Patents Assigned to Memscap
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Patent number: 10216150Abstract: An apparatus for an atomic clock includes first and second distinctive substrates, each having at least a planar surface substantially parallel therebetween. The apparatus also includes a medium having particles capable of undergoing energetic transition between at least two energy levels, said medium being located in the space defined between the planar surfaces. It further includes a magnetic device arranged to the first substrate and generating at least in the volume of the medium a predetermined static magnetic field B the direction of which is substantially parallel or perpendicular to the planar surfaces and an excitation device arranged to the second substrate and generating an excitation magnetic field H at, at least an excitation frequency, the direction of said excitation magnetic field H in the volume of the medium being substantially orthogonal to said direction of the static magnetic field B.Type: GrantFiled: July 1, 2016Date of Patent: February 26, 2019Assignee: MEMSCAPInventor: Nicolas Bertsch
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Patent number: 8887382Abstract: The invention relates to a pendulous accelerometer including a pendulous electrode formed in a substrate, at least one counter electrode, and an encapsulation cover. The at least one counter electrode is formed under the cover, and spacers are positioned between the cover and the substrate.Type: GrantFiled: December 5, 2008Date of Patent: November 18, 2014Assignee: MEMSCAPInventors: Béatrice Wenk, Jean-Francois Veneau, Greg Hames
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Patent number: 8300384Abstract: The invention relates to an air variable capacitor including a mobile comb and a fixed comb. Each of the combs include a body and teeth each having an end fixed to the body and free end. The teeth of the mobile and fixed combs being interdigital and an the air-gap of the capacitor is adjustable by the transverse movement of the teeth of the mobile comb. The teeth of the mobile comb have geometric differences between one another, in order to attenuate the transverse resonance modes of the mobile comb.Type: GrantFiled: December 8, 2008Date of Patent: October 30, 2012Assignee: MEMSCAPInventor: Béatrice Wenk
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Patent number: 7572222Abstract: The invention relates to a device for analysing the physico-chemical properties of a cutaneous surface comprising: a group of sensors which are assembled at an acquisition zone (4), opposite which the cutaneous surface to be analysed is positioned; and a processing unit (1) which is interfaced with the group of sensors, said unit being equipped with analysis means that can be used to determine certain physico-chemical properties of the cutaneous surface to be analysed using signals produced by said group of sensors.Type: GrantFiled: April 16, 2004Date of Patent: August 11, 2009Assignees: MEMSCAP, Laboratoires La LicorneInventors: Jean-Michel Karam, Eric Viviant
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Publication number: 20090145227Abstract: The invention relates to a pendulous accelerometer including a pendulous electrode formed in a substrate, at least one counter electrode, and an encapsulation cover. The at least one counter electrode is formed under the cover, and spacers are positioned between the cover and the substrate.Type: ApplicationFiled: December 5, 2008Publication date: June 11, 2009Applicant: MEMSCAPInventors: Beatrice Wenk, Jean-Francois Veneau, Greg Hames
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Publication number: 20090147436Abstract: The invention relates to an air variable capacitor including a mobile comb and a fixed comb. Each of the combs include a body and teeth each having an end fixed to the body and free end. The teeth of the mobile and fixed combs being interdigital and an the air-gap of the capacitor is adjustable by the transverse movement of the teeth of the mobile comb. The teeth of the mobile comb have geometric differences between one another, in order to attenuate the transverse resonance modes of the mobile comb.Type: ApplicationFiled: December 8, 2008Publication date: June 11, 2009Applicant: MEMSCAPInventor: Beatrice Wenk
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Patent number: 7432788Abstract: A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.Type: GrantFiled: June 3, 2004Date of Patent: October 7, 2008Assignee: MEMSCAP, Inc.Inventors: Konstantin Glukh, Robert L. Wood, Vivek Agrawal
