Patents Assigned to MACOM Technology Solutions Holding, Inc.
  • Publication number: 20240170920
    Abstract: Aspects of the present disclosure describe semiconductor DFB laser structures including both pumped and unpumped regions/sections wherein unpumped regions act as DBR reflector(s) while pumped regions act as DFB gratings. Semiconductor DFB laser devices according to aspects of the present disclosure include an active layer that extends the length of the device that is identical in both pumped and unpumped regions/sections.
    Type: Application
    Filed: November 20, 2022
    Publication date: May 23, 2024
    Applicant: MACOM Technology Solutions Holdings, Inc.
    Inventors: Yifan JIANG, Wolfgang PARZ, Padman PARAYANTHAL
  • Patent number: 11990343
    Abstract: A method of manufacturing an electrode structure for a device, such as a GaN or AlGaN device is described. In one example, the method includes providing a substrate (212) of GaN or AlGaN with a surface region of the GaN or AlGaN exposed through an opening (216) in a layer of silicon nitride (214) formed on the substrate. The method further includes depositing layers of W (222), in one example, or Ni (220) and W (222), in another example, on the substrate and the layer of silicon nitride using reactive evaporation and photoresist layers (230) having an undercut profile for liftoff. The method further includes removing the photoresist layers having the undercut profile, and depositing layers of WN (224) and Al over the underlying layers of W or Ni and W by sputtering.
    Type: Grant
    Filed: December 6, 2019
    Date of Patent: May 21, 2024
    Assignee: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
    Inventors: Wayne Mack Struble, Timothy Edward Boles, Jason Matthew Barrett, John Stephen Atherton
  • Patent number: 11990871
    Abstract: Apparatus and methods for an inverted Doherty amplifier operating at gigahertz frequencies are described. RF fractional bandwidth and signal bandwidth may be increased over a conventional Doherty amplifier configuration when impedance-matching components and an impedance inverter in an output network of the inverted Doherty amplifier are designed based on characteristics of the main and peaking amplifier and asymmetry factor of the amplifier.
    Type: Grant
    Filed: October 18, 2021
    Date of Patent: May 21, 2024
    Assignee: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
    Inventors: Gerard Bouisse, Christian Cassou
  • Publication number: 20240162873
    Abstract: An amplifier circuit has a variable gain amplifier including an input receiving an input signal and an open-conduction output, and an output stage including an input coupled to the open-conduction output of the variable gain amplifier and an output providing an output signal of the amplifier circuit. The variable gain amplifier has a first transistor and second transistor each having a control input receiving the input signal. A third transistor has a control terminal receiving a control signal and a first conduction terminal coupled to a first conduction terminal of the first transistor and a second conduction terminal being a first terminal of the open-conduction output. A fourth transistor has a control terminal receiving the control signal and a first conduction terminal coupled to a first conduction terminal of the second transistor and a second conduction terminal being a second terminal of the open-conduction output.
    Type: Application
    Filed: November 15, 2022
    Publication date: May 16, 2024
    Applicant: MACOM Technology Solutions Holdings, Inc.
    Inventors: Nguyen Nguyen, Trong Phan, William Allen
  • Patent number: 11978808
    Abstract: Vertical etch heterolithic integrated circuit devices are described. A method of manufacturing NIP diodes is described in one example. A P-type substrate is provided, and an intrinsic layer is formed on the P-type substrate. An oxide layer is formed on the intrinsic layer, and one or more openings are formed in the oxide layer. One or more N-type regions are implanted in the intrinsic layer through the openings in the oxide layer. The N-type regions form cathodes of the NIP diodes. A dielectric layer deposited over the oxide layer is selectively etched away with the oxide layer to expose certain ranges of the intrinsic layer to define a geometry of the NIP diodes. The intrinsic layer and the P-type substrate are vertically etched away within the ranges to expose sidewalls of the intrinsic layer and the P-type substrate. The P-type substrate forms the anodes of the NIP diodes.
