Patents Assigned to MARUSHIN-INDUSTRY CO., LTD.
  • Retainer ring used for polishing a structure for manufacturing magnetic head, and polishing method using the same
    Publication number: 20090247060
    Abstract: Disclosed is a polishing method for polishing a surface of a structure for magnetic-head manufacture by CMP in the process of manufacturing a magnetic head using a ceramic substrate made of a ceramic material containing AlTiC, the structure including the ceramic substrate and one or more layers formed thereon, and having the surface to be polished. The polishing method uses a retainer ring made of a ceramic material containing AlTiC.
    Type: Application
    Filed: March 31, 2008
    Publication date: October 1, 2009
    Applicants: TDK CORPORATION, MARUSHIN-INDUSTRY CO., LTD.
    Inventors: Hiroki Aritomo, Tetsuji Hori, Akira Miyasaka, Youji Hirao