Patents Assigned to Maxam, Inc.
  • Method of monolithically fabricating a microspectrometer with integrated detector
    Patent number: 5909280
    Abstract: The present invention relates to microfabricated spectrometers including methods of making and using same. Microspectrometers can be formed in a single chip in which detectors and light sources can be monolithically integrated. The microspectrometer can be integrated into a sensor system to measure the optical and physical properties of solids and fluids.
    Type: Grant
    Filed: February 16, 1994
    Date of Patent: June 1, 1999
    Assignee: Maxam, Inc.
    Inventor: Paul M. Zavracky