    Type: Grant
    Filed: May 2, 2022
    Date of Patent: May 7, 2024
    Assignee: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
    Inventors: Timothy Edward Boles, James J. Brogle, Margaret Mary Barter, David Hoag, Michael G. Abbott
  • Patent number: 11967936
    Abstract: A semiconductor device package includes a plurality of input leads, a plurality of transistor amplifier dies having inputs respectively coupled to the plurality of input leads, and a combined output lead configured to combine output signals received from the plurality of transistor amplifier dies and output a combined signal.
    Type: Grant
    Filed: May 6, 2021
    Date of Patent: April 23, 2024
    Assignee: MACOM Technology Solutions Holdings, Inc.
    Inventors: Marvin Marbell, Jonathan Chang
  • Publication number: 20240125847
    Abstract: Aspects of the present disclosure describe a voice coil actuated leaf spring prober that advantageously may be operated to probe every individual device (device under test—DUT) comprising a contemporary wafer. The prober according to aspects of the present disclosure includes one or more probe needles attached in an electrically isolated arrangement to an end of a horizontal-U-shaped, recurved, leaf spring arrangement. The prober includes—for example—a voice coil actuator positioned within the horizontal-U-shaped portion of the leaf spring which—when operated—results in leaf spring displacement and probe needle movement such that it may mechanically/electrically contact the DUT.
    Type: Application
    Filed: September 20, 2023
    Publication date: April 18, 2024
    Applicant: MACOM Technology Solutions Holdings, Inc.
    Inventors: Timothy James VANDERWERF, Alex G CHERNYAKOV
  • Patent number: 11962439
    Abstract: A system for receiving signals transmitted via serial links includes an equalizer for accessing a digitized communications signal and producing an equalized output signal, and a fast equalization module for determining output data corresponding to the communications signal. The fast equalization module includes a filter to access an output of the equalizer, a slicer module to access an output of the filter and produce a data output corresponding to the communications signal, a lookup table to provide filtering coefficients to the filter, and a coefficient improvement module to improve the coefficients based on an error signal from the filter. The coefficient improvement module is configured to update the coefficients in the lookup table.
    Type: Grant
    Filed: March 20, 2020
    Date of Patent: April 16, 2024
    Assignee: MACOM Technology Solutions Holdings, Inc.
    Inventors: Yehuda Azenkot, Georgios Takos, Bart R Zeydel
  • Patent number: 11961888
    Abstract: Extrinsic structures formed outside the active regions of active devices can influence aging characteristics and performance of the active devices. An example integrated device including such an intrinsic structure includes a semiconductor device having an active region in a conduction layer, an isolation region in the conduction layer, an insulating layer formed over at least a portion of the active region and over at least a portion of the isolation region, a via outside the active region, and a conductive interconnect. The isolation region extends around the semiconductor device in an area outside the active region. The via extends through the insulating layer and down to the isolation region in the conduction layer, and the conductive interconnect is formed directly on the isolation region in the conduction layer.
    Type: Grant
    Filed: August 6, 2019
    Date of Patent: April 16, 2024
    Assignee: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
    Inventors: Allen W. Hanson, Chuanxin Lian, Wayne Mack Struble
  • Patent number: 11947200
    Abstract: The present disclosure relates to optical phase modulation devices. The optical phase modulation devices may include a heater resistance which induces a phase change and control systems and methods of controlling the induced phase change.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: April 2, 2024
    Assignee: MACOM Technology Solutions Holdings, Inc.
    Inventors: Quazi Ikram, Ronald Scott Karfelt, Steven Nguyen, Nicholas Karfelt, Saman Jafarlou, Swetha Babu
  • Patent number: 11942518
    Abstract: Semiconductor structures and devices in III-nitride materials are described herein, including material structures comprising III-nitride material regions (e.g., gallium nitride material regions). In certain cases, the material structures comprise substrates having relatively high electrical conductivities. In other cases, the material structures comprise substrates having relatively high resistivities. Certain embodiments include one or more features that reduce the degree to which thermal runaway occurs, which can enhance device performance including at elevated flange temperatures. Some embodiments include one or more features that reduce the degree of capacitive coupling exhibited during operation. For example, in some embodiments, relatively thick III-nitride material regions and/or relatively small ohmic contacts are employed.