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Patent number: 7332197Abstract: Microneedle arrays are fabricated by providing a sacrificial mold including a substrate and an array of posts, preferably solid posts, projecting therefrom. A first material is coated on the sacrificial mold including on the substrate and on the array of posts. The sacrificial mold is removed to provide an array of hollow tubes projecting from a base. The inner and outer surfaces of the array of hollow tubes are coated with a second material to create the array of microneedles projecting from the base. The sacrificial mold may be fabricated by fabricating a master mold, including an array of channels that extend into the master mold from a face thereof. A third material is molded into the channels and on the face of the master mold, to create the sacrificial mold. The sacrificial mold then is separated from the master mold. Alternatively, wire bonding may be used to wire bond an array of wires to a substrate to create the sacrificial mold.Type: GrantFiled: November 26, 2002Date of Patent: February 19, 2008Assignee: Memscap S.A.Inventors: Robert L. Wood, Henry A. Wynands, Karen W. Markus
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Publication number: 20060131424Abstract: The invention relates to a marking device (1) comprising an element which is made from a semi-conductor material having patterns (2-4, 12-14) which are hollowed out of the face thereof, the arrangement of said patterns being representative of at least one piece of information. The depth of the patterns (2-4, 12-14) can vary from one pattern to another and can adopt a plurality of different values which are representative of an additional piece of information. The invention also relates to an apparatus which is used to detect such marks and to articles having a marking device of said type integrated into the material forming same.Type: ApplicationFiled: January 30, 2006Publication date: June 22, 2006Applicant: MEMSCAPInventors: Philippe Helin, Pascal Ransch
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Patent number: 6942814Abstract: Methods of forming optoelectronic devices include forming an electrically conductive layer on a first surface of a substrate and forming a mirror backing layer from the electrically conductive layer by forming an endless groove that extends through the electrically conductive layer. A step is then performed to remove a portion of the substrate at a second surface thereof, which extends opposite the first surface. This step exposes a front surface of the mirror backing layer. An optically reflective mirror surface is then formed on the front surface of the mirror backing layer.Type: GrantFiled: December 2, 2002Date of Patent: September 13, 2005Assignee: Memscap, S.A.Inventors: Robert L. Wood, Edward A. Hill
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Patent number: 6847756Abstract: An optical switching matrix, including optical input fibers (12) and optical output fibers (14) oriented substantially perpendicular to each other, moveable mirrors (5, 13) placed at the intersections of the directions defined by the various optical fibers, each mirror (13) being capable of moving in order to reflect a beam coming from an optical input fiber, bound for an optical output fiber, and a set of channels defined between the mirrors, inside which the various beams are propagated before and after having encountered the mirrors. The set of mirrors are made on a first substrate wafer (2) that is covered with a second substrate wafer (20), and the various channels (38) are formed between protruding zones (34) present under the second substrate wafers. The protruding zones include housings (33) inside which the moveable mirrors are able to move.Type: GrantFiled: March 18, 2003Date of Patent: January 25, 2005Assignee: MEMSCAPInventors: Diaa Khalil, Kareem Madkour, Bassam Saadany, Tarek Badreldin, Philippe Helin
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Patent number: 6838970Abstract: An inductor assembly for use in RF and microwave circuits wherein the inductor is formed of a first spiral wound metal strip that is mounted on a flat surface of a quartz substrate. A metal strip is formed of copper and has a height above the flat surface that is about 30 microns.Type: GrantFiled: July 26, 2002Date of Patent: January 4, 2005Assignees: Memscap, Planhead-Silmag PHSInventors: Laurent Basteres, Ahmed Mhani, François Valentin, Jean-Michel Karam
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Publication number: 20040263297Abstract: A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.Type: ApplicationFiled: June 3, 2004Publication date: December 30, 2004Applicant: MEMSCAP, Inc.Inventors: Konstantin Glukh, Robert L. Wood, Vivek Agrawal
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Publication number: 20040199058Abstract: The invention relates to a device for analysing the physico-chemical properties of a cutaneous surface comprising: a group of sensors which are assembled at an acquisition zone (4), opposite which the cutaneous surface to be analysed is positioned; and a processing unit (1) which is interfaced with the group of sensors, said unit being equipped with analysis means that can be used to determine certain physico-chemical properties of the cutaneous surface to be analysed using signals produced by said group of sensors.Type: ApplicationFiled: April 16, 2004Publication date: October 7, 2004Applicants: MEMSCAP, Laboratoires La LicorneInventors: Jean-Michel Karam, Eric Viviant
