulses within a cavity to increase the optical power level of input pulses via resonant reflections without the use of an internal optical gain medium. In one embodiment for a Compton backscattering system, the optical resonator is a passive high finesse optical resonator that includes a mirror that is transmissive to x-rays.

Abstract: A Compton backscattering x-ray source includes an electron storage ring for storing electron bunches. A timing system refreshes an orbiting electron bunch according to a schedule selected to improve at least one attribute of x-ray emission. In one implementation, the electron bunch is periodically refreshed with a period of at least about 10 Hz.

Abstract: A mirror is reflective to light and transmissive to x-rays. The mirror has a continuous mirror surface and an x-ray aperture within a body portion of the mirror proximate the continuous mirror surface that is transmissive to x-rays.