    Type: Grant
    Filed: June 1, 2021
    Date of Patent: March 26, 2024
    Assignee: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
    Inventors: Timothy E. Boles, Wayne Mack Struble
  • Patent number: 11936342
    Abstract: A semiconductor device package includes a plurality of input leads and an output lead, a plurality of transistor amplifier dies having inputs respectively coupled to the plurality of input leads, and a combination circuit configured to combine output signals received from the plurality of transistor amplifier dies and output a combined signal to the output lead.
    Type: Grant
    Filed: May 6, 2021
    Date of Patent: March 19, 2024
    Assignee: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
    Inventors: Marvin Marbell, Jonathan Chang, Haedong Jang, Qianli Mu, Michael LeFevre, Jeremy Fisher, Basim Noori
  • Patent number: 11929364
    Abstract: Semiconductor structures with reduced parasitic capacitance between interconnects and ground, for example, are described. In one case, a semiconductor structure includes a substrate and a low dielectric constant material region in the substrate. The low dielectric constant material region is positioned between a first device area in the semiconductor structure and a second device area in the semiconductor structure. The semiconductor structure also includes a III-nitride material layer over the substrate. The III-nitride material layer extends over the substrate in the first device area, over the low dielectric constant material region, and over the substrate in the second device area. The semiconductor structure can also include a first device formed in the III-nitride material layer in the first device area, a second device in the III-nitride material layer in the second device area, and an interconnect formed over the low dielectric constant material region.
    Type: Grant
    Filed: September 20, 2021
    Date of Patent: March 12, 2024
    Assignee: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
    Inventors: Gabriel R. Cueva, Timothy E. Boles, Wayne Mack Struble
  • Patent number: 11929408
    Abstract: Various embodiments are disclosed for improved and structurally optimized transistors, such as RF power amplifier transistors. A transistor may include a drain metal portion raised from a surface of a substrate, a drain metal having a notched region, a gate manifold body with angled gate tabs extending from the gate manifold, and/or a source-connected shielding. The transistor may include a high-electron-mobility transistor (HEMT), a gallium nitride (GaN)-on-silicon transistor, a GaN-on-silicon-carbide transistor, or other type of transistor.
    Type: Grant
    Filed: May 14, 2020
    Date of Patent: March 12, 2024
    Assignee: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
    Inventors: Shamit Som, Wayne Mack Struble, Jason Matthew Barrett, Nishant R Yamujala, John Stephen Atherton
  • Patent number: 11929317
    Abstract: New types, structures, and arrangements of capacitor networks for harmonic control and other purposes are presented. In one example, an integrated device includes a capacitor network and one or more power devices. The capacitor network includes a bond pad and metal-insulator-metal (MIM) capacitors. The capacitors include a first metal layer, a second metal layer, an insulator layer between the first and second metal layers, and one or more through-substrate vias. The first metal layer is coupled to the bond pad, and the second metal layer is coupled to a ground plane on a bottom side of the substrate by the vias. A number of capacitors can be arranged around the bond pad in the capacitor network for a tailored capacitance. A matching network in the integrated device can incorporate the capacitor network to reduce loss, provide better harmonic termination, and achieve better phase alignment for the power devices.
    Type: Grant
    Filed: December 7, 2020
    Date of Patent: March 12, 2024
    Assignee: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
    Inventor: Prity Kirit Patel
  • Patent number: 11923462
    Abstract: Various aspects of Schottky diodes are described. The diodes are capable of withstanding reverse-bias voltages of up to and in excess of 2000 V with reverse current leakage as low as 0.4 microamp/millimeter in some cases among other aspects. In one example, a Schottky diode includes a conduction layer, a first layer over the conduction layer, a second layer over the first layer, a first cathode and a second cathode spaced apart and in electrical contact with the conduction layer, and an anode over the second layer between the first cathode and the second cathode. The first cathode and the second cathode can be electrically connected to each other as a cathode of the Schottky diode.
