Abstract: A plasma processing apparatus, for performing a plasma processing on a target substrate by generating an inductively coupled plasma of a processing gas in a depressurized processing chamber, includes: a mounting table; a gas supply unit; a gas exhaust unit; a planar high frequency antenna disposed opposite to the mounting table with a plate-shaped dielectric member therebetween and a shield member covering the high frequency antenna. The high frequency antenna includes an inner antenna element provided at a central portion of a region above the plate-shaped dielectric member and an outer antenna element provided at an edge portion to surround a periphery of the inner antenna element. Further, two ends of each of the antenna elements are open ends and the antenna elements are grounded at central points thereof or points close thereto to resonate at ½ wavelengths of high frequencies from individual high frequency power supplies.

Abstract: A plasma processing apparatus, for performing a plasma processing on a target substrate by generating an inductively coupled plasma of a processing gas in a depressurized processing chamber, includes: a mounting table; a gas supply unit; a gas exhaust unit; a planar high frequency antenna disposed opposite to the mounting table with a plate-shaped dielectric member therebetween and a shield member covering the high frequency antenna. The high frequency antenna includes an inner antenna element provided at a central portion of a region above the plate-shaped dielectric member and an outer antenna element provided at an edge portion to surround a periphery of the inner antenna element. Further, two ends of each of the antenna elements are open ends and the antenna elements are grounded at central points thereof or points close thereto to resonate at ½ wavelengths of high frequencies from individual high frequency power supplies.

Abstract: A balancing force adjusting device for a window which raises and lowers includes a case, a horizontal gear member, a click member and a vertical gear member. The horizontal gear member is rotatably arranged around the horizontal axis in a predetermined position with this case, and a ratchet gear is formed around a shaft portion of the horizontal gear member. The click member is rotatably arranged in a predetermined angular range around the horizontal axis in a position adjacent to the horizontal gear member, and has two clicks extending in the horizontal gear member direction and respectively arranged on both the sides of an intermediate shaft portion. The vertical gear member is engaged with the horizontal gear member. One side click of the click member is biasedly engaged with the ratchet gear formed in the horizontal gear member.

Abstract: A balancing force adjusting device for a window which raises and lowers includes a case, a horizontal gear member, a click member and a vertical gear member. The horizontal gear member is rotatably arranged around the horizontal axis in a predetermined position with this case, and a ratchet gear is formed around a shaft portion of the horizontal gear member. The click member is rotatably arranged in a predetermined angular range around the horizontal axis in a position adjacent to the horizontal gear member, and has two clicks extending in the horizontal gear member direction and respectively arranged on both the sides of an intermediate shaft portion. The vertical gear member is engaged with the horizontal gear member. One side click of the click member is biasedly engaged with the ratchet gear formed in the horizontal gear member.

Abstract: A photo-curable resin composition for use in optical molding for building up a three-dimensional product by scanning a surface of a liquid photo-curable resin with a beam of radiant energy of suitable intensity and wavelength so as thereby to cure and solidify a liquid layer of the liquid photo-curable resin and forming stacked integrated laminae of cured resin as the three-dimensional product comprises a photo-curable resin material curable, a photo-initiator capable of inducing said photo-curable resin to cause a curing reaction with radiant energy and a fluorescent brightener.