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Publication number: 20040168530Abstract: The invention relates to a pressure dome for connecting a transducer with a fluid system comprising an inlet channel and an outflow channel as well as a measuring chamber in which a fluid is able to circulate and which has a measuring membrane. To improve fluid circulation and simplify handling, the measuring chamber ceiling is configured in the shape of a calotte and the pressure dome is removably coupled to the transducer housing by means of a snap connection.Type: ApplicationFiled: March 11, 2004Publication date: September 2, 2004Applicant: MEMSCAP ASInventors: Manfred Adolfs, Raymond Glocker
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Patent number: 6740537Abstract: A process for fabricating a microelectromechanical optical component from a silicon substrate is disclosed. The component comprises optical propagation guides; a wall which can move with respect to the propagation guides; and an electrostatic actuator associated with return means formed by at least one beam capable of causing the moving wall to move with respect to the rest of the substrate. The substrate is single-crystal silicon having (111) crystallographic planes parallel to the plane of the substrate. The process comprises a first series of deep reactive ion etching steps during which the heights of the moving wall, of the electrodes of the actuator, and of the beams of the return means of the actuator are defined with different values, and a second wet etching step, making it possible to free the moving wall, the electrodes and the beams from the rest of the substrate.Type: GrantFiled: July 26, 2002Date of Patent: May 25, 2004Assignee: MEMSCAPInventor: Philippe Helin
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Patent number: 6725726Abstract: The invention relates to a pressure dome for connecting a transducer with a fluid system comprising an inlet channel and an outlet flow as well as a measuring chamber in which a fluid is able to circulate and which has a measuring membrane. To improve fluid irculation and simplify handling, the measuring chamber ceiling is configured in the shape of a calotte and the pressure dome is removably coupled to the transducer housing by means of a snap connection.Type: GrantFiled: November 15, 2000Date of Patent: April 27, 2004Assignee: Memscap ASInventors: Manfred Adolfs, Raymond Glocker
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Patent number: 6727138Abstract: The invention relates to a process for fabricating electronic components incorporating an inductive microcomponent placed on top of a substrate. Such a component comprises: a layer (10) of material having a low relative permittivity, lying on the top face of the substrate (1); a number of metal turns (30-31) defined on top of the layer (10) of material having a low relative permittivity; and a copper diffusion barrier layer (15) interposed between the metal turns (30-31) and the layer of material having a low relative permittivity.Type: GrantFiled: November 25, 2002Date of Patent: April 27, 2004Assignee: MemscapInventors: Lionel Girardie, Jean-Baptiste David
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Patent number: 6713199Abstract: A multilayer structure, used especially as a material of high relative permittivity, includes a plurality of separate layers, each having a thickness of less than 500 Å, and based on hafnium dioxide (HfD2), zirconium dioxide (ZrO2) and alumina (Al2O3). In practice, the hafnium dioxide, zirconium dioxide and alumina layers form alloys of formula HfxZrAlyOz. Advantageously, the stoichiometry of the HfxZrAlyOz alloys varies from one layer to another.Type: GrantFiled: December 24, 2002Date of Patent: March 30, 2004Assignee: MemscapInventor: Lionel Girardie
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Patent number: 6650530Abstract: A microcomponent which includes a capacitive component, of at least two elementary capacitors (C1, C2, C3, C4) which are connected in series. Each elementary capacitor is made up of two plates namely: a plate (10) fixed with respect to the rest of the microcomponent; and a second plate (12), part of which is capable of being displaced with respect to the first fixed plate (10) due to the effect of a control signal, so as to vary the value of the capacitance of the elementary capacitor C1. The control signals for the various elementary capacitors are generated independently so as to vary the overall capacitance of the capacitor by independent variation of the capacitances of each elementary capacitor.Type: GrantFiled: November 20, 2001Date of Patent: November 18, 2003Assignee: MemscapInventors: Bertrand Guillon, Pierre Blondy