    Type: Grant
    Filed: March 24, 2021
    Date of Patent: March 5, 2024
    Assignee: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
    Inventors: Timothy E. Boles, Douglas Carlson, Anthony Kaleta
  • Publication number: 20240061172
    Abstract: An arrayed waveguide grating device includes an input coupler configured to receive a light signal and split the light signal into a plurality of output light signals. The device also includes a plurality of waveguides optically connected to the input coupler, each waveguide having a plurality of waveguide portions having respective sensitivities to variance in one or more parameters associated with operating of the optical arrayed grating device. Lengths of the respective portions are determined such that each waveguide applies a respective phase shift to the output light signal that propagates through the waveguide and the plurality of waveguides have at least substantially same change in phase shift with respective changes in the one or more parameters associated with operation of the device. An output coupler is optically connected to the plurality of waveguides to map respective light signals output from the plurality of waveguides to respective focal positions.
    Type: Application
    Filed: November 1, 2023
    Publication date: February 22, 2024
    Applicant: MACOM Technology Solutions Holdings, Inc.
    Inventor: Sean P. Anderson
  • Patent number: 11909359
    Abstract: An enhanced current mirror can be utilized to accurately control a bias current associated with an amplifier. A current controller component (CCC) can employ the enhanced current mirror and can be associated with the amplifier. The CCC can comprise a comparator that can compare an adjusted supply voltage level to a reference voltage level, the adjusted supply voltage level relating to a supply voltage level of a supply voltage supplied to the amplifier and CCC. The CCC can control switching of an operational state of a transistor of the comparator to switch in or out a resistance of a reference resistor component associated with the supply voltage, based on a result of the comparison of the adjusted supply voltage level to the reference voltage level, to facilitate accurately controlling an amount of bias current associated with the amplifier. The CCC and amplifier can be situated on the same die.
    Type: Grant
    Filed: October 7, 2021
    Date of Patent: February 20, 2024
    Assignee: MACOM Technology Solutions Holdings, Inc.
    Inventor: Jean-Marc Mourant
  • Patent number: 11899253
    Abstract: Example polarization splitter and rotator devices are described. In one example, an optical apparatus includes a splitter configured to split a light signal into a first signal having a first polarization and a second signal having a second polarization, a polarization rotator configured to rotate the second polarization of the second signal into a third polarization, and a polarization mode converter configured to convert the third polarization of the second signal into the first polarization. In certain aspects of the embodiments, the splitter can be a curved multi-mode inference (MMI) polarization splitter, and the polarization rotator comprises input and output ports, with the output port being wider than the input port. The polarization mode converter can be an asymmetrical waveguide taper mode converter. The devices described herein can overcome the deficiencies of conventional devices and provide low insertion loss, flat and/or wide wavelength response, high fabrication tolerance, and compact size.
    Type: Grant
    Filed: May 26, 2021
    Date of Patent: February 13, 2024
    Assignee: MACOM Technology Solutions Holdings, Inc.
    Inventors: Yunchu Li, Austin G. Griffith, Rich R. Grzybowski
  • Publication number: 20240039530
    Abstract: A multi-stage driver circuit has a transmission line coupled to an output of the multi-stage driver circuit. The transmission line has inductive elements and programmable capacitive elements selected to shape the transmitted data signal. The programmable capacitive elements have a first capacitor with a first terminal coupled to a first power supply conductor, and a first transistor with a first conduction terminal coupled to a second terminal of the first capacitor, and a second conduction terminal coupled to a second power supply conductor. The programmable capacitive elements have a register with a first output coupled to a control terminal of the first transistor. The programmable capacitive elements are selected to shape the transmitted data signal by observing operational dynamics of the multi-stage driver circuit.
    Type: Application
    Filed: May 8, 2023
    Publication date: February 1, 2024
    Applicant: MACOM Technology Solutions Holdings, Inc.
    Inventors: David Foley, Merrick Brownlee