Abstract: OBJECT To make an object to be observed observable with high resolution and to make an inclination angle of a surface of the object to be observed recognizable over a wide range. SOLUTION An image observation system 100 provided with a lighting optical system 116 irradiating an object to be observed W with an illumination light and an observation optical system 122 collecting object light from the object to be observed W to guide to a detector 126, the image observation system 100 comprising an objective lens 122A opposed to the object to be observed W, a beam splitter 116B disposed on an opposite side to the object to be observed W with respect to the objective lens 122A, and a relay image RI of the illumination light splitting member 114 for dividing wavelength regions R, G and B of the illumination light into a plurality of different solid angle regions IS1, IS2 and IS3, being disposed in front of the objective lens 122A.

Abstract: [Problem] When the inclination of an object surface reaches or exceeds a certain level, direct light consisting of a specularly reflected light component leaves the range of the solid observation angle formed by the observation optical system, and it becomes difficult to continuously and quantitatively obtain the surface shape of the object surface.

Abstract: An illumination device has a light source unit, a lens unit, and a filter unit An imaging device receives object light, generated by the illumination light, from the measurement object at a predetermined observation solid angle, and pixels of the imaging device can each identify the different light wavelength ranges. A processing device includes an arithmetic unit configured to obtain a normal vector at each point of the measurement object corresponding to each pixel from inclusion relation between the plurality of solid angle regions, constituting the object light, and the predetermined observation solid angle, and a shape reconstruction unit configured to reconstruct the shape of the measurement object.

Abstract: Provided is an inspection lighting device with which, even when changes in light that occur at respective feature points on an object to be inspected are small, the amounts of those changes in light can be determined across the entire field-of-view range, and the feature points can be detected under exactly the same conditions.

Abstract: Provided is an inspection lighting device with which, even when changes in light that occur at respective feature points on an object to be inspected are small, the amounts of those changes in light can be determined across the entire field-of-view range, and the feature points can be detected under exactly the same conditions. An inspection lighting device 100 includes a surface light source 1 and a lens 2 that is disposed between the surface light source 1 and an inspection object W, the lens 2 being disposed nearer to the inspection object W such that at least one of a shielding mask M1 and a filtering means F1 is located centered around a focal distance position of the lens. An irradiation solid angle of light emitted from the surface light source 1 and irradiated onto the inspection object W by the lens 2 is configured to have solid angle regions as desired, the solid angle regions having specific optical attributes.

Abstract: In the inspection lighting device, between a surface light source for emitting an inspection light and the inspection object, at least one shielding mask is disposed, and a lens is disposed on a side closer to the inspection object than the shielding mask such that the shielding mask is positioned across the focus position of this lens as a center. In an irradiation solid angle of the inspection light for the inspection object formed when the light emitted from the surface light source is irradiated on to the inspection object by the lens the shielding mask forms a dark area. So that, in accordance with a change in reflection, transmission, scattering occurring at a feature point on the inspection object, a shape, a size, a tilt of the irradiation solid angle of the inspection light can be changed.